-
公开(公告)号：US20200241275A1
公开(公告)日：2020-07-30
申请号：US16851960
申请日：2020-04-17
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomonori Nakamura , Ikuo Arata , Yoshihiro Ito
Abstract: An optical device for microscopic observation 4 comprises: a cold stop 13 having openings 13d, 13e corresponding to a low-magnification microscope optical system 5 and being a stop member arranged in a vacuum vessel 12 to let the light from the sample S pass to the camera 3; a warm stop 10 having an opening 14 corresponding to a high-magnification microscope optical system 5 and being a stop member arranged outside the vacuum vessel 12 to let the light from the sample S pass toward the cold stop 13; and a support member 11 supporting the warm stop 10 so that the warm stop can be inserted to or removed from on the optical axis of the light from the sample S, wherein the warm stop 10 has a reflective surface 15 on the camera 3 side and wherein the opening 14 is smaller than the openings 13d, 13e.
-
公开(公告)号：US12163900B2
公开(公告)日：2024-12-10
申请号：US17795570
申请日：2020-11-24
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Masataka Ikesu , Ikuo Arata , Yoshihiro Ito , Toshimichi Ishizuka
Abstract: The semiconductor failure analysis device includes: a light source configured to generate irradiation light with which the semiconductor device is irradiated; a solid immersion lens disposed on an optical path of the irradiation light; a light detection unit configured to receive reflected light and to output a detection signal according to the reflected light; an optical system 6 disposed between the light source and the solid immersion lens to emit the irradiation light to the semiconductor device via the solid immersion lens and disposed between the solid immersion lens and the light detection unit to emit the reflected light received via the solid immersion lens to the light detection unit. The light source emits the irradiation light having a center wavelength of 880 nm or more and 980 nm or less. The solid immersion lens is formed of GaAs.
-
公开(公告)号：US10663709B2
公开(公告)日：2020-05-26
申请号：US16025288
申请日：2018-07-02
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomonori Nakamura , Ikuo Arata , Yoshihiro Ito
Abstract: An optical device for microscopic observation 4 comprises: a cold stop 13 having openings 13d, 13e corresponding to a low-magnification microscope optical system 5 and being a stop member arranged in a vacuum vessel 12 to let the light from the sample S pass to the camera 3; a warm stop 10 having an opening 14 corresponding to a high-magnification microscope optical system 5 and being a stop member arranged outside the vacuum vessel 12 to let the light from the sample S pass toward the cold stop 13; and a support member 11 supporting the warm stop 10 so that the warm stop can be inserted to or removed from on the optical axis of the light from the sample S, wherein the warm stop 10 has a reflective surface 15 on the camera 3 side and wherein the opening 14 is smaller than the openings 13d, 13e.
-
公开(公告)号：US10048483B2
公开(公告)日：2018-08-14
申请号：US15198634
申请日：2016-06-30
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomonori Nakamura , Ikuo Arata , Yoshihiro Ito
Abstract: An optical device for microscopic observation 4 comprises: a cold stop 13 having openings 13d, 13e corresponding to a low-magnification microscope optical system 5 and being a stop member arranged in a vacuum vessel 12 to let the light from the sample S pass to the camera 3; a warm stop 10 having an opening 14 corresponding to a high-magnification microscope optical system 5 and being a stop member arranged outside the vacuum vessel 12 to let the light from the sample S pass toward the cold stop 13; and a support member 11 supporting the warm stop 10 so that the warm stop can be inserted to or removed from on the optical axis of the light from the sample S, wherein the warm stop 10 has a reflective surface 15 on the camera 3 side and wherein the opening 14 is smaller than the openings 13d, 13e.
-
-
-
Search Results
4
records
(took 0.014 seconds)
