Invention Grant
- Patent Title: Vibrator unit and target supply device
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Application No.: US15480398Application Date: 2017-04-06
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Publication No.: US10369596B2Publication Date: 2019-08-06
- Inventor: Toshiyuki Hirashita
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H01L41/09
- IPC: H01L41/09 ; B06B1/06 ; H01L21/027 ; B05B17/06 ; G03F7/20 ; H05G2/00

Abstract:
A vibrator unit may be configured to vibrate a target material in a target channel and include a vibration element configured to vibrate in response to an external electrical signal having a predetermined frequency. A resonance frequency of the vibration element may be different from the predetermined frequency of the electrical signal. A vibrator unit may include a vibration transmission member in contact with the first member including the target channel in interior; and a vibration element that is in contact with the vibration transmission member. A mode-1 natural frequency of the vibration transmission member may be different from a resonance frequency of the vibration element.
Public/Granted literature
- US20170209899A1 VIBRATOR UNIT AND TARGET SUPPLY DEVICE Public/Granted day:2017-07-27
Information query
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