公开(公告)号：US5772387A

公开(公告)日：1998-06-30

申请号：US497223

申请日：1995-06-30

Applicant: Hiroto Nakamura ,  Yoshihito Kobayashi ,  Katsuhiko Suzuki

Inventor： Hiroto Nakamura ,  Yoshihito Kobayashi ,  Katsuhiko Suzuki

IPC: G01R31/01 ,  G01R31/28 ,  H01L21/00 ,  H05K13/08 ,  B65B21/02

CPC classification number: H01L21/67271 ,  G01R31/2851 ,  G01R31/2893 ,  H05K13/08 ,  G01R31/01

Abstract: An IC transfer system can be used in conjunction with either a tray type magazine or a rod-shaped magazine. A device reinspection method in the IC test handler reinspects the DUT stored in the magazine without human intervention, sorts in accordance with the test results, and stores in the magazine and the customer tray. For this purpose, a tray supply section transfers a user tray (170) to a test tray (180), whereas a magazine supply section (152) and a pick carrier section (112) transfer a rod-shaped magazine (150) to the test tray (180). An inspection setting sets the number of reinspections, the classification of inspection results, and the storage tray/magazine. The DUT (215) is loaded (203) from the magazine to the test tray (180) and is tested (204). After testing (204), a judgement is made whether or not the reinspection mode is effective. If the reinspection mode is effective, the DUT (215) to be reinspected are all stored (206) in the unloader section (223) , and transferred (207) to the loader section (222) using the tray transfer system (227). When the reinspection mode is completed, the DUT (215) is sorted by the category and stored (212) , and the testing is completed (213).

Abstract translation: IC传输系统可以与托盘型杂志或棒状杂志一起使用。 IC测试处理器中的器件重新检查方法重新检查储存在杂志中的DUT，无需人为干预，按照测试结果进行排序，并存储在杂志和客户托盘中。 为此目的，托盘供应部分将用户托盘（170）传送到测试托盘（180），而料盒供应部分（152）和拾取托架部分（112）将棒形盒（150）转移到 测试盘（180）。 检查设置设置回访次数，检查结果分类和存储托盘/杂志。 DUT（215）从盒装载（203）到测试托盘（180）并经过测试（204）。 测试（204）后，判断再检测模式是否有效。 如果重新检查模式有效，则要重新检查的DUT（215）全部被存储在卸载器部分（223）中，并且使用托盘传送系统（227）传送到加载器部分（222）。 当重新检查模式完成时，DUT（215）按类别排序并存储（212），测试完成（213）。

公开(公告)号：US6075216A

公开(公告)日：2000-06-13

申请号：US888745

申请日：1997-07-07

Applicant: Hiroto Nakamura ,  Yoshihito Kobayashi ,  Katsuhiko Suzuki

Inventor： Hiroto Nakamura ,  Yoshihito Kobayashi ,  Katsuhiko Suzuki

IPC: G01R31/01 ,  H01L21/00 ,  H05K13/02 ,  H05K13/08 ,  B07C5/344

CPC classification number: H01L21/67271 ,  G01R31/2893 ,  H05K13/022 ,  H05K13/08 ,  G01R31/01

Abstract: An IC device transfer method for IC handler accommodates both a tray and a rod-shaped magazine. The tray installs a plurality of IC devices which transport in horizontal directions in the IC handler. The rod-shaped magazine installs a plurality of IC devices which transport in vertical directions in the IC handler. A device reinspection method in the IC test handler reinspects the IC devices stored in the tray or magazine without human intervention, sorts in accordance with the test results, and stores in either the rod-shaped magazine or the tray. For this purpose, a tray supply section transfers a user tray to a test tray, whereas a magazine supply section and a pick carrier section transfer a rod-shaped magazine to the test tray. An inspection setting sets the number of reinspection, the classification of inspection results, and the storage tray/magazine. The IC devices are loaded from the magazine and the user tray to the test tray and are tested. When a reinspection mode is effective, the IC devices to be reinspected are stored in the unloader section and transferred to the loader section by the tray transfer system to test the IC devices again. When the reinspection mode is completed, the IC device are sorted by categories and stored in the tray/magazine.

Abstract translation: 用于IC处理器的IC器件传送方法同时容纳托盘和棒状盒。 托盘安装在IC处理器中沿水平方向传送的多个IC器件。 棒状盒安装在IC处理器中沿垂直方向传送的多个IC器件。 IC测试处理器中的器件重新检测方法重新考虑存储在托盘或杂志中的IC器件，而无需人为干预，根据测试结果进行排序，并存储在棒状盒或托盘中。 为此，托盘供应部分将用户托盘传送到测试托盘，而料盒供应部分和拾取托架部分将棒状托盘传送到测试托盘。 检查设置设置重新检查的次数，检验结果的分类和存储托盘/杂志。 IC器件从盒子和用户托盘装载到测试托盘并进行测试。 重新检查模式有效时，要重新检查的IC设备存储在卸载器部分，并通过托盘传输系统传输到装载器部分，以再次测试IC器件。 当重新检查模式完成后，IC设备按类别进行分类并存储在托盘/杂志中。

公开(公告)号：US06445203B1

公开(公告)日：2002-09-03

申请号：US09456408

申请日：1999-12-08

Applicant: Tsuyoshi Yamashita ,  Yoshihito Kobayashi ,  Toshiyuki Kiyokawa ,  Hiroto Nakamura ,  Noriyuki Igarashi ,  Kenichi Shimada

Inventor： Tsuyoshi Yamashita ,  Yoshihito Kobayashi ,  Toshiyuki Kiyokawa ,  Hiroto Nakamura ,  Noriyuki Igarashi ,  Kenichi Shimada

IPC: G01R3102

CPC classification number: G01R31/2874 ,  G01R31/2806 ,  G01R31/2856 ,  G01R31/2863

Abstract: An electric device testing apparatus comprises a connection terminal to which an IC chip to be tested is removably connected, a pusher for pushing the IC chip in the direction of the connection terminal in order to connect the IC chip to the connection terminal, and temperature adjusted air supply for blowing a temperature adjusted air to around the IC chip during a test on the IC chip via a through hole formed on the pushed.

Abstract translation: 一种电气设备测试装置，包括：被测试的IC芯片可拆卸地连接到的连接端子，用于沿着连接端子的方向推动IC芯片的推动器，以将IC芯片连接到连接端子，并且温度调节 用于在通过形成在所述推动件上的通孔对IC芯片进行测试期间将温度调节的空气吹送到IC芯片周围。

公开(公告)号：US5625287A

公开(公告)日：1997-04-29

申请号：US410821

申请日：1995-03-27

Applicant: Hiroto Nakamura ,  Makoto Sagawa ,  Yoshihito Kobayashi

Inventor： Hiroto Nakamura ,  Makoto Sagawa ,  Yoshihito Kobayashi

IPC: G01R31/26 ,  B23Q7/14 ,  B23Q16/00 ,  B65G47/88 ,  G01R31/02 ,  G01R31/28

CPC classification number: B23Q7/1447 ,  B23Q16/001 ,  G01R31/2851 ,  G01R31/2893

Abstract: An automatic handler for an IC test system is disclosed which is capable of reducing a time for transferring IC devices to be tested from a supply area to a test head area and from the test head area to a discharge area. The automatic handler includes a test tray for loading the IC devices to be tested in which the IC devices to be tested are aligned in the test tray with a shorter distance with one another than a distance between test contactors in the test head area, a pair of positioning stoppers provided in the test head area along a moving direction of the test tray in which the positioning stoppers are spaced by the distance equal to the distance of the IC devices to be tested in the test tray. In the automatic handler, the distance of the contactors is adjusted to an integer multiple of the distance of the IC devices to be tested in the test tray. One of the positioning stoppers contacts the test tray to determine a first position for testing the IC devices in a first line in the test tray, and then the test tray is transferred until other positioning stoppers contacts the test tray in a second position for testing the IC devices in a second line in the test tray. The test tray is then transferred to the discharge area. Another aspect of the automatic handler is provided with a groove on the test tray to increase a number of test position for the test tray. The groove includes an end surface which engages with the positioning stoppers.

Abstract translation: 公开了一种用于IC测试系统的自动处理器，其能够减少从供应区域到测试头区域以及从测试头区域到放电区域传送要测试的IC设备的时间。 自动处理机包括用于加载要测试的IC器件的测试托盘，其中待测试的IC器件在测试托架中彼此相距距离短于测试头区域中的测试接触器之间的距离，一对 沿着测试盘的移动方向设置在测试头区域中的定位止动件，其中定位止动件间隔距离等于待测试的IC器件在测试托盘中的距离。 在自动处理机中，将接触器的距离调整为测试盘中要测试的IC器件的距离的整数倍。 其中一个定位止动器接触测试托盘，以确定测试托盘中第一行中IC器件的第一位置，然后传输测试托盘，直到其他定位止动器在第二个位置接触测试托盘，以便测试 IC器件位于测试托盘的第二行。 然后将测试托盘转移到排放区域。 自动处理机的另一方面在测试托盘上设置有凹槽以增加测试托盘的测试位置的数量。 凹槽包括与定位止动件接合的端面。

公开(公告)号：US5973493A

公开(公告)日：1999-10-26

申请号：US725377

申请日：1996-10-03

Applicant: Hiroto Nakamura ,  Makoto Sagawa ,  Yoshihito Kobayashi

Inventor： Hiroto Nakamura ,  Makoto Sagawa ,  Yoshihito Kobayashi

IPC: G01R31/26 ,  B23Q7/14 ,  B23Q16/00 ,  B65G47/88 ,  G01R31/02 ,  G01R31/28

CPC classification number: B23Q7/1447 ,  B23Q16/001 ,  G01R31/2851 ,  G01R31/2893

Abstract: A mechanism for positioning IC devices to be tested aligned in a test tray of an automatic handler for an IC test system capable of reducing a time for transferring the test tray from a supply area to a test head area which has a plurality of test contactors and from a test head area to a discharge area is disclosed. The mechanism includes a stopper which determines the first stop position of the test tray when said test tray contacts with the outer surface of the test tray and the second stop position of the test tray when said stopper contacts with the end surface of a groove being provided with on its side portion of the test tray to receive and engage with the projection of the stopper. The distance between the adjacent test contactors is adjusted to be equal to two times or integer multiple of the distance between the adjacent IC devices to be tested aligned in the test tray and the distance between the first position and the second position is adjusted to be equal to the distance between the adjacent IC devices to be tested so that minimizing the index time for transferring the test tray becomes possible.

Abstract translation: 一种用于将待测试的IC器件定位在用于IC测试系统的自动处理器的测试盘中的机构，其能够减少用于将测试托盘从供应区域传送到具有多个测试接触器的测试头区域的时间，以及 从测试头区域到放电区域被公开。 所述机构包括：当所述止动件与所述槽的端面接触时，所述止动件确定所述测试托盘与所述测试托盘的外表面和所述测试托盘的第二停止位置接触时所述测试托盘的第一停止位置 其在其测试托盘的侧部接收并接合止动器的突起。 将相邻的测试接触器之间的距离调整为等于测试托盘中待测试的相邻IC器件之间距离的两倍或整数倍，并将第一位置与第二位置之间的距离调整为相等 到待测试的相邻IC器件之间的距离，使得最小化传送测试托盘的索引时间成为可能。

公开(公告)号：US06384593B1

公开(公告)日：2002-05-07

申请号：US09596062

申请日：2000-06-16

Applicant: Yoshihito Kobayashi ,  Tsuyoshi Yamashita ,  Hiroto Nakamura ,  Shin Nemoto ,  Yoshiyuki Masuo ,  Akihiko Ito

Inventor： Yoshihito Kobayashi ,  Tsuyoshi Yamashita ,  Hiroto Nakamura ,  Shin Nemoto ,  Yoshiyuki Masuo ,  Akihiko Ito

IPC: G01R3128

CPC classification number: G01R31/2868

Abstract: A semiconductor device testing apparatus having a reduced transverse width and compact in size is provided. Adjacent to a constant temperature chamber containing therein a vertical transport means is located a test chamber which is in turn adjoined by a temperature-stress removing chamber likewise containing therein a vertical transport means, so that the constant temperature chamber and the test chamber are arranged transversely in a line, while the temperature-stress removing chamber is located in front of the test chamber when viewed in front view of the apparatus. Further, a loader section is located in front of the constant temperature chamber, and an unloader section is located above the temperature-stress removing chamber. With this arrangement, the transverse width of the testing apparatus may be reduced to about two test tray lengths.

Abstract translation: 提供了具有减小的横向宽度并且尺寸紧凑的半导体器件测试装置。 在其中容纳有垂直输送装置的恒温室附近设有试验室，该试验室又由同样含有垂直输送装置的温度应力消除室邻接，使得恒温室和试验室横向布置 在该装置的正视图中观察时，温度应力消除室位于测试室的前方。 此外，装载部位于恒温室前方，卸载部位于温度应力消除室的上方。 通过这种布置，测试装置的横向宽度可以减小到大约两个测试托盘长度。

公开(公告)号：US6104183A

公开(公告)日：2000-08-15

申请号：US809243

申请日：1997-05-28

Applicant: Yoshihito Kobayashi ,  Tsuyoshi Yamashita ,  Hiroto Nakamura ,  Shin Nemoto ,  Yoshiyuki Masuo ,  Akihiko Ito

Inventor： Yoshihito Kobayashi ,  Tsuyoshi Yamashita ,  Hiroto Nakamura ,  Shin Nemoto ,  Yoshiyuki Masuo ,  Akihiko Ito

IPC: G01R31/26 ,  G01R31/28 ,  H01L21/677

CPC classification number: G01R31/2868

Abstract: A semiconductor device testing apparatus having a reduced transverse width and compact in size is provided. Adjacent to a constant temperature chamber 101 containing therein a vertical transport means is located a test chamber 102 which is in turn adjoined by a temperature-stress removing chamber 103 likewise containing therein a vertical transport means, so that the constant temperature chamber 101, the test chamber 102 and the temperature-stress removing chamber 103 are arranged transversely in a line. Further, a loader section 300 is located in front of the constant temperature chamber, and an unloader section 400 is located in front of the test chamber and the temperature-stress removing chamber. With this arrangement, the transverse width of the testing apparatus may be reduced to about three test tray lengths.

Abstract translation: PCT No.PCT / JP96 / 02067 Sec。 371日期1997年5月28日 102（e）日期1997年5月28日PCT提交1996年7月24日PCT公布。 出版物WO97 / 05495 日期：1997年2月13日提供了具有减小的横向宽度和尺寸紧凑的半导体器件测试装置。 在其中容纳有垂直传送装置的恒温室101附近设置有测试室102，测试室102又由同样包含垂直传送装置的温度应力消除室103邻接，使得恒温室101，测试 室102和温度应力消除室103横向排列成一行。 此外，装载部300位于恒温室前方，卸载部400位于试验室前方和温度应力消除室。 通过这种布置，测试装置的横向宽度可以减小到约三个测试托盘长度。

公开(公告)号：US20100147088A1

公开(公告)日：2010-06-17

申请号：US12161067

申请日：2006-01-17

Applicant: Akihiko Ito ,  Koya Karino ,  Yoshihito Kobayashi

Inventor： Akihiko Ito ,  Koya Karino ,  Yoshihito Kobayashi

IPC: G01N1/00 ,  G01R31/02

CPC classification number: G01R31/2893

Abstract: An electronic device test apparatus used for bringing the ICs into electrical contact with contact parts of the test head in the state where the ICs are held on a test tray and running tests on the electrical characteristics of ICs, the electronic device test apparatus including an inversion system for rotating the test tray which holds a plurality of ICs in a direction dropping ICs which are insufficiently held at least once before testing.

Abstract translation: 一种电子设备测试装置，用于在IC保持在测试托盘上的状态下使IC与测试头的接触部分电接触，并对IC的电气特性进行运行测试，电子设备测试设备包括反演 系统，用于使测试托盘旋转，所述测试托盘在测试之前沿着不足够保持至少一次的IC的方向保持多个IC。

公开(公告)号：US5326675A

公开(公告)日：1994-07-05

申请号：US987821

申请日：1992-12-09

Applicant: Hirokazu Niki ,  Rumiko Hayase ,  Naohiko Oyasato ,  Yasunobu Onishi ,  Akitoshi Kumagae ,  Kazuo Sato ,  Masataka Miyamura ,  Yoshihito Kobayashi

Inventor： Hirokazu Niki ,  Rumiko Hayase ,  Naohiko Oyasato ,  Yasunobu Onishi ,  Akitoshi Kumagae ,  Kazuo Sato ,  Masataka Miyamura ,  Yoshihito Kobayashi

IPC: G03F7/26 ,  G03F7/004 ,  G03F7/039 ,  G03F7/09 ,  G03F7/11 ,  G03F7/38 ,  H01L21/027 ,  G03C5/00

CPC classification number: G03F7/09 ,  G03F7/11 ,  G03F7/0045

Abstract: A radiation-sensitive layer comprising as a main component a radiation-sensitive composition containing a compound capable of generating an acid when exposed to a chemical radiation and a compound having at least one linkage decomposable by an acid is formed on a substrate. An acidic coating layer is formed on the radiation-sensitive layer. The radiation-sensitive layer and the acidic coating layer are pattern-exposed to a chemical radiation. The radiation-sensitive layer and the acidic coating layer are baked and developed by using an aqueous alkaline solution to obtain a pattern comprising lines and spaces, each having a predetermined width. A fine pattern of a rectangular sectional shape can be formed without producing eaves caused by a surface inhibition layer layer, which is produced on the film surface.

Abstract translation: 一种辐射敏感层，其包含作为主要成分的含有当暴露于化学辐射时能够产生酸的化合物的辐射敏感性组合物和具有至少一个可被酸分解的键的化合物。 在辐射敏感层上形成酸性涂层。 辐射敏感层和酸性涂层图案暴露于化学辐射。 通过使用碱性水溶液来烘烤和显影辐射敏感层和酸性涂层，以获得每个具有预定宽度的线和间隔的图案。 可以形成矩形截面形状的精细图案，而不会产生由在膜表面上产生的表面抑制层而引起的檐。

公开(公告)号：US5100768A

公开(公告)日：1992-03-31

申请号：US519397

申请日：1990-05-04

Applicant: Hirokazu Niki ,  Yasunobu Onishi ,  Yoshihito Kobayashi ,  Rumiko Hayase

Inventor： Hirokazu Niki ,  Yasunobu Onishi ,  Yoshihito Kobayashi ,  Rumiko Hayase

IPC: G03F7/004

CPC classification number: G03F7/0045

Abstract: A photosensitive composition contains an alkali-soluble polymer having a phenol skeleton in its structure and a heterocyclic compound represented by formula (I-1) or (I-2), formula (II-1) or (II-2), any of formulas (III-1) to (III-8), any of formulas (IV-1) to (IV-12), or any of formulas (V-1) to (V-4) described in the claims and specification. A photosensitive composition containing a heterocyclic compound represented by formula (I-1) or (I-2), any of formulas (III-1) to (III-8), any of formulas (IV-1) to (IV-12), or any of formulas (V-1) to (V-4) can be suitably used as a negative resist. A photosensitive composition containing a heterocyclic compound represented by formula (II-1) or (II-2) can be suitably used as a positive resist. A photosensitive composition containing an alkali-soluble polymer having a phenol skeleton in its structure and a polymer having a nitrogen-containing heterocyclic compound as a polymeric unit is also included in this invention. The latter photosensitive composition can further contain a heterocyclic compound represented by any of formulas (VI-1) to (VI-15) described in the claims and specification.