Invention Grant
- Patent Title: Acoustic resonator
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Application No.: US16208857Application Date: 2018-12-04
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Publication No.: US11218132B2Publication Date: 2022-01-04
- Inventor: Wen-Qing Xu , Di Lan , Jing Wang , Weiqi Li , Xu Han , Chao Liu , Elgin Eissler , Giovanni Barbarossa
- Applicant: II-VI Delaware, Inc
- Applicant Address: US DE Wilmington
- Assignee: II-VI Delaware, Inc
- Current Assignee: II-VI Delaware, Inc
- Current Assignee Address: US DE Wilmington
- Agency: Blank Rome LLP
- Main IPC: H03H9/17
- IPC: H03H9/17 ; H03H9/13 ; H03H9/02

Abstract:
An acoustic resonator includes a piezoelectric stack including a piezoelectric layer having a top surface and a bottom surface, a top electrode layer disposed above the top surface, and a bottom electrode layer disposed below the bottom surface. A number of acoustic wave reflectors are disposed on a side of the bottom electrode layer opposite the piezoelectric layer. Each acoustic wave reflector includes a high acoustic impedance layer and may include a low acoustic impedance layer. The acoustic resonator may include a tether that extends laterally to a stacking direction of the layers of the piezoelectric stack. A supporting structure may be coupled to the tether opposite the acoustic resonator for anchoring the acoustic resonator. A mirror, one or more phononic crystals, or both may be positioned on proximate the tether opposite the acoustic resonator to avoid resonant waves from exiting the acoustic resonator in use.
Public/Granted literature
- US20190181830A1 Acoustic Resonator Public/Granted day:2019-06-13
Information query
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