公开(公告)号：US09741527B2

公开(公告)日：2017-08-22

申请号：US14977436

申请日：2015-12-21

Applicant: FEI Company

Inventor： Tomas Vystavel ,  Josef Sestak ,  Pavel Poloucek ,  Lubomir Tuma ,  Michal Hrouzek ,  Tomas Trnkocy ,  Martin Cafourek

IPC: H01J37/20 ,  H01J37/26 ,  H01J37/16

CPC classification number: H01J37/16 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2007 ,  H01J2237/202 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20278 ,  H01J2237/204 ,  H01J2237/206

Abstract: A specimen holder for a Charged Particle Microscope is disclosed. The holder has a support structure with an elongated member including a specimen mounting zone. The specimen mounting zone comprises a rotor with an axis perpendicular to the elongated member with a paddle connected to it which may be rotated. Specimens may be mounted on the paddle so that rotation of the paddle allows specimens to be rotated and/or inverted for microscopic observation on both sides. Specimens may either be directly mounted on the paddle, or on a grid, half-moon grid, lift-out grid, aperture frame, dielectric film, etc.

公开(公告)号：US20180053638A1

公开(公告)日：2018-02-22

申请号：US15678394

申请日：2017-08-16

Applicant: FEI Company

Inventor： Viktor Svéda ,  Libor Novák ,  Václav Stepánek ,  Pavel Poloucek

IPC: H01J37/32 ,  B08B7/00

CPC classification number: H01J37/32871 ,  B08B7/0035 ,  C23C16/4405 ,  H01J37/02 ,  H01J37/26 ,  H01J37/30 ,  H01J37/32357 ,  H01J37/32422 ,  H01J37/32862 ,  H01J2237/022 ,  H01J2237/028

Abstract: A plasma generator is located outside the vacuum chamber and generates neutral reactive particles and charged particles. A magnet positioned outside the plasma generator deflects the charged particles, preventing some or all of them from entering the vacuum chamber, thereby preventing secondary plasma sources from forming in the vacuum chamber, while allowing neutral reactive particles to enter the vacuum chamber to reduce contamination. Associated methods are also described.

公开(公告)号：US20160307727A1

公开(公告)日：2016-10-20

申请号：US15099453

申请日：2016-04-14

Applicant: FEI Company

Inventor： Tomás Vystavel ,  Petronella Catharina Maria Baken ,  Ernst Jan Ruben Vesseur ,  Pavel Poloucek

IPC: H01J37/20 ,  H01J37/317 ,  H01J37/28

CPC classification number: H01J37/20 ,  H01J37/28 ,  H01J37/317 ,  H01J2237/2007 ,  H01J2237/208 ,  H01J2237/26 ,  H01J2237/31745

Abstract: The invention relates to a method of manipulating a sample in an evacuated chamber of a charged particle apparatus, the method performed in said evacuated chamber, the method including: providing a sample on a first substrate; bringing an extremal end of a manipulator in contact with the sample; attaching the sample to said extremal end, the attaching being a removable attaching; lifting the sample attached to the extremal end of the manipulator from the first substrate and transport the sample to a second substrate; attaching the sample to the second substrate; and detaching the sample from the extremal end of the manipulator. At least one of the steps of attaching the sample being performed solely by bringing the sample into contact with a bundle of carbon nanotubes.

Abstract translation: 本发明涉及一种在带电粒子装置的抽真空室中操作样品的方法，该方法在所述真空室中进行，所述方法包括：在第一基底上提供样品; 使机械手的极端结束与样品接触; 将样品附接到所述极端，所述附件是可移除的附接; 将附着到操纵器的极端的样品从第一基底提起并将样品输送到第二基底; 将样品附接到第二基底; 并将样品从操纵器的极端分离。 仅通过使样品与一束碳纳米管接触来附接样品的步骤中的至少一个。

公开(公告)号：US11017980B2

公开(公告)日：2021-05-25

申请号：US15099453

申请日：2016-04-14

Applicant: FEI Company

Inventor： Tomá{hacek over (s)} Vystav{hacek over (e)}l ,  Petronella Catharina Maria Baken ,  Ernst Jan Ruben Vesseur ,  Pavel Poloucek

IPC: H01J37/20 ,  H01J37/28 ,  H01J37/317

Abstract: The invention relates to a method of manipulating a sample in an evacuated chamber of a charged particle apparatus, the method performed in said evacuated chamber, the method including: providing a sample on a first substrate; bringing an extremal end of a manipulator in contact with the sample; attaching the sample to said extremal end, the attaching being a removable attaching; lifting the sample attached to the extremal end of the manipulator from the first substrate and transport the sample to a second substrate; attaching the sample to the second substrate; and detaching the sample from the extremal end of the manipulator. At least one of the steps of attaching the sample being performed solely by bringing the sample into contact with a bundle of carbon nanotubes.

公开(公告)号：US20160181059A1

公开(公告)日：2016-06-23

申请号：US14977436

申请日：2015-12-21

Applicant: FEI Company

Inventor： Tomas Vystavel ,  Josef Sestak ,  Pavel Poloucek ,  Lubomir Tuma ,  Michal Hrouzek ,  Tomas Trnkocy ,  Martin Cafourek

IPC: H01J37/16

CPC classification number: H01J37/16 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2007 ,  H01J2237/202 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20278 ,  H01J2237/204 ,  H01J2237/206

Abstract: A specimen holder for a Charged Particle Microscope, comprising: A support structure; An elongated member, a first end of which is connected to said support structure and the second end of which comprises a specimen mounting zone, the member having a longitudinal axis that extends along its length between said first and second ends, wherein said specimen mounting zone comprises: A rotor that is rotatable about a transverse axis extending substantially perpendicular to said longitudinal axis; A paddle connected to said rotor so as to be rotatable about said transverse axis, the paddle comprising a specimen mounting area; Driving means connected to said rotor, which can be invoked to rotate said paddle through a rotational range that allows the paddle to be inverted relative to an initial orientation thereof.

Abstract translation: 一种带电粒子显微镜的标本支架，包括：支撑结构; 细长构件，其第一端连接到所述支撑结构，并且其第二端包括试样安装区，所述构件具有沿其长度在所述第一和第二端之间延伸的纵向轴线，其中所述试样安装区 包括：可围绕基本上垂直于所述纵向轴线延伸的横向轴线旋转的转子; 连接到所述转子以便围绕所述横向轴线旋转的桨叶，所述桨叶包括样品安装区域; 连接到所述转子的驱动装置，其可被调用以使所述桨叶旋转通过允许桨叶相对于其初始取向而倒转的旋转范围。