公开(公告)号：US09349572B2

公开(公告)日：2016-05-24

申请号：US14664423

申请日：2015-03-20

Applicant: Hitachi High-Tech Science Corporation

Inventor： Yutaka Ikku

IPC: H01J37/26 ,  H01J37/28

CPC classification number: H01J37/28 ,  G01N23/2252 ,  G01N2223/401 ,  G01N2223/418 ,  G01N2223/424 ,  H01J2237/2442 ,  H01J2237/24585 ,  H01J2237/248 ,  H01J2237/28

Abstract: An energy dispersive X-ray analyzer is attached to a scanning electron microscope and includes: a SEM controller; a detector; an EDS controller; and a data processor. The data processor generates first and second X-ray mapping image respectively when the SEM controller controls the scanning electron microscope to irradiate the sample with an electron beam under first and second acceleration voltage conditions. The data processor corrects the first X-ray mapping image and the second X-ray mapping image into images that are independent of acceleration voltage condition based on a measurement intensity variation ratio of the X-ray when changed from the first acceleration voltage condition to the second acceleration voltage condition, and controls the display unit to display a difference image between the corrected first X-ray mapping image and the corrected second X-ray mapping image.

Abstract translation: 能量色散X射线分析仪附着在扫描电子显微镜上，包括：SEM控制器; 检测器 EDS控制器 和数据处理器。 当SEM控制器控制扫描电子显微镜以在第一和第二加速电压条件下用电子束照射样品时，数据处理器分别产生第一和第二X射线映射图像。 数据处理器将第一X射线映射图像和第二X射线映射图像基于X射线从第一加速电压条件变化到第二X射线映射图像的测量强度变化率而与加速电压条件无关的图像进行校正 第二加速电压条件，并且控制显示单元显示校正的第一X射线映射图像和校正的第二X射线映射图像之间的差分图像。

公开(公告)号：US20180275069A1

公开(公告)日：2018-09-27

申请号：US15926097

申请日：2018-03-20

Applicant: Hitachi High-Tech Science Corporation

Inventor： Yutaka Ikku

IPC: G01N21/73 ,  G01J3/18 ,  G01J3/28 ,  G01J3/443

CPC classification number: G01N21/73 ,  G01J3/0235 ,  G01J3/04 ,  G01J3/18 ,  G01J3/2823 ,  G01J3/443 ,  G01J2003/045 ,  G01N21/68

Abstract: An ICP emission spectrophotometer includes an inductively coupled plasma device, a spectroscope, and a computer. The spectroscope includes an incidence window, an incidence side slit, a diffraction grating, an emission window, an emission side slit, and a detector. Measurement conditions including diffraction condition and a measurement result are displayed on a display device. In a case where there are a plurality of diffraction conditions each including a combination of a diffraction grating and a diffraction order for measuring desired diffracted light, comparison information including at least an intensity and a resolution of emitted light in the diffraction condition is displayed on the display device. A measurer selects diffraction conditions in which resolution is higher from among the diffraction conditions, and selects a diffraction condition in which an intensity is obtained from among the selected diffraction conditions.

公开(公告)号：US20150270094A1

公开(公告)日：2015-09-24

申请号：US14664423

申请日：2015-03-20

Applicant: Hitachi High-Tech Science Corporation

Inventor： Yutaka Ikku

IPC: H01J37/22

CPC classification number: H01J37/28 ,  G01N23/2252 ,  G01N2223/401 ,  G01N2223/418 ,  G01N2223/424 ,  H01J2237/2442 ,  H01J2237/24585 ,  H01J2237/248 ,  H01J2237/28

Abstract: An energy dispersive X-ray analyzer is attached to a scanning electron microscope and includes: a SEM controller; a detector; an EDS controller; and a data processor. The data processor generates first and second X-ray mapping image respectively when the SEM controller controls the scanning electron microscope to irradiate the sample with an electron beam under first and second acceleration voltage conditions. The data processor corrects the first X-ray mapping image and the second X-ray mapping image into images that are independent of acceleration voltage condition based on a measurement intensity variation ratio of the X-ray when changed from the first acceleration voltage condition to the second acceleration voltage condition, and controls the display unit to display a difference image between the corrected first X-ray mapping image and the corrected second X-ray mapping image.

Abstract translation: 能量色散X射线分析仪附着在扫描电子显微镜上，包括：SEM控制器; 检测器 EDS控制器 和数据处理器。 当SEM控制器控制扫描电子显微镜以在第一和第二加速电压条件下用电子束照射样品时，数据处理器分别产生第一和第二X射线映射图像。 数据处理器将第一X射线映射图像和第二X射线映射图像基于X射线从第一加速电压条件变化到第二X射线映射图像的测量强度变化率而与加速电压条件无关的图像进行校正 第二加速电压条件，并且控制显示单元显示校正的第一X射线映射图像和校正的第二X射线映射图像之间的差分图像。

公开(公告)号：US20160270201A1

公开(公告)日：2016-09-15

申请号：US15066345

申请日：2016-03-10

Applicant: Hitachi High-Tech Science Corporation

Inventor： Yoshitomo Nakagawa ,  Yutaka Ikku

IPC: H05H1/30 ,  H01J49/10

CPC classification number: H05H1/30 ,  H01J49/105

Abstract: An inductively coupled plasma generating device is configured to include a plasma torch, a high frequency induction coil and a high frequency power source. In addition, a heat transfer member, in which a first terminal is connected to the high frequency induction coil and a second terminal is connected to a cooling block, is disposed in the inductively coupled plasma generating device. The second terminal of the heat transfer member is located above the first terminal, thereby causing condensed operating fluid to fall and move toward the first terminal due to the action of gravity. Accordingly, it is possible to achieve excellent cooling capacity by improving circulation and mobility of the operating fluid.

Abstract translation: 电感耦合等离子体产生装置被配置为包括等离子体焰炬，高频感应线圈和高频电源。 此外，电感耦合等离子体产生装置中设置有将第一端子连接到高频感应线圈的热传递构件和连接到冷却块的第二端子。 传热构件的第二端子位于第一端子的上方，由于重力的作用，致使冷凝的工作流体向第一端子下落并移动。 因此，通过改善工作流体的循环和流动性，可以实现优异的冷却能力。

公开(公告)号：US10309903B2

公开(公告)日：2019-06-04

申请号：US15926097

申请日：2018-03-20

Applicant: Hitachi High-Tech Science Corporation

Inventor： Yutaka Ikku

IPC: G01J3/30 ,  G01N21/73 ,  G01J3/443 ,  G01J3/28 ,  G01J3/18 ,  G01N21/68 ,  G01J3/02 ,  G01J3/04

Abstract: An ICP emission spectrophotometer includes an inductively coupled plasma device, a spectroscope, and a computer. The spectroscope includes an incidence window, an incidence side slit, a diffraction grating, an emission window, an emission side slit, and a detector. Measurement conditions including diffraction condition and a measurement result are displayed on a display device. In a case where there are a plurality of diffraction conditions each including a combination of a diffraction grating and a diffraction order for measuring desired diffracted light, comparison information including at least an intensity and a resolution of emitted light in the diffraction condition is displayed on the display device. A measurer selects diffraction conditions in which resolution is higher from among the diffraction conditions, and selects a diffraction condition in which an intensity is obtained from among the selected diffraction conditions.

公开(公告)号：US09820370B2

公开(公告)日：2017-11-14

申请号：US15066345

申请日：2016-03-10

Applicant: Hitachi High-Tech Science Corporation

Inventor： Yoshitomo Nakagawa ,  Yutaka Ikku

IPC: H05H1/30 ,  H01J49/10

CPC classification number: H05H1/30 ,  H01J49/105

Abstract: An inductively coupled plasma generating device is configured to include a plasma torch, a high frequency induction coil and a high frequency power source. In addition, a heat transfer member, in which a first terminal is connected to the high frequency induction coil and a second terminal is connected to a cooling block, is disposed in the inductively coupled plasma generating device. The second terminal of the heat transfer member is located above the first terminal, thereby causing condensed operating fluid to fall and move toward the first terminal due to the action of gravity. Accordingly, it is possible to achieve excellent cooling capacity by improving circulation and mobility of the operating fluid.

公开(公告)号：US20150268169A1

公开(公告)日：2015-09-24

申请号：US14661821

申请日：2015-03-18

Applicant: Hitachi High-Tech Science Corporation

Inventor： Yutaka Ikku ,  Hidenori Tanabe

IPC: G01N21/73 ,  G01J3/04 ,  G01J3/443

CPC classification number: G01J3/443 ,  G01J3/0216 ,  G01J3/024 ,  G01N21/68

Abstract: An ICP optical emission spectrometer including: an inductively coupled plasma device configured to atomize or ionize target element to be analyzed using inductively coupled plasma to obtain an atomic emission line; a light condenser configured to condense the atomic emission line, the light condenser including at least two independent light condensers including a first light condenser and a second light condenser; a spectroscope configured to receive the atomic emission line through an incident window and to spectrally detect the atomic emission line; and at least one incident slit that is provided between the first light condenser and the second light condenser, the incident slit being configured to allow the atomic emission line, which passed through the first light condenser, pass through the incident slit and reach to the second light condenser.

Abstract translation: 一种ICP发射光谱仪，包括：感应耦合等离子体装置，被配置为使用电感耦合等离子体来雾化或电离待分析的目标元件以获得原子发射线; 光聚光器，被配置为冷凝原子发射线，所述光聚光器包括至少两个独立的光聚光器，包括第一光聚光器和第二光聚光器; 配置成通过入射窗口接收原子发射线并且光谱检测原子发射线的分光镜; 以及设置在所述第一光聚光器和所述第二光聚光器之间的至少一个入射狭缝，所述入射狭缝被配置为允许穿过所述第一光聚光器的所述原子发射线穿过所述入射狭缝并到达所述第二光聚合器 光冷凝器。