公开(公告)号：US11506493B1

公开(公告)日：2022-11-22

申请号：US16745285

申请日：2020-01-16

Applicant: HRL Laboratories, LLC

Inventor： Logan D. Sorenson ,  Raviv Perahia ,  David T. Chang ,  Randall L. Kubena ,  Deborah J. Kirby ,  Hung Nguyen ,  Richard J. Joyce

IPC: G01C25/00 ,  G01C19/5776 ,  G01C19/5684 ,  H03L7/26 ,  H03G3/20

Abstract: An angular rate sensor. The sensor includes a Coriolis vibratory gyroscope (CVG) resonator, configured to oscillate in a first normal mode and in a second normal mode; a frequency reference configured to generate a reference signal; and a first phase control circuit. The first phase control circuit is configured to: measure a first phase difference between: a first phase target, and the difference between: a phase of an oscillation of the first normal mode and a phase of the reference signal. The first phase control circuit is further configured to apply a first phase correction signal to the CVG resonator, to reduce the first phase difference. A second phase control circuit is similarly configured to apply a second phase correction signal to the CVG resonator, to reduce a corresponding, second phase difference.

公开(公告)号：US11469732B2

公开(公告)日：2022-10-11

申请号：US16368737

申请日：2019-03-28

Applicant: HRL Laboratories, LLC

Inventor： Raviv Perahia ,  Logan D. Sorenson ,  Lian X. Huang ,  David T. Chang ,  Makena S. White ,  Jeremy Bregman

IPC: H03H3/02 ,  H03H9/205 ,  H03H9/02 ,  H03H9/05 ,  H03H9/13 ,  H03H9/17 ,  H03H9/15

Abstract: A method of making a SiC resonator includes forming a layer of an oxide material on a relatively thick wafer of SiC; bonding the layer of oxide material on the relatively thick wafer of SiC to a handle wafer having at least an oxide exterior surface, the resulting bond being substantially free of voids; planarizing the relatively thick wafer of SiC to a desired thickness; forming top and bottom electrodes on the wafer of SiC wafer to define a SiC wafer resonator portion; and forming a trench around the top and bottom electrodes, the tench completely penetrating the planarized wafer of SiC around a majority of a distance surrounding said top and bottom electrodes, except for one or more tether regions of the planarized wafer of SiC which remain physically coupled a remaining portion the SiC wafer resonator portion which defines a frame formed of the planarized wafer of SiC surrounding the SiC wafer resonator portion.

公开(公告)号：US11275099B1

公开(公告)日：2022-03-15

申请号：US16512091

申请日：2019-07-15

Applicant: HRL Laboratories, LLC

Inventor： Logan D. Sorenson ,  Lian X. Huang ,  Raviv Perahia ,  Hung Nguyen ,  David T. Chang

IPC: G01P15/18 ,  G01P15/13 ,  G01P1/02

Abstract: A resonant accelerometer includes a proof mass, one or more springs connecting the proof mass to an anchor, and one or more capacitive transduction gaps providing a void or space between the movable proof mass and a corresponding fixed electrode, wherein the static displacement of the proof mass in response to acceleration applied to the anchor modifies the electrostatic stiffness imparted by one or more of the capacitive transduction gaps on the proof mass, resulting in a corresponding change in the resonance frequency of the resonant accelerometer.

公开(公告)号：US11118937B2

公开(公告)日：2021-09-14

申请号：US15897907

申请日：2018-02-15

Applicant: HRL Laboratories, LLC

Inventor： Adour V. Kabakian ,  Shuoqin Wang ,  Logan D. Sorenson ,  Hung Nguyen ,  Raviv Perahia

IPC: G01C25/00 ,  G01P21/00 ,  G01R33/00 ,  G01V13/00 ,  G01R35/00 ,  G01R33/02 ,  G01P15/18

Abstract: Described is a system for adaptive calibration of a sensor of an inertial measurement unit. Following each sensor measurement, the system performs automatic calibration of a multi-axis sensor. A reliability of a current calibration is assessed. If the current calibration is reliable, then bias and scale factor values are updated according to the most recent sensor measurement, resulting in updated bias and scale factor values. If the current calibration is not reliable, then previous bias and scale factor values are used. The system causes automatic calibration of the multi-axis sensor using either the updated or previous bias and scale factor values.

公开(公告)号：US10697772B1

公开(公告)日：2020-06-30

申请号：US16277610

申请日：2019-02-15

Applicant: HRL LABORATORIES, LLC

Inventor： Logan D. Sorenson ,  Raviv Perahia ,  David T. Chang ,  Randall L. Kubena ,  Deborah J. Kirby ,  Hung Nguyen ,  Richard J. Joyce

IPC: G01C19/5726 ,  G01C19/5755

Abstract: A sensor includes an acceleration or magnetic field sensitive microelectromechanical systems (MEMS) resonator, configured to oscillate in at least a first normal mode and a second normal mode. The sensor further includes: a coarse readout circuit configured to drive the first normal mode, measure a motion of the first normal mode, and derive from the measured motion a coarse measurement of the true acceleration or true external magnetic field; and a fine readout circuit configured to drive the second normal mode, measure a motion of the second normal mode, and derive from the measured motion and the coarse measurement a measurement of the difference between the true acceleration or true external magnetic field and the coarse measurement.

公开(公告)号：US10444014B1

公开(公告)日：2019-10-15

申请号：US15253694

申请日：2016-08-31

Applicant: HRL Laboratories, LLC

Inventor： Logan D. Sorenson ,  Raviv Perahia ,  David T. Chang ,  Randall L. Kubena ,  Deborah J. Kirby ,  Hung Nguyen ,  Richard J. Joyce

IPC: G01C19/5726 ,  G01C19/5755

Abstract: An angular sensor. The angular sensor includes a Coriolis vibratory gyroscope (CVG) resonator, configured to oscillate in a first pair of normal modes including a first normal mode and a second normal mode and a second pair of normal modes including a third normal mode and a fourth normal mode. The angular sensor further includes a coarse readout circuit configured to drive the first pair of modes, measure the motion of the first pair of modes, and derive from the measured motion of the first pair of modes a coarse measurement of an angular rate of the resonator. The angular sensor further includes and a fine readout circuit configured to derive a measurement of the difference between the true angular rate of the resonator and the coarse measurement.

公开(公告)号：US10281277B1

公开(公告)日：2019-05-07

申请号：US15347748

申请日：2016-11-09

Applicant: HRL Laboratories, LLC

Inventor： Raviv Perahia ,  Logan D. Sorenson ,  Lian X. Huang ,  Hung Nguyen ,  David T. Chang ,  Deborah J. Kirby

IPC: G01C19/58 ,  G01C19/64 ,  G01C19/5698 ,  G10K11/20

Abstract: A phononic travelling wave gyroscope. The gyroscope includes a phononic waveguide including at least one loop. The phase change incurred by phonons propagating around the loop is compared to a reference phase, and utilized to form an estimate of the rotational rate of the gyroscope.

公开(公告)号：US10175307B1

公开(公告)日：2019-01-08

申请号：US14997203

申请日：2016-01-15

Applicant: HRL Laboratories, LLC

Inventor： Logan D. Sorenson ,  Hung Nguyen ,  Raviv Perahia ,  David T. Chang ,  L. X. Coco Huang ,  Joshua A. Erbland

IPC: G01R33/028 ,  G01R33/00

Abstract: A magnetometer system has a magnetometer, an interface circuit and an electronic demodulator, the interface circuit being coupled to sense electrodes disposed on the magnetometer and the demodulator being coupled to the interface circuit. Preferably, the magnetometer has a loop electrode which follows an outline of the shape of an active portion of the magnetometer and wherein the electronic demodulator has an output for driving the loop electrode of the magnetometer. Preferably, the magnetometer includes a quartz plate with flexural and thickness shear vibratory modes and wherein the flexural vibratory mode is driven, in use, into vibration by the electronic demodulator and wherein the thickness shear vibratory mode is driven, in use, into vibration by the interface circuit.

公开(公告)号：US09404748B2

公开(公告)日：2016-08-02

申请号：US13930769

申请日：2013-06-28

Applicant: HRL LABORATORIES, LLC

Inventor： Raviv Perahia ,  Hung Nguyen ,  Deborah J. Kirby ,  Srikanth S. Iyer ,  David T. Chang

IPC: G01C19/56 ,  G01C19/5755 ,  G01P15/125 ,  G01C19/5726

CPC classification number: G01C19/5755 ,  G01C19/5726 ,  G01P15/125

Abstract: An apparatus for driving and sensing motion in a gyroscope including a dielectric mass, an anchor, a spring coupled between the anchor and the dielectric mass, a substrate adjacent the dielectric mass, an insulator layer on the substrate, and a first electrode and a second electrode on the insulator layer. When an alternating current voltage is applied between the first and second electrodes, an electric field gradient is generated in the dielectric mass and causes the dielectric mass to move relative to the anchor. When the dielectric mass has motion relative to the anchor and a voltage is applied between the first and second electrodes, the movement of the dielectric mass generates a current at the first and second electrodes proportional to the motion.

Abstract translation: 一种用于在陀螺仪中驱动和感测运动的装置，包括介电质量块，锚固体，耦合在锚固体和电介质块之间的弹簧，与介电质量块相邻的衬底，衬底上的绝缘体层，以及第一电极和第二电极 绝缘体层上的电极。 当在第一和第二电极之间施加交流电压时，在电介质中产生电场梯度，并使介质质量相对于锚移动。 当介电质量具有相对于锚的运动并且在第一和第二电极之间施加电压时，电介质的运动在第一和第二电极处产生与运动成比例的电流。

公开(公告)号：US12160242B1

公开(公告)日：2024-12-03

申请号：US18197041

申请日：2023-05-13

Applicant: HRL Laboratories, LLC

Inventor： Travis Autry ,  Raviv Perahia

IPC: H03L7/26 ,  G04F5/14 ,  H01S5/00 ,  H01S5/02325 ,  H01S5/02375 ,  H01S5/183

Abstract: A low-power, chip-scale atomic beam clock is provided that maintains high precision for at least one week at any practical temperature. In some variations, the invention provides a chip-scale atomic beam clock comprising: a micro-optical bench; an atom collimator configured to generate a collimated atomic beam via differential pumping through microchannels; a VCSEL configured to emit laser photons horizontally in the plane of the micro-optical bench; an in-plane lithographically defined diffraction grating configured to split the laser photons into a first photon beam and a second photon beam; in-plane lithographically defined mirrors configured to retroflect the photon beams; in-plane photodetectors configured to detect the photon beams after being retroflected, wherein the first photon beam and the second photon beam interrogate the collimated atomic beam in-plane with the micro-optical bench. The chip-scale atomic beam clocks is capable of maintaining precise positioning, navigation, and timing in case of GPS denial or failure.