WAVELENGTH CONVERSION APPARATUS, SOLID-STATE LASER SYSTEM, AND ELECTRONIC DEVICE MANUFACTURING METHOD

    公开(公告)号:US20220158402A1

    公开(公告)日:2022-05-19

    申请号:US17666471

    申请日:2022-02-07

    Abstract: A wavelength conversion apparatus according to an aspect of the present disclosure is a wavelength conversion apparatus that performs wavelength conversion of light through a non-linear crystal and including a first non-linear crystal, a container in which the first non-linear crystal is housed, a crystal holding member provided inside the container for fixing the first non-linear crystal, a first window provided to the container for guiding light to the first non-linear crystal from outside of the container, a second window provided to the container for guiding light output from the first non-linear crystal to outside of the container, a first heater provided inside the container for heating the first non-linear crystal, a battery that supplies electric power to the first heater, and a first controller that controls electric power supply to the first heater.

    ULTRAVIOLET LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

    公开(公告)号:US20240128701A1

    公开(公告)日:2024-04-18

    申请号:US18531771

    申请日:2023-12-07

    Abstract: An ultraviolet laser device includes an oscillation stage laser outputting linearly polarized pulse laser light having an ultraviolet wavelength, an optical isolator arranged on an optical path between the oscillation stage laser and an amplifier, and a processor. The optical isolator includes a first polarizer, a first Faraday rotator rotating a polarization direction of the pulse laser light transmitted through the first polarizer in a first rotation direction, a second polarizer arranged so that the pulse laser light output from the first Faraday rotator is transmitted therethrough, a first actuator relatively moving the first magnet and the first Faraday material in an optical axis direction, and a first sensor measuring a power of pulse laser light reflected by the second polarizer among the pulse laser light output from the oscillation stage laser. The processor controls the first actuator based on a measurement result of the first sensor.

    LASER SYSTEM AND METHOD FOR MANUFACTURING ELECTRONIC DEVICES

    公开(公告)号:US20220158411A1

    公开(公告)日:2022-05-19

    申请号:US17666656

    申请日:2022-02-08

    Abstract: In a laser system according to an aspect of the present disclosure, the following components are disposed: a first container that accommodates a first heater and a first crystal holder holding a first nonlinear crystal and includes a first light incident window via which laser light is incident and a first light exit window via which the laser light exits; a second container that accommodates a second heater and a second crystal holder holding a second nonlinear crystal and includes a second light incident window via which the laser light is incident and a second light exit window via which the laser light exits; and a stage that holds the first and second containers. A controller controls the stage to move the first nonlinear crystal away from the optical path of the laser light and inserts the second nonlinear crystal into the optical path of the laser light.

    LASER APPARATUS, OPTICAL PATH ADJUSTING METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD

    公开(公告)号:US20240364070A1

    公开(公告)日:2024-10-31

    申请号:US18766700

    申请日:2024-07-09

    CPC classification number: H01S3/0835 H01S3/0071 H01S3/105

    Abstract: A laser apparatus includes an oscillator that outputs a laser beam, an amplifier that amplifies the laser beam in a chamber including discharge electrodes, front-side and rear-side optical systems disposed at positions facing each other across the chamber and constituting a ring resonator including a first optical path and a second optical path intersecting between the pair of discharge electrodes, a front-side observation device for observation of the first and second optical paths between the front-side optical system and the chamber, and a rear-side observation device for observation of the first and second optical paths between the rear-side optical system and the chamber. Through the first optical path, the front-side optical system outputs, toward the rear-side optical system, the laser beam from the oscillator. Through the second optical path, the rear-side optical system outputs, toward the front-side optical system, the laser beam through the first optical path.

    OPTICAL ISOLATOR, ULTRAVIOLET LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

    公开(公告)号:US20240103305A1

    公开(公告)日:2024-03-28

    申请号:US18531775

    申请日:2023-12-07

    CPC classification number: G02F1/093 H01S3/10061

    Abstract: An optical isolator includes an enclosure, a first polarizer disposed in the enclosure, a first Faraday rotator including a first Faraday material rotating a polarization direction of the light having passed through the first polarizer, and a first magnet producing a first magnetic field applied to a first magnetic field generation region where the first Faraday material is disposed, the first Faraday rotator disposed in the enclosure, and a first position adjustment mechanism moving the first Faraday material relative to the enclosure. A cross-sectional shape of the first Faraday material in a cross section perpendicular to an optical axis of the light passing through the first Faraday material and a cross-sectional shape of the first magnetic field generation region have major axes in the same direction. The first position adjustment mechanism moves the first Faraday material in the direction of a minor axis perpendicular to the major axis.

    WAVELENGTH CONVERSION SYSTEM, LASER SYSTEM, AND ELECTRONIC DEVICE MANUFACTURING METHOD

    公开(公告)号:US20220155650A1

    公开(公告)日:2022-05-19

    申请号:US17666607

    申请日:2022-02-08

    Abstract: A wavelength conversion system according to an aspect of the present disclosure includes a first crystal holder holding a first non-linear crystal, a second crystal holder holding a second non-linear crystal, a third crystal holder holding a third non-linear crystal, and a container housing the holders. The container has an entrance window and an emission window. The first non-linear crystal, the second non-linear crystal, and the third non-linear crystal are disposed in this order on an optical path of a laser beam traveling from the entrance window to the emission window. The crystal holders are rotatable. A first rotational axis that is a rotational axis of the first crystal holder is orthogonal to a second rotational axis that is a rotational axis of the second crystal holder, and the first rotational axis is parallel to a third rotational axis that is a rotational axis of the third crystal holder.

    WAVELENGTH CONVERTING APPARATUS
    7.
    发明申请

    公开(公告)号:US20190103725A1

    公开(公告)日:2019-04-04

    申请号:US16208687

    申请日:2018-12-04

    Abstract: A wavelength converting apparatus includes a moving device including a crystal holder holding a nonlinear crystal for converting a wavelength of laser light incident thereon and outputting the laser light, and a driving unit including a voice coil motor and moving the holder at least in a direction orthogonal to a first direction that is an optical path axis direction of the laser light. The driving unit turns the holder to change an incident angle of the laser light on the crystal. The driving unit includes: a two-dimensional driving unit including a planar voice coil motor, and a one-dimensional driving unit including a cylindrical voice coil motor. The two-dimensional driving unit performs linear driving in a second direction orthogonal to the first direction, and rotary driving around a third direction orthogonal to the first and second directions. The one-dimensional driving unit performs linear driving in the third direction.

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