公开(公告)号：US09640378B2

公开(公告)日：2017-05-02

申请号：US15001709

申请日：2016-01-20

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masahiro Hayashi

IPC: H01J49/02 ,  H01J43/20 ,  H01J43/24 ,  H01J49/40

CPC classification number: H01J49/025 ,  H01J43/20 ,  H01J43/246 ,  H01J49/40

Abstract: An embodiment of the invention relates to a TOF-MS capable of performing mass spectrometry of a sample at a high throughput. The TOF-MS has an acceleration part for accelerating an ion, a detector for detecting an event of arrival of the accelerated ion, and a data processing part for performing mass spectrometry of the sample, based on a time of flight of the ion. A first structure of the detector includes an MCP, a dynode, and an anode. In the first structure, the dynode is set at a potential higher than that of an output face of the MCP. The anode is disposed at an intermediate position between the MCP and the dynode or on the dynode side with respect to the intermediate position. The anode has plural apertures and is set at a potential higher than that of the dynode.

公开(公告)号：US11315772B2

公开(公告)日：2022-04-26

申请号：US17253897

申请日：2019-06-14

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masahiro Hayashi

IPC: H01J43/24 ,  H01J49/02

Abstract: An MCP assembly of this embodiment is provided with an MCP unit and a flexible sheet electrode having a structure for facilitating handling thereof as a single body. The flexible sheet electrode is constituted by a mesh area provided with plural openings and a deformation suppressing portion surrounding the mesh area. Both the mesh area and the deformation suppressing portion are comprised of the same conductive material, and physical strength of the deformation suppressing portion is higher than that of the mesh area. With this configuration, the physical strength of an entire flexible sheet electrode is secured even if an opening ratio of the mesh area is increased, so that the handling of the flexible sheet electrode as a single body is facilitated.

公开(公告)号：US11139153B2

公开(公告)日：2021-10-05

申请号：US17252473

申请日：2019-06-14

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masahiro Hayashi

IPC: H01J43/24 ,  H01J43/28

Abstract: The MCP assembly of this embodiment is formed at least of a conductive upper support member, an MCP unit, an output electrode, a flexible sheet electrode, and a conductive lower support member as a structure for improving handleability of a flexible sheet electrode having a mesh area. The flexible sheet electrode includes the mesh area provided with plural openings. The flexible sheet electrode and the lower support member are physically and electrically connected to each other, and the flexible sheet electrode is sandwiched between the upper support member and the lower support member. As a result, even if the flexible sheet electrode becomes thin as an opening ratio of the mesh area increases, potential is set while the flexible sheet electrode is firmly held in the MCP assembly.

公开(公告)号：US09934952B2

公开(公告)日：2018-04-03

申请号：US15232066

申请日：2016-08-09

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masahiro Hayashi

IPC: H01J49/02 ,  H01J49/26 ,  H01J43/24

CPC classification number: H01J49/025 ,  H01J43/246

Abstract: The present embodiment relates to a charged-particle detector, etc. provided with a structure for effectively suppressing ion feedbacks under a low-vacuum environment. In order to capture the residual-gas ions, which are generated by collisions between the electrons output from a MCP unit 200 and residual-gas molecules, by a second electrode 400, which is electrically insulated from a first electrode 300, which is mainly for capturing electrons, the potential of the first electrode 300 is set to be higher than an output-side potential of the MCP unit 200, and, on the other hand, the potential of the second electrode 400 is set to be lower than the output-side potential of the MCP unit 200. As a result, the ion feedbacks to the MCP unit 200 are effectively suppressed.

公开(公告)号：US09613781B2

公开(公告)日：2017-04-04

申请号：US15000305

申请日：2016-01-19

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masahiro Hayashi

IPC: H01J37/26 ,  H01J37/28 ,  H01J37/04 ,  H01J37/06

CPC classification number: H01J37/28 ,  H01J37/04 ,  H01J37/06 ,  H01J37/244 ,  H01J2237/2444 ,  H01J2237/2806

Abstract: An embodiment of the invention relates to a SEM enabling a surface analysis of a sample at a high throughput. The SEM has an electron gun, an irradiation unit, and a detector. The detector, as a first structure, includes an MCP, an anode, and a dynode. The dynode is set at a potential higher than a potential of an output face of the MCP and the anode is set at a potential higher than that of the dynode. The anode is disposed on the dynode side with respect to an intermediate position between the output face of the MCP and the dynode. The anode has an aperture for letting electrons from the output face of the MCP pass toward the dynode.