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公开(公告)号：US20040240489A1
公开(公告)日：2004-12-02
申请号：US10857547
申请日：2004-06-01
发明人： Yuichi Teramura , Fusao Yamanaka , Yoji Okazaki
IPC分类号： H01S003/30
CPC分类号： G03F7/70216 , G02B6/08 , G02B19/0014 , G02B19/0057 , G02B27/0994 , G03F7/70025 , H01S5/005 , H01S5/02216 , H01S5/02284 , H01S5/02292 , H01S5/4012 , H01S5/4025
摘要： In a laser module, a laser beam which is emitted from a laser element is focused by a condensing optical system and caused to enter an incidence end of an optical fiber. A laser device is provided with a plurality of these laser modules. Emission end portions of the optical fibers are bundled to form a laser emission portion. A thickness of cladding h of each optical fiber is set to a value calculated in accordance with the following equation: 1 cladding thickness null null null h null ( emission null null null light null null null amount of null null null one null null null laser null null null module null null null W required intensity null null null C null packing ratio null null null P - core diameter null null null t ) null 2 As a result, it is possible to emit a laser-beam with a high intensity that is required for functionality as a laser light source, for the purpose of raising resolution of an exposure apparatus.
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2.发明申请Method for adjusting alignment of laser beams in combined-laser-light source where the laser beams are incident on restricted area of light-emission end face of optical fiber 有权用于调整组合激光光源中的激光束对准的方法，其中激光束入射在光纤的发光端面的限制区域公开(公告)号：US20040247240A1
公开(公告)日：2004-12-09
申请号：US10808587
申请日：2004-03-25
发明人： Yuichi Teramura , Yoji Okazaki
IPC分类号： H01S003/10 , G02B006/26 , G02B006/42 , G02B027/30 , H01J003/14 , G02B006/32
CPC分类号： G02B6/4206 , G02B6/4226
摘要： A combined-laser-light source includes: a plurality of semiconductor lasers; an optical fiber; and an optical system which converges a bundle of laser beams emitted from the plurality of semiconductor lasers, and makes the converged bundle of the laser beams enter the core of the optical fiber so that the laser beams are combined in the optical fiber when the laser beams pass through the optical fiber. The optical system is aligned with the optical fiber so that the converged bundle of the laser beams is incident on an area of an end face of the core when steady temperature control is performed on the combined-laser-light source, where the area is concentric with the end face of the core, and has a diameter equal to or smaller than half of the diameter of the core.
摘要翻译： 组合激光光源包括：多个半导体激光器; 光纤; 以及会聚从多个半导体激光器发射的一束激光束的光学系统，并且使得激光束的会聚束进入光纤的核心，使得激光束在光纤中被组合在激光束 通过光纤。 光学系统与光纤对准，使得当对组合激光光源进行稳定的温度控制时，激光束的会聚束入射到芯的端面的区域，其中该区域是同心的 具有芯的端面，并且具有等于或小于芯的直径的一半的直径。
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3.发明申请Fiber module in which optical fiber coated with metal or inorganic material is fixed to sealable package so that an end of the optical fiber appears inside the package 审中-公开光纤模块，其中涂覆有金属或无机材料的光纤被固定到可密封的封装，使得光纤的一端出现在封装内公开(公告)号：US20040184753A1
公开(公告)日：2004-09-23
申请号：US10767207
申请日：2004-01-30
IPC分类号： G02B006/22
CPC分类号： G02B6/4248 , G02B6/02395 , G02B6/4206 , G02B6/4246 , G02B6/4249 , G02B6/4292
摘要： A fiber module includes: a package having a structure which allows sealing of the inside of the package; and an optical fiber having a predetermined length and being fixed to the package in such a manner that the first end of the optical fiber appears inside the package. The cladding is exposed (bare) in a vicinity of the second end, and the optical fiber other than a portion of the cladding in the vicinity of the second end is coated with at least one of a metal and an inorganic material.
摘要翻译： 纤维模块包括：具有允许密封包装内部的结构的包装; 以及具有预定长度并以这样的方式固定到封装件的光纤，使得光纤的第一端出现在封装内。 包层在第二端附近露出（裸露），并且除第二端附近的包层的一部分之外的光纤被金属和无机材料中的至少一种涂覆。
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