公开(公告)号：US20180053638A1

公开(公告)日：2018-02-22

申请号：US15678394

申请日：2017-08-16

Applicant: FEI Company

Inventor： Viktor Svéda ,  Libor Novák ,  Václav Stepánek ,  Pavel Poloucek

IPC: H01J37/32 ,  B08B7/00

CPC classification number: H01J37/32871 ,  B08B7/0035 ,  C23C16/4405 ,  H01J37/02 ,  H01J37/26 ,  H01J37/30 ,  H01J37/32357 ,  H01J37/32422 ,  H01J37/32862 ,  H01J2237/022 ,  H01J2237/028

Abstract: A plasma generator is located outside the vacuum chamber and generates neutral reactive particles and charged particles. A magnet positioned outside the plasma generator deflects the charged particles, preventing some or all of them from entering the vacuum chamber, thereby preventing secondary plasma sources from forming in the vacuum chamber, while allowing neutral reactive particles to enter the vacuum chamber to reduce contamination. Associated methods are also described.