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公开(公告)号：US08872145B2
公开(公告)日：2014-10-28
申请号：US14174673
申请日：2014-02-06
Applicant: Gigaphoton Inc.
Inventor： Toshiyuki Hirashita , Toshihiro Nishisaka
IPC: G21K5/08
Abstract: A target supply device according to an aspect of the present disclosure may include a target generator having a holding space and a first through-hole that communicates with the holding space, a porous filter having a thermal expansion coefficient that is substantially the same as a thermal expansion coefficient of the target generator, and a holder portion having a thermal expansion coefficient that is substantially the same as the thermal expansion coefficient of the target generator, that is configured to hold the porous filter and that is provided so as to form a seal against an inner surface of the target generator.
Abstract translation: 根据本公开的一个方面的目标供应装置可以包括具有保持空间的目标发生器和与保持空间连通的第一通孔，具有与热量基本相同的热膨胀系数的多孔过滤器 目标发电机的膨胀系数，以及具有与目标发电机的热膨胀系数基本相同的热膨胀系数的保持部，其被构造成保持多孔过滤器，并且被设置为形成密封 目标发生器的内表面。
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公开(公告)号：US10349508B2
公开(公告)日：2019-07-09
申请号：US15888111
申请日：2018-02-05
Applicant: Gigaphoton Inc.
Inventor： Yutaka Shiraishi , Toshihiro Nishisaka , Toshiyuki Hirashita , Takuya Ishii
IPC: H05G2/00
Abstract: A target storage device may include a tank configured to store a target that generates extreme ultraviolet light when being irradiated with laser light, a heater connected with the tank and configured to heat the tank, and a radiation member disposed to cover at least a part of the tank connected with the heater and configured to reflect heat radiation from the tank and the heater toward the tank.
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Patent Agency Ranking
公开(公告)号：US10369596B2
公开(公告)日：2019-08-06
申请号：US15480398
申请日：2017-04-06
Applicant: Gigaphoton Inc.
Inventor： Toshiyuki Hirashita
Abstract: A vibrator unit may be configured to vibrate a target material in a target channel and include a vibration element configured to vibrate in response to an external electrical signal having a predetermined frequency. A resonance frequency of the vibration element may be different from the predetermined frequency of the electrical signal. A vibrator unit may include a vibration transmission member in contact with the first member including the target channel in interior; and a vibration element that is in contact with the vibration transmission member. A mode-1 natural frequency of the vibration transmission member may be different from a resonance frequency of the vibration element.
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公开(公告)号：US10251253B2
公开(公告)日：2019-04-02
申请号：US15888110
申请日：2018-02-05
Applicant: Gigaphoton Inc.
Inventor： Fumio Iwamoto , Tsukasa Hori , Toshiyuki Hirashita
IPC: H05G2/00
Abstract: An extreme ultraviolet light generation device may include a chamber in which a target is irradiated with laser light and extreme ultraviolet light is generated, and a target supply unit configured to eject a target into the chamber. The target supply unit may be provided with a nozzle member including an ejection face having an ejection port configured to eject the target into the chamber. An angle θ1 defined by the ejection face and the gravity axis may satisfy a condition of “0 degrees
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公开(公告)号：US10674590B2
公开(公告)日：2020-06-02
申请号：US16126829
申请日：2018-09-10
Applicant: Gigaphoton Inc.
Inventor： Toshiyuki Hirashita , Toshihiro Nishisaka
Abstract: A tank may include: a tank main body having a space and an opening; a lid body covering the opening and a peripheral portion of the opening; a bolt for fixing the tank main body and the lid body in the peripheral portion; a first support portion arranged to surround the opening in a region on a side of the opening with respect to the bolt to support the lid body; a second support portion arranged to surround the opening in a region on the opening side with respect to the first support portion and having a height lower than a height of the first support portion; and a sealing member arranged to surround the opening in the region on the opening side with respect to the first support portion.
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公开(公告)号：US09648715B2
公开(公告)日：2017-05-09
申请号：US15143066
申请日：2016-04-29
Applicant: Gigaphoton Inc.
Inventor： Yutaka Shiraishi , Toshiyuki Hirashita , Shinya Ikesaka
CPC classification number: H05G2/006 , G03F7/70033 , H05G2/005 , H05G2/008
Abstract: A target supply device may include: a target generator configured to accommodate a liquid target material and having a nozzle with a nozzle hole from which the liquid target material is outputted; and a filter disposed in the target generator and made of glass, the glass reacting with the liquid target material, so that a solid reaction product is generated. The filter may include a first through-hole configured to allow the liquid target material to pass therethrough, and an inner surface of the first through-hole may be coated with a material which is not easy to react with the liquid target material.
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公开(公告)号：US08872126B2
公开(公告)日：2014-10-28
申请号：US14188428
申请日：2014-02-24
Applicant: Gigaphoton Inc.
Inventor： Hiroshi Umeda , Toshiyuki Hirashita
Abstract: A target supply device 4 may include a tank 51, formed of a metal, that holds a target material, an insulating member 62 that makes contact with at least part of the periphery of the tank 51, and a heater 58 that is separated from the tank 51 and heats the tank 51 via the insulating member 62.
Abstract translation: 目标供给装置4可以包括由金属形成的保持目标材料的箱51，与罐51的周边的至少一部分接触的绝缘构件62和与罐51分离的加热器58 并通过绝缘构件62加热箱51。
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