公开(公告)号：US20170184864A1

公开(公告)日：2017-06-29

申请号：US15459323

申请日：2017-03-15

申请人： IPG Photonics Corporation

发明人： Michael von Dadelszen ,  Jeffery D. Kmetec

IPC分类号： G02B27/09 ,  G02F1/35 ,  G02B1/02

CPC分类号： G02B27/095 ,  G02B1/02 ,  G02B27/0916 ,  G02F1/3501 ,  G02F2001/3509

摘要： An optical output coupler includes an uncoated plano-concave lens having a planar side and a concave side. An optical axis of the plano-concave lens is tilted at or near a Brewster angle relative to a beam axis. A first optical element is configured to focus a beam of radiation emerging from the planar side of the plano-concave lens along a first axis that is perpendicular to the beam axis. The first optical element is disposed between the planar side of the plano-concave lens and a second optical element. The second optical element is configured to focus a beam of radiation emerging from the planar side of the plano-concave lens along a second axis that is perpendicular to the beam axis, wherein the second axis is different from the first axis.

公开(公告)号：USRE48398E1

公开(公告)日：2021-01-19

申请号：US16535316

申请日：2019-08-08

申请人： IPG Photonics Corporation

发明人： Alexey Avdokhin ,  Yuri Erokhin ,  Manuel Leonardo ,  Alexander Limanov ,  Igor Samartsev ,  Michael von Dadelszen

IPC分类号： B23K26/04 ,  H01S3/30 ,  H01L21/02 ,  H01S3/067 ,  H01S3/094 ,  H01S3/16

摘要： The inventive system for crystallizing an amorphous silicon (a-Si) film is configured with a quasi-continuous wave fiber laser source operative to emit a film irradiating pulsed beam. The fiber laser source is operative to emit a plurality of non-repetitive pulses incident on the a-Si. In particular, the fiber laser is operative to emit multiple discrete packets of film irradiating light at a burst repetition rate (BRR), and a plurality of pulses within each packet emitted at a pulse repetition rate (PRR) which is higher than the BRR. The pulse energy, pulse duration of each pulse and the PRR are controlled so that each packet has a desired packet temporal power profile (W/cm2) and packet energy sufficient to provide transformation of a-Si to polysilicon (p-Si) at each location of the film which is exposed to at least one packets.

公开(公告)号：US09941120B2

公开(公告)日：2018-04-10

申请号：US14790170

申请日：2015-07-02

申请人： IPG PHOTONICS CORPORATION

发明人： Alexey Avdokhin ,  Yuri Erokhin ,  Manuel Leonardo ,  Alexander Limanov ,  Igor Samartsev ,  Michael von Dadelszen

IPC分类号： B23K26/04 ,  H01S3/30 ,  H01L21/02 ,  H01S3/067 ,  H01S3/094 ,  H01S3/16

CPC分类号： H01L21/02686 ,  H01L21/02532 ,  H01S3/06745 ,  H01S3/06754 ,  H01S3/094003 ,  H01S3/1618

摘要： The inventive system for crystallizing an amorphous silicon (a-Si) film is configured with a quasi-continuous wave fiber laser source operative to emit a film irradiating pulsed beam. The fiber laser source is operative to emit a plurality of non-repetitive pulses incident on the a-Si. In particular, the fiber laser is operative to emit multiple discrete packets of film irradiating light at a burst repetition rate (BRR), and a plurality of pulses within each packet emitted at a pulse repetition rate (PRR) which is higher than the BRR. The pulse energy, pulse duration of each pulse and the PRR are controlled so that each packet has a desired packet temporal power profile (W/cm2) and packet energy sufficient to provide transformation of a-Si to polysilicon (p-Si) at each location of the film which is exposed to at least one packets.

公开(公告)号：US09851570B2

公开(公告)日：2017-12-26

申请号：US15459323

申请日：2017-03-15

申请人： IPG Photonics Corporation

发明人： Michael von Dadelszen ,  Jeffery D. Kmetec

IPC分类号： G02B27/09 ,  G02F1/35 ,  G02B1/02

CPC分类号： G02B27/095 ,  G02B1/02 ,  G02B27/0916 ,  G02F1/3501 ,  G02F2001/3509

摘要： An optical output coupler includes an uncoated plano-concave lens having a planar side and a concave side. An optical axis of the plano-concave lens is tilted at or near a Brewster angle relative to a beam axis. A first optical element is configured to focus a beam of radiation emerging from the planar side of the plano-concave lens along a first axis that is perpendicular to the beam axis. The first optical element is disposed between the planar side of the plano-concave lens and a second optical element. The second optical element is configured to focus a beam of radiation emerging from the planar side of the plano-concave lens along a second axis that is perpendicular to the beam axis, wherein the second axis is different from the first axis.

公开(公告)号：US20160013057A1

公开(公告)日：2016-01-14

申请号：US14790170

申请日：2015-07-02

申请人： IPG PHOTONICS CORPORATION

发明人： Alexey AVDOKHIN ,  Yuri EROKHIN ,  Manuel LEONARDO ,  Alexander LIMANOV ,  Igor SAMARTSEV ,  Michael von Dadelszen

IPC分类号： H01L21/02 ,  H01L21/67 ,  H01L29/04 ,  H01S3/11 ,  H01S3/0941 ,  H01S3/094 ,  H01S3/16 ,  H01L29/16 ,  H01S3/067

CPC分类号： H01L21/02686 ,  H01L21/02532 ,  H01S3/06745 ,  H01S3/06754 ,  H01S3/094003 ,  H01S3/1618

摘要： The inventive system for crystallizing an amorphous silicon (a-Si) film is configured with a quasi-continuous wave fiber laser source operative to emit a film irradiating pulsed beam. The fiber laser source is operative to emit a plurality of non-repetitive pulses incident on the a-Si. In particular, the fiber laser is operative to emit multiple discrete packets of film irradiating light at a burst repetition rate (BRR), and a plurality of pulses within each packet emitted at a pulse repetition rate (PRR) which is higher than the BRR. The pulse energy, pulse duration of each pulse and the PRR are controlled so that each packet has a desired packet temporal power profile (W/cm2) and packet energy sufficient to provide transformation of a-Si to polysilicon (p-Si) at each location of the film which is exposed to at least one packets.

摘要翻译： 本发明的用于结晶非晶硅（a-Si）膜的系统由准连续波长的光纤激光源构成，该激光源可操作地发射照射脉冲光束的膜。 光纤激光源可操作地发射入射到a-Si上的多个非重复脉冲。 特别地，光纤激光器以突发重复率（BRR）发射多个离散的薄膜照射光束的分组，并且以比BRR高的脉冲重复率（PRR）发射每个分组内的多个脉冲。 控制脉冲能量，每个脉冲的脉冲持续时间和PRR，使得每个分组具有期望的分组时间功率分布（W / cm 2）和分组能量，其足以在每个分组处提供a-Si到多晶硅（p-Si）的转变 暴露于至少一个数据包的电影的位置。