公开(公告)号：US10707046B2

公开(公告)日：2020-07-07

申请号：US16480405

申请日：2017-12-08

Applicant: Hitachi High-Tech Corporation

Inventor： Toshiaki Kusunoki ,  Keigo Kasuya ,  Takashi Ohshima ,  Tomihiro Hashizume ,  Noriaki Arai ,  Yoichi Ose

IPC: H01J37/073 ,  H01J37/20

Abstract: An electron source that can be used stably for a long time even when hexaboride is used, and an electron beam device using the electron source are provided. The invention is directed to an electron source which includes a filament made of a metal, a metal tube that is fixed to the filament and has a plurality of recesses disposed at least in two axial directions so as to surround a central axis at an outer periphery, and a columnar hexaboride tip that emits an electron, is disposed so as to protrude from the inside of the metal tube to a side opposite to the filament, and is in contact with a bottom of each of the plurality of recesses of the metal tube.

公开(公告)号：US11322329B2

公开(公告)日：2022-05-03

申请号：US17260612

申请日：2018-08-27

Applicant: HITACHI HIGH-TECH CORPORATION

Inventor： Toshiaki Kusunoki ,  Tomihiro Hashizume ,  Keigo Kasuya ,  Noriaki Arai ,  Hiromitsu Seino ,  Minoru Kaneda ,  Takashi Ohshima ,  Soichiro Matsunaga

IPC: H01J37/065 ,  H01J37/10 ,  H01J37/147 ,  H01J37/244 ,  H01J37/28

Abstract: The invention provides an electron source including a columnar chip of a hexaboride single crystal, a metal pipe that holds the columnar chip of the hexaboride single crystal, and a filament connected to the metal pipe at a central portion. The columnar chip of the hexaboride single crystal is formed into a cone shape at a portion closer to a tip than a portion held in the metal pipe, and a tip end portion having the cone shape has a (310) crystal face. Schottky electrons are emitted from the (310) crystal face. According to the invention, it is possible to provide a novel electron source having monochromaticity, long-term stability of an emitter current, and high current density.