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公开(公告)号：US11843364B2
公开(公告)日：2023-12-12
申请号：US17535868
申请日：2021-11-26
发明人： Wen-Qing Xu , Di Lan , Jing Wang , Weiqi Li , Xu Han , Chao Liu , Elgin Eissler , Giovanni Barbarossa
CPC分类号： H03H9/171 , H03H9/02102 , H03H9/02228 , H03H9/02275 , H03H9/02338 , H03H9/02448 , H03H9/13 , H03H9/175
摘要： An acoustic resonator includes a piezoelectric stack including a piezoelectric layer having a top surface and a bottom surface, a top electrode layer disposed above the top surface, and a bottom electrode layer disposed below the bottom surface. A number of acoustic wave reflectors are disposed on a side of the bottom electrode layer opposite the piezoelectric layer. Each acoustic wave reflector includes a high acoustic impedance layer and may include a low acoustic impedance layer. The acoustic resonator may include a tether that extends laterally to a stacking direction of the layers of the piezoelectric stack. A supporting structure may be coupled to the tether opposite the acoustic resonator for anchoring the acoustic resonator. A mirror, one or more phononic crystals, or both may be positioned on proximate the tether opposite the acoustic resonator to avoid resonant waves from exiting the acoustic resonator in use.
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公开(公告)号：US11313037B2
公开(公告)日：2022-04-26
申请号：US16750753
申请日：2020-01-23
申请人： II-VI Delaware, Inc.
摘要： A method of making a multilayer substrate, which can include a silicon layer having an optically finished surface and a chemical vapor deposition (CVD) grown diamond layer on the optically finished surface of the silicon layer. At the interface of the silicon layer and the diamond layer, the optically finished surface of the silicon layer can have a surface roughness (Ra)≤100 nm. A surface of the grown diamond layer opposite the silicon layer can be polished to an optical finish and a light management coating can be applied to the polished surface of the grown diamond layer opposite the silicon layer. A method of forming the multilayer substrate is also disclosed.
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公开(公告)号：US11218132B2
公开(公告)日：2022-01-04
申请号：US16208857
申请日：2018-12-04
申请人： II-VI Delaware, Inc
发明人： Wen-Qing Xu , Di Lan , Jing Wang , Weiqi Li , Xu Han , Chao Liu , Elgin Eissler , Giovanni Barbarossa
摘要： An acoustic resonator includes a piezoelectric stack including a piezoelectric layer having a top surface and a bottom surface, a top electrode layer disposed above the top surface, and a bottom electrode layer disposed below the bottom surface. A number of acoustic wave reflectors are disposed on a side of the bottom electrode layer opposite the piezoelectric layer. Each acoustic wave reflector includes a high acoustic impedance layer and may include a low acoustic impedance layer. The acoustic resonator may include a tether that extends laterally to a stacking direction of the layers of the piezoelectric stack. A supporting structure may be coupled to the tether opposite the acoustic resonator for anchoring the acoustic resonator. A mirror, one or more phononic crystals, or both may be positioned on proximate the tether opposite the acoustic resonator to avoid resonant waves from exiting the acoustic resonator in use.
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公开(公告)号：US11891691B2
公开(公告)日：2024-02-06
申请号：US17655475
申请日：2022-03-18
申请人： II-VI Delaware, Inc.
CPC分类号： C23C16/27 , C23C16/01 , C23C16/0254 , C23C16/274 , C23C16/56
摘要： A method of making a multilayer substrate, which can include a silicon layer having an optically finished surface and a chemical vapor deposition (CVD) grown diamond layer on the optically finished surface of the silicon layer. At the interface of the silicon layer and the diamond layer, the optically finished surface of the silicon layer can have a surface roughness (Ra)≤100 nm. A surface of the grown diamond layer opposite the silicon layer can be polished to an optical finish and a light management coating can be applied to the polished surface of the grown diamond layer opposite the silicon layer. A method of forming the multilayer substrate is also disclosed.
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5.发明授权公开(公告)号：US11618945B2
公开(公告)日：2023-04-04
申请号：US16663423
申请日：2019-10-25
申请人： II-VI Delaware, Inc.
发明人： Wen-Qing Xu , Thomas E. Anderson , Giovanni Barbarossa , Elgin E. Eissler , Chao Liu , Charles D. Tanner
IPC分类号： C23C16/27 , C23C16/01 , C23C16/56 , C23C16/511
摘要： In a method of forming a diamond film, substrate, or window, a substrate is provided and the diamond film, substrate, or window is CVD grown on a surface of the substrate. The grown diamond film, substrate, or window has a thickness between 150-999 microns and an aspect ratio≥100, wherein the aspect ratio is a ratio of a largest dimension of the diamond film, substrate or window divided by a thickness of the diamond film. The substrate can optionally be removed or separated from the grown diamond film, substrate, or window.
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公开(公告)号：US20220205084A1
公开(公告)日：2022-06-30
申请号：US17655475
申请日：2022-03-18
申请人： II-VI Delaware, Inc.
摘要： A method of making a multilayer substrate, which can include a silicon layer having an optically finished surface and a chemical vapor deposition (CVD) grown diamond layer on the optically finished surface of the silicon layer. At the interface of the silicon layer and the diamond layer, the optically finished surface of the silicon layer can have a surface roughness (Ra)≤100 nm. A surface of the grown diamond layer opposite the silicon layer can be polished to an optical finish and a light management coating can be applied to the polished surface of the grown diamond layer opposite the silicon layer. A method of forming the multilayer substrate is also disclosed.
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公开(公告)号：US10910127B2
公开(公告)日：2021-02-02
申请号：US16502590
申请日：2019-07-03
申请人： II-VI Delaware, Inc.
发明人： Wen-Qing Xu , Chao Liu , Charles J. Kraisinger , Charles D. Tanner , Ian Currier , David Sabens , Elgin E. Eissler , Thomas E Anderson
摘要： In a method of chemical vapor deposition (CVD) growth of a polycrystalline diamond film in a CVD reactor, a gas mixture of gaseous hydrogen and a gaseous hydrocarbon is introduced into the CVD reactor. A plasma formed from the gas mixture is maintained above a surface of a conductive substrate disposed in the CVD reactor and causes a polycrystalline diamond film to grow on the surface of the conductive substrate. A temperature T at the center of the polycrystalline diamond film is controlled during growth of the polycrystalline diamond film. The CVD grown polycrystalline diamond film includes diamond crystallites that can have a percentage of orientation along a [110] diamond lattice direction≥70% of the total number of diamond crystallites forming the polycrystalline diamond film.
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公开(公告)号：US20200157676A1
公开(公告)日：2020-05-21
申请号：US16750753
申请日：2020-01-23
申请人： II-VI Delaware, Inc.
摘要： A method of making a multilayer substrate, which can include a silicon layer having an optically finished surface and a chemical vapor deposition (CVD) grown diamond layer on the optically finished surface of the silicon layer. At the interface of the silicon layer and the diamond layer, the optically finished surface of the silicon layer can have a surface roughness (Ra)≤100 nm. A surface of the grown diamond layer opposite the silicon layer can be polished to an optical finish and a light management coating can be applied to the polished surface of the grown diamond layer opposite the silicon layer. A method of forming the multilayer substrate is also disclosed.
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公开(公告)号：US20190181830A1
公开(公告)日：2019-06-13
申请号：US16208857
申请日：2018-12-04
发明人： Wen-Qing Xu , Di Lan , Jing Wang , Weiqi Li , Xu Han , Chao Liu , Elgin Eissler , Giovanni Barbarossa
摘要： An acoustic resonator includes a piezoelectric stack including a piezoelectric layer having a top surface and a bottom surface, a top electrode layer disposed above the top surface, and a bottom electrode layer disposed below the bottom surface. A number of acoustic wave reflectors are disposed on a side of the bottom electrode layer opposite the piezoelectric layer. Each acoustic wave reflector includes a high acoustic impedance layer and may include a low acoustic impedance layer. The acoustic resonator may include a tether that extends laterally to a stacking direction of the layers of the piezoelectric stack. A supporting structure may be coupled to the tether opposite the acoustic resonator for anchoring the acoustic resonator. A mirror, one or more phononic crystals, or both may be positioned on proximate the tether opposite the acoustic resonator to avoid resonant waves from exiting the acoustic resonator in use.
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