公开(公告)号：US20150357156A1

公开(公告)日：2015-12-10

申请号：US14759241

申请日：2014-01-10

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Yasushi EBIZUKA ,  Seiichiro KANNO ,  Naoya ISHIGAKI ,  Masashi FUJITA

IPC: H01J37/20 ,  H01J37/02 ,  H01J37/28

CPC classification number: H01J37/20 ,  H01J37/026 ,  H01J37/09 ,  H01J37/28 ,  H01J2237/2007

Abstract: The present invention explains a charged-particle beam device for the purpose of highly accurately measuring electrostatic charge of a sample in a held state by an electrostatic chuck (105). In order to attain the object, according to the present invention, there is proposed a charged-particle beam device including an electrostatic chuck (105) for holding a sample on which a charged particle beam is irradiated and a sample chamber (102) in which the electrostatic chuck (105) is set. The charged-particle beam device includes a potential measuring device that measures potential on a side of an attraction surface for the sample of the electrostatic chuck (105) and a control device that performs potential measurement by the potential measuring device in a state in which the sample is attracted by the electrostatic chuck (105).

Abstract translation: 本发明解释了一种带电粒子束装置，用于通过静电卡盘（105）高度准确地测量处于保持状态的样品的静电荷。 为了达到上述目的，本发明提出一种带电粒子束装置，其特征在于，包括：静电卡盘（105），用于保持照射有带电粒子束的样品和样品室（102），所述样品室 静电吸盘（105）被设定。 带电粒子束装置包括：电位测量装置，其测量用于静电卡盘（105）的样本的吸引表面的电位;以及控制装置，其通过电位测量装置进行电位测量，其中， 样品被静电吸盘（105）吸引。

公开(公告)号：US20160133433A1

公开(公告)日：2016-05-12

申请号：US14893669

申请日：2014-03-19

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Masashi FUJITA ,  Masahiro TSUNODA ,  Katsunori ONUKI ,  Katsuya AIBARA ,  Seiichi SHINDO ,  Takaaki NISHIMORI

IPC: H01J37/16 ,  H01J37/18

CPC classification number: H01J37/165 ,  H01J37/09 ,  H01J37/18 ,  H01J2237/0262 ,  H01J2237/0264 ,  H01J2237/0266 ,  H01J2237/26 ,  H01L21/6719 ,  H01L21/67201

Abstract: An object of the present invention is to provide a charged particle beam device that suppresses the influence of an external electromagnetic wave, even when a shielding member, such as a vacuum valve, is in the open state. To achieve the above object, a charged particle beam device including a vacuum chamber (111) having an opening (104) that surrounds a sample delivery path is proposed. The charged particle beam device includes a conductive material (118) surrounding the opening (104) for conduction between the vacuum chamber (111) and a conductive member (106) disposed on the atmosphere side. According to an embodiment of the present invention, it is possible to restrict an electromagnetic wave (117) from reaching the sample chamber via the delivery path.

Abstract translation: 本发明的目的是提供一种抑制外部电磁波的影响的带电粒子束装置，即使在诸如真空阀的屏蔽构件处于打开状态时也是如此。 为了实现上述目的，提出了一种包括具有围绕样品传送路径的开口（104）的真空室（111）的带电粒子束装置。 带电粒子束装置包括围绕开口（104）的导电材料（118），用于在真空室（111）和设置在大气侧的导电构件（106）之间传导。 根据本发明的实施例，可以限制电磁波（117）经由输送路径到达样品室。

公开(公告)号：US20150371814A1

公开(公告)日：2015-12-24

申请号：US14764641

申请日：2014-02-05

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Seiichiro KANNO ,  Masashi FUJITA ,  Naoya ISHIGAKI ,  Makoto NISHIHARA ,  Kumiko SHIMIZU

IPC: H01J37/20 ,  H01J37/28

CPC classification number: H01J37/20 ,  H01J37/28 ,  H01J2237/2001 ,  H01J2237/24585 ,  H01J2237/24592 ,  H01J2237/2817 ,  H01L21/67248 ,  H01L21/6831

Abstract: The present invention provides a high-throughput scanning electron microscope in which a wafer (9) is held by an electrostatic chuck (10), an image is obtained using an electron beam, and the wafer surface is measured, wherein even in a case where the temperature of the wafer (9) is changed due to the environmental temperature the electron scanning microscope is capable of preventing any loss in resolution or the deterioration of the measurement reproducibility caused by thermal shrinkage accompanied by temperature change of the wafer (9). A drill hole is provided on the rear surface of the electrostatic chuck (10), and a thermometer (34) is secured in place so that the front end is brought into elastic contact with the bottom surface of the drill hole. The output of the thermometer (34) is sent to a computing unit, the computing unit computes a measurement limit time for beginning measurement, based on a predetermined algorithm, from an output value of the thermometer (34), and measuring begins at individual measurement sites after the measurement limit time has elapsed.

Abstract translation: 本发明提供一种高通量扫描电子显微镜，其中通过静电卡盘（10）保持晶片（9），使用电子束获得图像，并且测量晶片表面，其中即使在 晶片（9）的温度由于环境温度而改变，电子扫描显微镜能够防止由于伴随晶片（9）的温度变化的热收缩而导致的分辨率的损失或测量再现性的劣化。 在静电卡盘（10）的后表面上设置有钻孔，并且将温度计（34）固定就位，使得前端与钻孔的底面弹性接触。 温度计（34）的输出被发送到计算单元，计算单元基于预定的算法，从温度计（34）的输出值计算开始测量的测量极限时间，并且测量从各个测量开始 测量限制时间过后的站点。