公开(公告)号：US11664185B2

公开(公告)日：2023-05-30

申请号：US17536223

申请日：2021-11-29

申请人： Hitachi High-Tech Corporation

发明人： Jun Etoh ,  Hironori Ogawa ,  Shuichi Nakagawa ,  Terunobu Funatsu

IPC分类号： H01J37/02 ,  B06B1/02 ,  H03G3/20

CPC分类号： H01J37/023 ,  B06B1/0253 ,  B06B2201/30 ,  H01J2237/0216 ,  H03G3/20

摘要： A vibration damping system for a charged particle beam apparatus according to the present invention includes a column through which a charged particle beam passes, a vibration detection unit that detects vibration of the column, a damping mechanism that applies vibration to the column to suppress the vibration of the column, and a control device that controls the damping mechanism. The control device includes a damping gain control unit that amplifies a detection signal of the vibration detection unit with a set amplification factor and outputs an amplified detection signal as a control signal to the damping mechanism, and a saturation suppression unit that adjusts a feedback gain value of the damping gain control unit according to a detection signal of the vibration detection unit, a signal of the damping mechanism, and a maximum output value and a minimum output value of the damping mechanism.