公开(公告)号：US12181513B2

公开(公告)日：2024-12-31

申请号：US18026718

申请日：2020-09-30

Applicant: Hitachi High-Tech Corporation

Inventor： Shota Mitsugi ,  Yohei Nakamura ,  Daisuke Bizen ,  Junichi Fuse ,  Satoshi Takada ,  Natsuki Tsuno

IPC: G01R31/26 ,  G01R31/265

Abstract: A control device controls a contact probe in synchronization with a pulse-controlled light having a predetermined wavelength, a measurement instrument measures a characteristic of a sample to be inspected or an analysis sample, and a circuit constant or a defect structure of the sample to be inspected is estimated based on a circuit model created by an electric characteristic analysis device configured to generate the circuit model based on a value measured by the measurement instrument and a detection signal of secondary electrons detected by the charged particle beam device.