公开(公告)号：US20220232690A1

公开(公告)日：2022-07-21

申请号：US17457342

申请日：2021-12-02

Applicant: Gigaphoton Inc.

Inventor： Yuichi NISHIMURA ,  Takayuki YABU ,  Hiroaki NAKARAI

IPC: H05G2/00 ,  H01S3/11 ,  H01S3/13 ,  H01S3/16

Abstract: An extreme ultraviolet light generation system includes a target supply unit configured to supply a target substance to a first predetermined region, a laser system configured to output pulse laser light to be radiated to the target substance in the first predetermined region, a first sensor configured to detect an arrival timing at which the target substance has reached a second predetermined region between the target supply unit and the first predetermined region, an optical adjuster arranged on an optical path of the pulse laser light between the laser system and the first predetermined region, and a processor configured to control transmittance of the pulse laser light through the optical adjuster based on the arrival timing.

公开(公告)号：US20140098830A1

公开(公告)日：2014-04-10

申请号：US14047753

申请日：2013-10-07

Applicant: Gigaphoton Inc.

Inventor： Takayuki YABU ,  Takashi SAITO ,  Hideyuki HAYASHI ,  Kazuhiro SUZUKI ,  Hiroaki NAKARAI

IPC: H01S3/00

CPC classification number: H01S3/0085 ,  H01S3/005 ,  H01S3/2391 ,  H05G2/005 ,  H05G2/008

Abstract: An extreme ultraviolet light generation system may include an optical device configured to cause an optical path of a pulse laser beam to approximately match one of a first optical path in which the pulse laser beam is focused at a plasma generation region and a second optical path in which the pulse laser beam passes outside the plasma generation region, and a control unit configured to output a control signal to the optical device so that the optical device sets the optical path of the pulse laser beam to the second optical path from when a predetermined time starts to when the number of pulses contained in a timing signal reaches a predetermined value and sets the optical path of the pulse laser beam to the first optical path from when the number of pulses reaches the predetermined value to when the predetermined time ends.

Abstract translation: 极紫外光发生系统可以包括光学装置，其被配置为使脉冲激光束的光路近似地匹配脉冲激光束在等离子体产生区域聚焦的第一光路中的一个和第二光路中的第二光路 脉冲激光束通过等离子体产生区域以外的控制单元，以及控制单元，其配置为向光学装置输出控制信号，使得光学装置将脉冲激光束的光路从预定时间设定为第二光路 开始于当定时信号中包含的脉冲数达到预定值并且将脉冲激光束的光路从脉冲数达到预定值到当预定时间结束时设置为第一光路。

公开(公告)号：US20160192469A1

公开(公告)日：2016-06-30

申请号：US14984458

申请日：2015-12-30

Applicant: GIGAPHOTON INC.

Inventor： Yukio WATANABE ,  Miwa IGARASHI ,  Masato MORIYA ,  Hiroaki NAKARAI

IPC: H05G2/00

CPC classification number: H05G2/008 ,  G03F7/70033 ,  H05G2/003

Abstract: An apparatus for generating extreme ultraviolet light may include: a chamber having an opening through which a laser beam is introduced into the chamber; a reference member on which the chamber is mounted; a target supply unit for supplying a target material to be irradiated by the laser beam to a predetermined region inside the chamber; a laser beam focusing optical system for focusing the laser beam in the predetermined region inside the chamber to turn the target material into plasma; and a collector mirror for collecting the extreme ultraviolet light emitted from the plasma.

公开(公告)号：US20150249312A1

公开(公告)日：2015-09-03

申请号：US14694743

申请日：2015-04-23

Applicant: GIGAPHOTON INC.

Inventor： Hiroaki TSUSHIMA ,  Hakaru MIZOGUCHI ,  Junichi FUJIMOTO ,  Hiroaki NAKARAI ,  Natsushi SUZUKI

IPC: H01S3/036 ,  H01S3/097 ,  H01S3/223 ,  H01S3/038 ,  H01S3/225

CPC classification number: H01S3/036 ,  F16C19/06 ,  F16C32/0402 ,  F16C32/0406 ,  F16C33/6696 ,  F16C2204/02 ,  F16C2204/10 ,  F16C2204/52 ,  F16C2240/40 ,  F16C2360/46 ,  H01S3/038 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/104 ,  H01S3/1055 ,  H01S3/134 ,  H01S3/2232 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256

Abstract: There is provided a laser chamber housing a pair of discharge electrodes and a gas circulation fun, the laser chamber including: a magnetic bearing configured to support a shaft of the gas circulation fan, with the shaft being in non-contact with the magnetic bearing; and a touchdown bearing configured to operate as a bearing when the magnetic bearing is uncontrollable, the touchdown bearing being provided with solid lubricant configured of one or more of an Au plating layer, a Ni-containing plating layer, and a Cu plating layer.

Abstract translation: 提供了容纳一对放电电极和气体循环功能的激光室，所述激光室包括：支撑所述气体循环风扇的轴的磁性轴承，所述轴与所述磁性轴承不接触; 以及触控轴承，其构造为当所述磁性轴承不受控制时作为轴承进行操作，所述触地轴承设置有由Au镀层，含Ni镀层和Cu镀层中的一种或多种构成的固体润滑剂。