公开(公告)号：US10124439B2

公开(公告)日：2018-11-13

申请号：US14778621

申请日：2014-03-13

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Daisuke Kawaguchi ,  Makoto Nakano ,  Ryota Sugio ,  Tsubasa Hirose ,  Keisuke Araki

IPC: B23K26/00 ,  B23K26/06 ,  B23K26/53 ,  B23K26/064 ,  H01L21/30 ,  C03B33/02 ,  C03B33/09 ,  B23K26/0622 ,  B23K26/03 ,  B23K26/08 ,  B23K103/00

Abstract: The laser processing device comprises a laser light source emitting a laser light, a converging optical system converging the laser light at an object to be processed, and an aberration providing part for imparting an aberration to the laser light converged at the object by the converging optical system. In an optical axis direction of the laser light, letting a reference aberration range be a range of a converging-induced aberration as an aberration occurring at a position where the laser light is converged as a result of converging the laser light at the object, the aberration providing part imparts a first aberration to the laser light such that the laser light has an elongated range longer than the reference aberration range in the optical axis direction as an aberration range and an intensity distribution in the optical axis direction with a continuous undulation in the elongated range.

公开(公告)号：US09914183B2

公开(公告)日：2018-03-13

申请号：US14778746

申请日：2014-03-13

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Daisuke Kawaguchi ,  Makoto Nakano ,  Ryota Sugio ,  Tsubasa Hirose ,  Keisuke Araki

IPC: B23K26/00 ,  B23K26/06 ,  B23K26/53 ,  G02B3/08 ,  B23K26/073 ,  G02B5/00 ,  B23K26/40 ,  B28D5/00 ,  C03B33/02 ,  B23K103/00 ,  C03B33/07

CPC classification number: B23K26/53 ,  B23K26/0643 ,  B23K26/0648 ,  B23K26/0736 ,  B23K26/40 ,  B23K2103/50 ,  B28D5/00 ,  C03B33/0222 ,  C03B33/07 ,  G02B3/08 ,  G02B5/001 ,  Y02P40/57

Abstract: A laser processing device converges laser light at an object to be processed so as to form a modified region within the object along a line to cut. The laser processing device comprises a laser light source emitting the laser light, a spatial light modulator modulating the laser light emitted from the laser light source, and a converging optical system converging the laser light modulated by the spatial light modulator at the object. The spatial light modulator displays an axicon lens pattern as a modulation pattern so as to form converging points at a plurality of positions juxtaposed close to each other along a laser light irradiation direction.

公开(公告)号：US12233481B2

公开(公告)日：2025-02-25

申请号：US17763379

申请日：2020-08-07

Applicant: NICHIA CORPORATION ,  HAMAMATSU PHOTONICS K.K.

Inventor： Hiroaki Tamemoto ,  Minoru Yamamoto ,  Yusuke Sekimoto ,  Ryota Sugio ,  Tominori Nakamura

IPC: B23K26/53 ,  B23K26/046 ,  B23K26/0622 ,  B23K101/40 ,  H01L21/78

Abstract: This laser processing apparatus is for forming modified regions in an object, which includes a sapphire substrate having a C-plane as a main surface, along cutting lines by focusing laser light on the object, and is provided with a laser light source, a spatial light modulator, and a focusing optical system. The spatial light modulator performs aberration correction by a first aberration correction amount smaller than an ideal aberration correction amount when the modified region is formed along a first cutting line along an a-axis direction of the sapphire substrate, and performs aberration correction by a second aberration correction amount smaller than the ideal aberration correction amount and different from the first aberration correction amount when the modified region is formed along a second cutting line along an m-axis direction of the sapphire substrate.

公开(公告)号：US10124440B2

公开(公告)日：2018-11-13

申请号：US14778766

申请日：2014-03-13

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Daisuke Kawaguchi ,  Makoto Nakano ,  Ryota Sugio ,  Tsubasa Hirose ,  Keisuke Araki

IPC: B23K26/06 ,  B23K26/00 ,  B23K26/53 ,  B23K26/0622 ,  B23K26/03 ,  B23K26/08 ,  B23K26/064 ,  B23K103/00

Abstract: A laser processing device forms a modified region in an object to be processed by converging ultrashort pulse laser light at the object and comprises a laser light source emitting the laser light, a converging optical system converging the laser light emitted from the laser light source at the object, and an aberration providing part imparting an aberration to the laser light converged at the object by the converging optical system. In an optical axis direction of the laser light, letting a reference aberration range be a range of a converging-induced aberration as an aberration occurring at a position where the laser light is converged as a result of converging the laser light at the object, the aberration providing part imparts a first aberration to the laser light such that the laser light has an elongated range longer than the reference aberration range in the optical axis direction as an aberration range and an intensity distribution in the optical axis direction with a continuous undulation in the elongated range.