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    Light detector
    4.
    发明授权
    Light detector 有权

    公开(公告)号：US11519785B2

    公开(公告)日：2022-12-06

    申请号：US16636539

    申请日：2018-07-24

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Masahiro Yamazaki ,  Katsumi Shibayama ,  Ryusuke Kitaura ,  Ryosuke Koike ,  Go Tanaka

    IPC: G01J5/20 ,  G01J1/02 ,  G01J5/02 ,  G01J5/04 ,  H01L27/144 ,  H01L31/0232 ,  H01L31/0248 ,  H01L31/09

    Abstract: A light detector includes a substrate, a membrane disposed on a surface of the substrate, a first and a second electrode post supporting the membrane. The first electrode post includes a first main body portion having a tubular shape spreading from a first electrode pad toward a side opposite to the substrate, and a first flange portion provided in an end portion at the side opposite to the substrate in the first main body portion. The first flange portion is provided with a first sloped surface inclined so as to approach the substrate as it goes away from the first main body portion. A first wiring layer reaches an inner surface of the first main body portion through the first sloped surface. The second electrode post and the second wiring layer are formed similarly to the first electrode post and the first wiring layer.

    Light detector
    5.
    发明授权
    Light detector 有权

    公开(公告)号：US11255730B2

    公开(公告)日：2022-02-22

    申请号：US16468070

    申请日：2017-11-30

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Masahiro Yamazaki ,  Katsumi Shibayama ,  Ryusuke Kitaura

    IPC: G01J5/24 ,  G01J5/02 ,  H01L31/0232 ,  H01L31/09

    Abstract: A light detector includes: a substrate; and a membrane which is supported on a surface of the substrate so that a space is formed between the surface of the substrate and the membrane, in which the membrane includes a first wiring layer and a second wiring layer which are opposite each other with a gap extending along a line having a curved portion interposed therebetween and a resistance layer which is electrically connected to each of the first wiring layer and the second wiring layer and has an electric resistance depending on a temperature, and in which a first edge portion at the side of the line in the first wiring layer and a second edge portion at the side of the line in the second wiring layer respectively continuously extend.

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