SOLID-STATE LASER SYSTEM, PHASE MATCHING METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD

    公开(公告)号:US20230178957A1

    公开(公告)日:2023-06-08

    申请号:US18164376

    申请日:2023-02-03

    CPC classification number: H01S3/109 G02F1/37 H01S3/0092 G02F1/3544 H01S3/025

    Abstract: A solid-state laser system according to an aspect of the present disclosure includes a first non-linear crystal that generates first wavelength-converted light based on a first laser beam, a first adjustment unit configured to perform phase matching of the first wavelength-converted light in the first non-linear crystal, a second non-linear crystal that generates second wavelength-converted light based on a second laser beam and the first wavelength-converted light, a second adjustment unit configured to perform phase matching of the second wavelength-converted light in the second non-linear crystal, a light detection unit configured to detect light having a selected wavelength, and a processor configured to control the first adjustment unit based on intensity of at least one of the first wavelength-converted light and the first laser beam and to control the second adjustment unit based on intensity of at least one of the second wavelength-converted light and the first wavelength-converted light.

    WAVELENGTH CONVERSION APPARATUS, SOLID-STATE LASER SYSTEM, AND ELECTRONIC DEVICE MANUFACTURING METHOD

    公开(公告)号:US20220158402A1

    公开(公告)日:2022-05-19

    申请号:US17666471

    申请日:2022-02-07

    Abstract: A wavelength conversion apparatus according to an aspect of the present disclosure is a wavelength conversion apparatus that performs wavelength conversion of light through a non-linear crystal and including a first non-linear crystal, a container in which the first non-linear crystal is housed, a crystal holding member provided inside the container for fixing the first non-linear crystal, a first window provided to the container for guiding light to the first non-linear crystal from outside of the container, a second window provided to the container for guiding light output from the first non-linear crystal to outside of the container, a first heater provided inside the container for heating the first non-linear crystal, a battery that supplies electric power to the first heater, and a first controller that controls electric power supply to the first heater.

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