公开(公告)号：US10124440B2

公开(公告)日：2018-11-13

申请号：US14778766

申请日：2014-03-13

申请人： HAMAMATSU PHOTONICS K.K.

发明人： Daisuke Kawaguchi ,  Makoto Nakano ,  Ryota Sugio ,  Tsubasa Hirose ,  Keisuke Araki

IPC分类号： B23K26/06 ,  B23K26/00 ,  B23K26/53 ,  B23K26/0622 ,  B23K26/03 ,  B23K26/08 ,  B23K26/064 ,  B23K103/00

摘要： A laser processing device forms a modified region in an object to be processed by converging ultrashort pulse laser light at the object and comprises a laser light source emitting the laser light, a converging optical system converging the laser light emitted from the laser light source at the object, and an aberration providing part imparting an aberration to the laser light converged at the object by the converging optical system. In an optical axis direction of the laser light, letting a reference aberration range be a range of a converging-induced aberration as an aberration occurring at a position where the laser light is converged as a result of converging the laser light at the object, the aberration providing part imparts a first aberration to the laser light such that the laser light has an elongated range longer than the reference aberration range in the optical axis direction as an aberration range and an intensity distribution in the optical axis direction with a continuous undulation in the elongated range.

公开(公告)号：US10124439B2

公开(公告)日：2018-11-13

申请号：US14778621

申请日：2014-03-13

申请人： HAMAMATSU PHOTONICS K.K.

发明人： Daisuke Kawaguchi ,  Makoto Nakano ,  Ryota Sugio ,  Tsubasa Hirose ,  Keisuke Araki

IPC分类号： B23K26/00 ,  B23K26/06 ,  B23K26/53 ,  B23K26/064 ,  H01L21/30 ,  C03B33/02 ,  C03B33/09 ,  B23K26/0622 ,  B23K26/03 ,  B23K26/08 ,  B23K103/00

摘要： The laser processing device comprises a laser light source emitting a laser light, a converging optical system converging the laser light at an object to be processed, and an aberration providing part for imparting an aberration to the laser light converged at the object by the converging optical system. In an optical axis direction of the laser light, letting a reference aberration range be a range of a converging-induced aberration as an aberration occurring at a position where the laser light is converged as a result of converging the laser light at the object, the aberration providing part imparts a first aberration to the laser light such that the laser light has an elongated range longer than the reference aberration range in the optical axis direction as an aberration range and an intensity distribution in the optical axis direction with a continuous undulation in the elongated range.

公开(公告)号：US09902016B2

公开(公告)日：2018-02-27

申请号：US14778619

申请日：2014-03-13

申请人： HAMAMATSU PHOTONICS K.K.

发明人： Daisuke Kawaguchi ,  Tsubasa Hirose ,  Keisuke Araki

IPC分类号： B23K26/00 ,  B23K26/067 ,  B23K26/53 ,  B23K26/06 ,  B23K26/073 ,  C03B33/02 ,  H01L21/78 ,  B23K26/40 ,  C03B33/07 ,  B23K103/16 ,  B23K103/00

CPC分类号： B23K26/0057 ,  B23K26/0648 ,  B23K26/0736 ,  B23K26/40 ,  B23K26/53 ,  B23K2103/172 ,  B23K2103/50 ,  B23K2103/54 ,  C03B33/0222 ,  C03B33/07 ,  H01L21/78 ,  Y02P40/57

摘要： A laser processing device converges laser light at an object to be processed having a silicon part containing silicon mounted on a glass part containing glass with a resin part interposed therebetween so as to form a modified region within the object along a line to cut. The laser processing device comprises a laser light source emitting the laser light, a spatial light modulator modulating the laser light emitted from the laser light source, and a converging optical system converging the laser light modulated by the spatial light modulator at the object. When forming the modified region in the glass part, the spatial light modulator displays an axicon lens pattern as a modulation pattern so as to form converging points at a plurality of positions juxtaposed close to each other along a laser light irradiation direction.

公开(公告)号：US10276388B2

公开(公告)日：2019-04-30

申请号：US14763267

申请日：2013-11-29

申请人： HAMAMATSU PHOTONICS K.K.

发明人： Tsubasa Hirose ,  Yuu Takiguchi ,  Yasunori Igasaki ,  Hideki Shimoi

IPC分类号： B23K26/53 ,  B23K26/55 ,  B23K26/38 ,  H01L21/268 ,  H01L21/67 ,  B23K26/06 ,  B23K26/00 ,  B23K103/00

摘要： A laser processing apparatus 1 is an apparatus for forming a modified region R in an object to be processed S by irradiating the object S with laser light L. The laser processing apparatus 1 comprises a laser light source 2 that emits the laser light L, a mount table 8 that supports the object S, and an optical system 11 that converges a ring part surrounding a center part including an optical axis of the laser light L in the laser light L emitted from the laser light source 2 at a predetermined part of the object S supported by the mount table 8. The optical system 11 adjusts a form of at least one of inner and outer edges of the ring part of the laser light L according to a position of the predetermined part in the object S.

公开(公告)号：US09914183B2

公开(公告)日：2018-03-13

申请号：US14778746

申请日：2014-03-13

申请人： HAMAMATSU PHOTONICS K.K.

发明人： Daisuke Kawaguchi ,  Makoto Nakano ,  Ryota Sugio ,  Tsubasa Hirose ,  Keisuke Araki

IPC分类号： B23K26/00 ,  B23K26/06 ,  B23K26/53 ,  G02B3/08 ,  B23K26/073 ,  G02B5/00 ,  B23K26/40 ,  B28D5/00 ,  C03B33/02 ,  B23K103/00 ,  C03B33/07

CPC分类号： B23K26/53 ,  B23K26/0643 ,  B23K26/0648 ,  B23K26/0736 ,  B23K26/40 ,  B23K2103/50 ,  B28D5/00 ,  C03B33/0222 ,  C03B33/07 ,  G02B3/08 ,  G02B5/001 ,  Y02P40/57

摘要： A laser processing device converges laser light at an object to be processed so as to form a modified region within the object along a line to cut. The laser processing device comprises a laser light source emitting the laser light, a spatial light modulator modulating the laser light emitted from the laser light source, and a converging optical system converging the laser light modulated by the spatial light modulator at the object. The spatial light modulator displays an axicon lens pattern as a modulation pattern so as to form converging points at a plurality of positions juxtaposed close to each other along a laser light irradiation direction.

公开(公告)号：US09902017B2

公开(公告)日：2018-02-27

申请号：US14778673

申请日：2014-03-13

申请人： HAMAMATSU PHOTONICS K.K.

发明人： Daisuke Kawaguchi ,  Tsubasa Hirose ,  Keisuke Araki

IPC分类号： B23K26/00 ,  B23K26/06 ,  B23K26/53 ,  B23K26/073 ,  B23K26/40 ,  B28D5/00 ,  B23K26/064 ,  C03B33/02 ,  B23K103/00

CPC分类号： B23K26/0057 ,  B23K26/0617 ,  B23K26/064 ,  B23K26/0643 ,  B23K26/0648 ,  B23K26/0665 ,  B23K26/0736 ,  B23K26/40 ,  B23K26/53 ,  B23K2103/50 ,  B28D5/00 ,  C03B33/0222 ,  Y02P40/57

摘要： A laser processing device comprises a laser light source emitting the laser light, a spatial light modulator modulating the laser light emitted from the laser light source, and a converging optical system converging the laser light modulated by the spatial light modulator at the object. A plurality of rows of modified regions include at least an entrance-surface-side modified region located on the laser light entrance surface side, an opposite-surface-side modified region located on the opposite surface side of the laser light entrance surface, and a middle modified region located between the entrance-surface-side modified region and opposite-surface-side modified region. When forming the middle modified region, the spatial light modulator displays an axicon lens pattern as a modulation pattern so as to form converging points at a plurality of positions juxtaposed close to each other along a laser light irradiation direction. When forming the entrance-surface-side modified region and opposite-surface-side modified region, the spatial light modulator is restrained from displaying the axicon lens pattern as the modulation pattern.