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公开(公告)号:US20180122663A1
公开(公告)日:2018-05-03
申请号:US15854802
申请日:2017-12-27
Applicant: Industrial Technology Research Institute
Inventor: Kun-Ping Huang , Jwu-Sheng Hu , Chih-Chen Chang
IPC: H01L21/67 , H05B6/66 , H05B6/68 , H05B6/70 , H05B6/72 , H01L21/324 , H01L21/268
CPC classification number: H01L21/67115 , H01L21/2686 , H01L21/324 , H01L21/67248 , H05B6/664 , H05B6/686 , H05B6/707 , H05B6/72
Abstract: An operating method of microwave heating device is provided, in which a holder is disposed in a heating chamber, and a plurality of microwave transmitters are arranged outside the heating chamber. A plurality of half-wave-rectified power supplies are provided to connect the microwave transmitters, and the half-wave-rectified power supplies have capacitances respectively. A plurality of longitudinal waveguides and a plurality of transverse waveguides are installed in between the heating chamber and the microwave transmitters. The capacitance of each of the capacitors of the half-wave-rectified power supplies is adjusted, such that the microwave power pulse bandwidth of the microwave transmitters are extended to produce a plurality of overlapped couplings, thereby multiplying microwave mode numbers. The half-wave-rectified power supplies supply power to the microwave transmitters, so that the microwaves are guided into the heating chamber by the longitudinal waveguides and the transverse waveguides for exciting multiple microwave modes in the heating chamber so as to achieve the goal of uniform microwave heating.
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公开(公告)号:US20170303347A1
公开(公告)日:2017-10-19
申请号:US15208615
申请日:2016-07-13
Applicant: Industrial Technology Research Institute
Inventor: Chih-Chen Chang , Kun-Ping Huang
IPC: H05B6/66
CPC classification number: H05B6/664 , H05B6/662 , H05B6/68 , H05B2206/043 , H05B2206/044
Abstract: A modular microwave power supply comprises a plurality of microwave power supply modules and a plurality of isolating diodes. To upgrade the output power of the modular microwave power supply, the plurality of microwave power supply modules are connected isolatively in common to a magnetron load by the plurality of isolating diodes, such that power combining of the plurality of microwave power supply modules is achieved, and the efficiency as well as the accumulated-heat dissipating ability of the modular microwave power supply are as good as each of the plurality of microwave power supply modules.
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公开(公告)号:US20170135163A1
公开(公告)日:2017-05-11
申请号:US14983600
申请日:2015-12-30
Applicant: Industrial Technology Research Institute
Inventor: Chih-Chen Chang , Kun-Ping Huang
CPC classification number: H05B6/707 , H01L21/67115 , H01L21/6776 , H05B6/6411 , H05B6/664 , H05B6/70 , H05B6/704
Abstract: A multi-mode microwave heating device includes a heating chamber, a plurality of microwave transmitters, a plurality of longitudinal-polarized rectangular waveguides, a plurality of transverse-polarized rectangular waveguides, and a plurality of half-wave-rectified power supplies. The heating chamber has a holder for holding a to-be-heated object. The holder is connected to a rotating and an elevating mechanism. The microwave transmitters are connected to the heating chamber through the longitudinal-polarized rectangular waveguides as well as connected to the transverse-polarized rectangular waveguides for transmitting microwaves into the heating chamber and to excite multiple cavity modes of the heating chamber, so as to achieve uniform microwave heating. An industrial three-phase alternating current (AC) power source offers multi-phased electricity to the half-wave-rectified power supplies, by which the microwave transmitters are powered, such that the multiple modes are decoupled and uniform microwave heating are achieved.
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公开(公告)号:US20200211825A1
公开(公告)日:2020-07-02
申请号:US16528700
申请日:2019-08-01
Applicant: Industrial Technology Research Institute
Inventor: Chih-Chen Chang , Yu-Wen Chi , Kun-Ping Huang
IPC: H01J37/32
Abstract: Provided is a focalized microwave plasma reactor. The reactor utilizes a cylindrical microwave resonant cavity of the quasi-TM011 mode to focalize microwave power and to excite focalized microwave plasma for the processes of microwave plasma enhanced chemical vapour depositions.
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公开(公告)号:US10231293B2
公开(公告)日:2019-03-12
申请号:US14983600
申请日:2015-12-30
Applicant: Industrial Technology Research Institute
Inventor: Chih-Chen Chang , Kun-Ping Huang
IPC: H05B6/70 , H01L21/67 , H05B6/64 , H05B6/66 , H01L21/677
Abstract: A multi-mode microwave heating device includes a heating chamber, a plurality of microwave transmitters, a plurality of longitudinal-polarized rectangular waveguides, a plurality of transverse-polarized rectangular waveguides, and a plurality of half-wave-rectified power supplies. The heating chamber has a holder for holding a to-be-heated object. The holder is connected to a rotating and an elevating mechanism. The microwave transmitters are connected to the heating chamber through the longitudinal-polarized rectangular waveguides as well as connected to the transverse-polarized rectangular waveguides for transmitting microwaves into the heating chamber and to excite multiple cavity modes of the heating chamber, so as to achieve uniform microwave heating. An industrial three-phase alternating current (AC) power source offers multi-phased electricity to the half-wave-rectified power supplies, by which the microwave transmitters are powered, such that the multiple modes are decoupled and uniform microwave heating are achieved.
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公开(公告)号:US20160158766A1
公开(公告)日:2016-06-09
申请号:US14953547
申请日:2015-11-30
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor: CHIEN-CHIH CHEN , Chih-Chen Chang , Chen-Der Tsai , Chih-Yung Huang
CPC classification number: B03C3/47 , B03C3/12 , B03C3/366 , B03C3/368 , B03C3/41 , B03C3/49 , B03C2201/06 , B03C2201/10
Abstract: An electrostatic air cleaner comprises a main body, a corona discharged module, a collector module and a fan. The main body has an airflow passage for disposing the corona discharged module, the collector module and the fan. The fan is used for drawing an air stream into the airflow passage. The corona discharged module is used for discharging particles in the air stream. The charged particles are then captured by the collector module.
Abstract translation: 静电空气净化器包括主体,电晕放电模块,收集器模块和风扇。 主体具有用于布置电晕放电模块,收集器模块和风扇的气流通道。 风扇用于将气流吸入气流通道。 电晕放电模块用于排出气流中的颗粒。 带电粒子然后被收集器模块捕获。
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公开(公告)号:US20140170057A1
公开(公告)日:2014-06-19
申请号:US13855652
申请日:2013-04-02
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor: Kun-Ping Huang , Chih-Chen Chang , Chwung-Shan Kou , Yu-Tse Hsieh
IPC: C01B31/04
CPC classification number: B82Y40/00 , B82Y30/00 , C01B32/186
Abstract: Disclosed is an apparatus for manufacturing graphene sheets. The apparatus includes a gas tube, and a hydrocarbon gas source connected to a front part of the gas tube for providing a hydrocarbon gas through the gas tube. The apparatus also includes a microwave generator to generate a microwave passing a middle part of the gas tube through a waveguide tube to form a microwave plasma torch from the hydrocarbon gas, wherein the hydrocarbon gas is cracked by the microwave plasma torch to form graphene sheets. The apparatus includes a tube collector connected to a back part of the gas tube for collecting the graphene sheets.
Abstract translation: 公开了一种用于制造石墨烯片的设备。 该装置包括气体管和连接到气体管的前部的烃气源,用于通过气体管提供烃气体。 该装置还包括微波发生器,以产生通过波导管通过气体管的中间部分的微波,以从烃气体形成微波等离子体焰炬,其中烃气体被微波等离子体焰炬破裂以形成石墨烯片。 该装置包括连接到气体管的后部以收集石墨烯片的管收集器。
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公开(公告)号:US11183369B2
公开(公告)日:2021-11-23
申请号:US16528700
申请日:2019-08-01
Applicant: Industrial Technology Research Institute
Inventor: Chih-Chen Chang , Yu-Wen Chi , Kun-Ping Huang
IPC: H01J37/32
Abstract: Provided is a focalized microwave plasma reactor. The reactor utilizes a cylindrical microwave resonant cavity of the quasi-TM011 mode to focalize microwave power and to excite focalized microwave plasma for the processes of microwave plasma enhanced chemical vapour depositions.
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公开(公告)号:US10555384B2
公开(公告)日:2020-02-04
申请号:US15208615
申请日:2016-07-13
Applicant: Industrial Technology Research Institute
Inventor: Chih-Chen Chang , Kun-Ping Huang
Abstract: A modular microwave power supply comprises a plurality of microwave power supply modules and a plurality of isolating diodes. To upgrade the output power of the modular microwave power supply, the plurality of microwave power supply modules are connected isolatively in common to a magnetron load by the plurality of isolating diodes, such that power combining of the plurality of microwave power supply modules is achieved, and the efficiency as well as the accumulated-heat dissipating ability of the modular microwave power supply are as good as each of the plurality of microwave power supply modules.
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公开(公告)号:US09962711B2
公开(公告)日:2018-05-08
申请号:US14953547
申请日:2015-11-30
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor: Chien-Chih Chen , Chih-Chen Chang , Chen-Der Tsai , Chih-Yung Huang
CPC classification number: B03C3/47 , B03C3/12 , B03C3/366 , B03C3/368 , B03C3/41 , B03C3/49 , B03C2201/06 , B03C2201/10
Abstract: An electrostatic air cleaner comprises a main body, a corona discharged module, a collector module and a fan. The main body has an airflow passage for disposing the corona discharged module, the collector module and the fan. The fan is used for drawing an air stream into the airflow passage. The corona discharged module is used for discharging particles in the air stream. The charged particles are then captured by the collector module.
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