公开(公告)号：US10224437B2

公开(公告)日：2019-03-05

申请号：US15551099

申请日：2015-12-14

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Shogo Kamakura ,  Ryuta Yamada ,  Kenichi Sato

IPC: H01L31/02 ,  G01J1/02 ,  H01L31/10 ,  H01L31/107 ,  H04N5/369 ,  G01J1/44 ,  H01L23/00 ,  H01L27/144 ,  H01L31/0203 ,  H01L31/0232

Abstract: A semiconductor substrate includes a first region in which a plurality of pixels are disposed and a second region located inside the first region to be surrounded by the first region when viewed from a direction in which a principal surface and a principal surface oppose each other. A through-hole penetrating through the semiconductor substrate is formed in the second region of the semiconductor substrate. An electrode disposed on a side of the principal surface of the semiconductor substrate and electrically connected to the plurality of pixels and an electrode disposed on a side of a principal surface of a mount substrate are connected to each other via a bonding wire inserted through the through-hole.

公开(公告)号：US09620662B2

公开(公告)日：2017-04-11

申请号：US14855968

申请日：2015-09-16

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Koei Yamamoto ,  Kenzo Hayatsu ,  Terumasa Nagano ,  Yuki Okuwa ,  Ryuta Yamada

IPC: H01L31/107 ,  H01L31/028 ,  H01L27/146

CPC classification number: H01L31/107 ,  H01L27/14603 ,  H01L27/14618 ,  H01L27/14625 ,  H01L27/14636 ,  H01L27/14643 ,  H01L31/028 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2924/16195 ,  H01L2924/00014

Abstract: An ultraviolet sensor includes a silicon photodiode array having a plurality of first pixel regions and a plurality of second pixel regions. A filter film is disposed on each of the first pixel regions so as to cover each first pixel region, except on each second pixel region. The filter film lowers transmittance in a detection target wavelength range in the ultraviolet region. Each of each first pixel region and each second pixel region includes at least one pixel having an avalanche photodiode to operate in Geiger mode, and a quenching resistor connected in series to the avalanche photodiode. Each of the quenching resistors in the plurality of first pixel regions is connected through a first signal line to a first output terminal. Each of the quenching resistors in the plurality of second pixel regions is connected through a second signal line to a second output terminal.