公开(公告)号：US20170309437A1

公开(公告)日：2017-10-26

申请号：US15513695

申请日：2014-10-20

Applicant: Hitachi High-Technologies Corporation

Inventor： Toshihide AGEMURA ,  Masashi SASAKI ,  Daisuke KOBAYASHI ,  Shunsuke SATO

IPC: H01J37/073 ,  H01J37/18 ,  H01J37/28

CPC classification number: H01J37/073 ,  H01J37/18 ,  H01J37/28 ,  H01J2237/022 ,  H01J2237/06341 ,  H01J2237/1825 ,  H01J2237/2806

Abstract: The purpose of the present invention is to be able to acquire high-resolution images in a scanning electron microscope using a combination of a cold cathode (CFE) electron source and a boosting process, even at low accelerating voltage enhancing the current stability of the CFE electron source. A configuration in which a CFE electron source (101), an anode electrode (103) at positive (+) potential, and an insulator (104) for isolating the anode electrode (103) from ground potential are accommodated within a single vacuum chamber (105), and an ion pump (106) and a non-evaporable getter (NEG) pump (107) are connected to the vacuum chamber (105), is employed.

公开(公告)号：US20160086766A1

公开(公告)日：2016-03-24

申请号：US14787118

申请日：2014-04-23

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Yoshihiro TAKAHOKO ,  Daisuke KOBAYASHI ,  Masashi KIMURA ,  Masahiro SASAJIMA

IPC: H01J37/18 ,  H01J37/21 ,  H01J37/22

CPC classification number: H01J37/18 ,  H01J37/21 ,  H01J37/22 ,  H01J2237/1825 ,  H01J2237/26 ,  H01J2237/30

Abstract: An evacuation structure of a charged particle beam device includes: a vacuum chamber provided with a charged particle source; vacuum piping connected to the vacuum chamber; a main vacuum pump which is connected via the vacuum piping and evacuates the inside of the vacuum chamber; a non-evaporable getter pump disposed at a position between the vacuum chamber and the main vacuum pump in the vacuum piping; and a coarse evacuation port connected at a position between the vacuum chamber and the non-evaporable getter pump in the vacuum piping The coarse evacuation port includes: a coarse evacuation valve that opens and closes the coarse evacuation port; and a leak valve to open the vacuum chamber to the atmosphere.

Abstract translation: 带电粒子束装置的抽空结构包括：设有带电粒子源的真空室; 真空管连接到真空室; 主真空泵，通过真空管道连接并抽真空室; 设置在真空管内真空室和主真空泵之间的非蒸发性吸气泵; 以及连接在真空管内的真空室与不可蒸发吸气泵之间的位置上的粗排气口。粗排气口包括：开闭粗抽风口的粗排气阀; 以及将真空室打开至大气的泄漏阀。