公开(公告)号：US09518319B2

公开(公告)日：2016-12-13

申请号：US14203182

申请日：2014-03-10

申请人： Intermolecular Inc. ,  Guardian Industries Corp.

发明人： Guowen Ding ,  Jeremy Cheng ,  Tong Ju ,  Minh Huu Le ,  Daniel Schweigert ,  Zhi-Wen Sun ,  Yongli Xu ,  Guizhen Zhang

IPC分类号： B32B15/04 ,  B32B17/06 ,  C23C14/08 ,  G02F1/09 ,  B29D11/00 ,  G02B5/26 ,  C03C17/36 ,  C23C14/14 ,  E06B9/24

CPC分类号： G02B5/208 ,  B29D11/00865 ,  C03C17/36 ,  C03C17/3626 ,  C03C17/3639 ,  C03C17/3644 ,  C03C17/366 ,  C03C17/3681 ,  C03C23/007 ,  C03C2217/43 ,  C03C2217/48 ,  C03C2218/154 ,  C23C14/083 ,  C23C14/085 ,  C23C14/14 ,  C23C14/22 ,  E06B9/24 ,  E06B2009/2417 ,  E06B2009/2464 ,  G02B5/26 ,  G02F1/091 ,  G02F2001/094 ,  Y10T428/24975 ,  Y10T428/265

摘要： Disclosed herein are systems, methods, and apparatus for forming low emissivity panels. A first dielectric layer is disposed over a substrate and includes a bi-metal oxide having tin and bismuth or niobium. A seed layer is disposed directly on the first dielectric layer. A reflective layer including silver is disposed directly on the seed layer. A barrier layer is disposed above the reflective layer. The barrier layer includes one of a nickel chromium titanium aluminum alloy or a nickel chromium titanium aluminum oxide. The nickel chromium titanium aluminum alloy or the nickel chromium titanium aluminum oxide includes between about 5% and about 10% by weight nickel, between about 25% and about 30% by weight chromium, between about 30% and about 35% by weight titanium, and between about 30% and about 35% by weight aluminum.

摘要翻译： 本文公开了用于形成低发射率面板的系统，方法和装置。 第一电介质层设置在衬底上并且包括具有锡和铋或铌的双金属氧化物。 种子层直接设置在第一介电层上。 包括银的反射层直接设置在种子层上。 阻挡层设置在反射层上。 阻挡层包括镍铬钛铝合金或镍铬钛氧化铝中的一种。 镍铬钛铝合金或镍铬钛铝氧化物包括约5重量％至约10重量％的镍，约25重量％至约30重量％的铬，约30重量％至约35重量％的钛， 和约30重量％至约35重量％的铝。

公开(公告)号：US09790127B2

公开(公告)日：2017-10-17

申请号：US13804766

申请日：2013-03-14

申请人： INTERMOLECULAR INC. ,  GUARDIAN INDUSTRIES CORP.

发明人： Guowen Ding ,  Jeremy Cheng ,  Tong Ju ,  Minh Huu Le ,  Phil Lingle ,  Daniel Schweigert ,  Zhi-Wen Wen Sun ,  Guizhen Zhang

IPC分类号： C03C17/36

CPC分类号： C03C17/366 ,  C03C17/36 ,  C03C17/3639 ,  C03C17/3644 ,  C03C17/3652 ,  Y10T428/24975 ,  Y10T428/265

摘要： Low emissivity panels can include a separation layer of Zn2SnOx between multiple infrared reflective stacks. The low emissivity panels can also include NiNbTiOx as barrier layer. The low emissivity panels have high light to solar gain, color neutral, together with similar observable color before and after a heat treatment process.

公开(公告)号：US09703024B2

公开(公告)日：2017-07-11

申请号：US15346884

申请日：2016-11-09

申请人： Intermolecular Inc. ,  Guardian Industries Corp.

发明人： Guizhen Zhang ,  Brent Boyce ,  Jeremy Cheng ,  Guowen Ding ,  Muhammad Imran ,  Daniel Schweigert ,  Yongli Xu

IPC分类号： G02B5/20 ,  C03C17/36 ,  C03C23/00 ,  C23C14/08 ,  C23C14/14 ,  C23C14/22 ,  E06B9/24 ,  G02B5/26

CPC分类号： G02B5/208 ,  B29D11/00865 ,  C03C17/36 ,  C03C17/3626 ,  C03C17/3639 ,  C03C17/3644 ,  C03C17/366 ,  C03C17/3681 ,  C03C23/007 ,  C03C2217/43 ,  C03C2217/48 ,  C03C2218/154 ,  C23C14/083 ,  C23C14/085 ,  C23C14/14 ,  C23C14/22 ,  E06B9/24 ,  E06B2009/2417 ,  E06B2009/2464 ,  G02B5/26 ,  G02F1/091 ,  G02F2001/094 ,  Y10T428/24975 ,  Y10T428/265

摘要： Disclosed herein are systems, methods, and apparatus for forming low emissivity panels that may include a substrate and a reflective layer formed over the substrate. The low emissivity panels may further include a top dielectric layer formed over the reflective layer such that the reflective layer is formed between the top dielectric layer and the substrate. The top dielectric layer may include a ternary metal oxide, such as zinc tin aluminum oxide. The top dielectric layer may also include aluminum. The concentration of aluminum may be between about 1 atomic % and 15 atomic % or between about 2 atomic % and 10 atomic %. An atomic ratio of zinc to tin in the top dielectric layer may be between about 0.67 and about 1.5 or between about 0.9 and about 1.1.

公开(公告)号：US09499899B2

公开(公告)日：2016-11-22

申请号：US14139350

申请日：2013-12-23

申请人： INTERMOLECULAR INC. ,  Guardian Industries Corp.

发明人： Guizhen Zhang ,  Brent Boyce ,  Jeremy Cheng ,  Guowen Ding ,  Muhammad Imran ,  Minh Huu Le ,  Daniel Schweigert ,  Yongli Xu

IPC分类号： C23C14/08 ,  C03C17/36 ,  G02B5/26 ,  E06B9/24 ,  G02F1/09 ,  B29D11/00 ,  C23C14/14

CPC分类号： G02B5/208 ,  B29D11/00865 ,  C03C17/36 ,  C03C17/3626 ,  C03C17/3639 ,  C03C17/3644 ,  C03C17/366 ,  C03C17/3681 ,  C03C23/007 ,  C03C2217/43 ,  C03C2217/48 ,  C03C2218/154 ,  C23C14/083 ,  C23C14/085 ,  C23C14/14 ,  C23C14/22 ,  E06B9/24 ,  E06B2009/2417 ,  E06B2009/2464 ,  G02B5/26 ,  G02F1/091 ,  G02F2001/094 ,  Y10T428/24975 ,  Y10T428/265

摘要： Disclosed herein are systems, methods, and apparatus for forming low emissivity panels that may include a substrate and a reflective layer formed over the substrate. The low emissivity panels may further include a top dielectric layer formed over the reflective layer such that the reflective layer is formed between the top dielectric layer and the substrate. The top dielectric layer may include a ternary metal oxide, such as zinc tin aluminum oxide. The top dielectric layer may also include aluminum. The concentration of aluminum may be between about 1 atomic % and 15 atomic % or between about 2 atomic % and 10 atomic %. An atomic ratio of zinc to tin in the top dielectric layer may be between about 0.67 and about 1.5 or between about 0.9 and about 1.1.

摘要翻译： 本文公开了用于形成低辐射率面板的系统，方法和装置，其可以包括衬底和形成在衬底上的反射层。 低发射率面板还可以包括在反射层上形成的顶部电介质层，使得反射层形成在顶部电介质层和衬底之间。 顶部介电层可以包括三元金属氧化物，例如锌锡氧化铝。 顶部电介质层也可以包括铝。 铝的浓度可以在约1原子％至15原子％之间或约2原子％至10原子％之间。 顶部电介质层中锌与锡的原子比可以在约0.67至约1.5之间或约0.9至约1.1之间。

公开(公告)号：US10179946B2

公开(公告)日：2019-01-15

申请号：US15448620

申请日：2017-03-03

申请人： Guardian Industries Corp.

发明人： Gaurav Saraf ,  Scott Jewhurst ,  Guowen Ding ,  Daniel Schweigert ,  Minh Le ,  Guizhen Zhang ,  Daniel Lee ,  Cesar Clavero ,  Marcus Frank ,  Brent Boyce

IPC分类号： B32B15/04 ,  B32B17/06 ,  C23C14/34 ,  C23C14/18 ,  C23C14/08 ,  C23C14/06

摘要： A coated article includes a low emissivity (low-E) coating on a glass substrate. The low-E coating includes at least one infrared (IR) reflecting layer of a material such as silver, gold, or the like, and at least one high refractive index layer of or including NbBi. The high index layer (e.g., NBBiOx) is designed and deposited so as to be amorphous in the low-E coating, so as to better withstand optional heat treatment (HT) such as thermal tempering. The high index layer may be a transparent dielectric high index layer.

公开(公告)号：US10138158B2

公开(公告)日：2018-11-27

申请号：US15455163

申请日：2017-03-10

申请人： Guardian Industries Corp.

发明人： Guowen Ding ,  Guizhen Zhang ,  Daniel Schweigert ,  Daniel Lee ,  Scott Jewhurst ,  Cesar Clavero ,  Minh Le ,  Brent Boyce

IPC分类号： B32B15/04 ,  B32B17/06 ,  C03C17/34 ,  C03C17/00 ,  C23C14/34 ,  C23C14/08 ,  C23C14/06

摘要： A coated article includes a low emissivity (low-E) coating having at least one infrared (IR) reflecting layer of a material such as silver, gold, or the like, and a plurality of high refractive index dielectric layers of or including a nitride of Zr and Al. In certain example embodiments, the high refractive index dielectric layers of or including a nitride of Zr and Al may be amorphous or substantially amorphous so as to allow the low-E coating to better withstand optional heat treatment (HT) such as thermal tempering. In certain example embodiments, the low-E coating may be used in applications such as monolithic or insulating glass (IG) window unit, vehicle windows, of the like.

公开(公告)号：US10196735B2

公开(公告)日：2019-02-05

申请号：US15448739

申请日：2017-03-03

申请人： Guardian Industries Corp.

发明人： Guizhen Zhang ,  Daniel Schweigert ,  Guowen Ding ,  Daniel Lee ,  Cesar Clavero ,  Scott Jewhurst ,  Gaurav Saraf ,  Minh Le ,  Nestor P. Murphy ,  Marcus Frank

IPC分类号： B32B15/04 ,  B32B17/06 ,  C23C14/18 ,  C03C17/36 ,  C03C17/34

摘要： A coated article includes a low emissivity (low-E) coating having at least one infrared (IR) reflecting layer of a material such as silver, gold, or the like, and at least one high refractive index layer of or including titanium oxide and at least one additional metal. A doped titanium oxide layer(s) is designed and deposited in a manner so as to be amorphous or substantially amorphous (as opposed to crystalline) in the low-E coating, so as to better withstand optional heat treatment (HT) such as thermal tempering and reduce haze. The high index layer may be a transparent dielectric high index layer in preferred embodiments, which may be provided for antireflection purposes and/or color adjustment purposes, in addition to having thermal stability.

公开(公告)号：US10138159B2

公开(公告)日：2018-11-27

申请号：US15453944

申请日：2017-03-09

申请人： Guardian Industries Corp.

发明人： Guowen Ding ,  Daniel Schweigert ,  Minh Le ,  Brent Boyce

IPC分类号： C03C17/36 ,  B32B15/04 ,  B32B17/06

摘要： A coated article includes a low emissivity (low-E) coating having at least one infrared (IR) reflecting layer of a material such as silver, gold, or the like, and at least one high refractive index dielectric multilayer film. The high index dielectric multilayer film may be of or include a first high index layer of or including ZrSiN and/or ZrSiAlN, and a second high index layer of or including titanium oxide (e.g., TiO2). The first high index layer of or including ZrSiN and/or ZrSiAlN may be amorphous or substantially amorphous, and the second high index layer of or including titanium oxide may be substantially crystalline in certain example embodiments. The low-E coating may be used in applications such as monolithic or insulating glass (IG) window units, vehicle windows, or the like.

公开(公告)号：US09739915B2

公开(公告)日：2017-08-22

申请号：US14144915

申请日：2013-12-31

申请人： GUARDIAN INDUSTRIES CORP.

发明人： Guowen Ding ,  Jeremy Cheng ,  Muhammad Imran ,  Minh Huu Le ,  Daniel Schweigert ,  Yongli Xu ,  Guizhen Zhang

IPC分类号： C23C14/00 ,  C23C14/32 ,  G02B5/20 ,  G02F1/09 ,  B29D11/00 ,  G02B5/26 ,  C03C17/36 ,  C23C14/08 ,  C23C14/14 ,  E06B9/24 ,  C03C23/00 ,  C23C14/22

CPC分类号： G02B5/208 ,  B29D11/00865 ,  C03C17/36 ,  C03C17/3626 ,  C03C17/3639 ,  C03C17/3644 ,  C03C17/366 ,  C03C17/3681 ,  C03C23/007 ,  C03C2217/43 ,  C03C2217/48 ,  C03C2218/154 ,  C23C14/083 ,  C23C14/085 ,  C23C14/14 ,  C23C14/22 ,  E06B9/24 ,  E06B2009/2417 ,  E06B2009/2464 ,  G02B5/26 ,  G02F1/091 ,  G02F2001/094 ,  Y10T428/24975 ,  Y10T428/265

摘要： Disclosed herein are systems, methods, and apparatus for forming low emissivity panels. In some embodiments, a partially fabricated panel may be provided that includes a substrate, a reflective layer formed over the substrate, and a barrier layer formed over the reflective layer such that the reflective layer is formed between the substrate and the barrier layer. The barrier layer may include a partially oxidized alloy of three or more metals. A first interface layer may be formed over the barrier layer. A top dielectric layer may be formed over the first interface layer. The top dielectric layer may be formed using reactive sputtering in an oxygen containing environment. The first interface layer may prevent further oxidation of the partially oxidized alloy of the three or more metals when forming the top dielectric layer. A second interface layer may be formed over the top dielectric layer.

公开(公告)号：US09127348B2

公开(公告)日：2015-09-08

申请号：US14574755

申请日：2014-12-18

申请人： Intermolecular Inc.

发明人： Guizhen Zhang ,  Jeremy Cheng ,  Guowen Ding ,  Minh Huu Le ,  Daniel Schweigert ,  Yu Wang

IPC分类号： B32B15/04 ,  B32B17/06 ,  C23C14/08 ,  C23C14/22 ,  C03C17/36 ,  C23C14/14 ,  C23C14/00 ,  C23C14/04 ,  C23C14/34

CPC分类号： C23C14/22 ,  C03C17/36 ,  C03C17/3605 ,  C03C17/3618 ,  C03C17/3644 ,  C03C17/3652 ,  C03C17/366 ,  C03C17/3681 ,  C23C14/0036 ,  C23C14/042 ,  C23C14/14 ,  C23C14/34 ,  G02B1/12 ,  G02B1/14 ,  Y10T428/12542 ,  Y10T428/12549 ,  Y10T428/12611 ,  Y10T428/12778 ,  Y10T428/31678

摘要： Provided is High Productivity Combinatorial (HPC) testing methodology of semiconductor substrates, each including multiple site isolated regions. The site isolated regions are used for testing different compositions and/or structures of barrier layers disposed over silver reflectors. The tested barrier layers may include all or at least two of nickel, chromium, titanium, and aluminum. In some embodiments, the barrier layers include oxygen. This combination allows using relative thin barrier layers (e.g., 5-30 Angstroms thick) that have high transparency yet provide sufficient protection to the silver reflector. The amount of nickel in a barrier layer may be 5-10% by weight, chromium—25-30%, titanium and aluminum—30%-35% each. The barrier layer may be co-sputtered in a reactive or inert-environment using one or more targets that include all four metals. An article may include multiple silver reflectors, each having its own barrier layer.

摘要翻译： 提供了半导体衬底的高生产率组合（HPC）测试方法，每个包括多个现场隔离区域。 位置隔离区域用于测试布置在银反射器上的阻挡层的不同组成和/或结构。 经测试的阻挡层可以包括镍，铬，钛和铝中的全部或至少两种。 在一些实施例中，阻挡层包括氧。 该组合允许使用具有高透明度的相对薄的阻挡层（例如5-30埃厚），同时为银反射器提供足够的保护。 阻挡层中的镍的量可以是5-10重量％，铬25-30％，钛和铝30％-35％。 阻挡层可以在反应性或惰性环境中使用包括所有四种金属的一种或多种目标共溅射。 物品可以包括多个银反射器，每个具有其自己的阻挡层。