公开(公告)号：US20230268158A1

公开(公告)日：2023-08-24

申请号：US18018173

申请日：2020-08-24

Applicant: Hitachi High-Tech Corporation

Inventor： Hideki TSUSHIMA ,  Naoya ISHIGAKI

IPC: H01J37/248 ,  H01J37/244 ,  H01J37/28 ,  H01J37/26 ,  H01J37/04 ,  H01J37/147

CPC classification number: H01J37/248 ,  H01J37/244 ,  H01J37/28 ,  H01J37/265 ,  H01J37/045 ,  H01J37/1474

Abstract: A charged particle beam device according to the present invention comprises a charged particle source that emits charged particles, a detection circuit that detects electrons which are generated by a sample as a result of irradiation with the charged particles, and a power storage device (107_VHD) that holds direct voltage, and comprises a charge circuit (107_CHG) that charges the power storage device with supplied voltage, and a control circuit (107_CTL) that controls the charge circuit such that charging is carried out in a period in which no sample is measured, wherein the direct voltage held by the power storage device (107_VHD) is used as operating voltage.