Wavelength-selectable coating thickness measurement apparatus
    10.
    发明授权
    Wavelength-selectable coating thickness measurement apparatus 有权
    波长可选涂层厚度测量装置

    公开(公告)号:US09534889B2

    公开(公告)日:2017-01-03

    申请号:US14505747

    申请日:2014-10-03

    CPC classification number: G01B17/025 G01B11/0666

    Abstract: Provided is an apparatus that measures a thickness of a coating by selecting a wavelength of a laser based on a color of the coating using a contactless method using a photoacoustic effect and an interferometer, the apparatus including a pulsed laser source to irradiate a pulsed laser beam toward the coating, a continuous wave (CW) laser source to irradiate a CW laser beam toward the coating, a detector to detect an optical interference signal corresponding to the CW laser beam, and a signal processor to process the optical interference signal to calculate a thickness of the coating.

    Abstract translation: 提供了一种通过使用光声效应和干涉仪的非接触式方法来选择基于涂层的颜色的激光的波长来测量涂层的装置,该装置包括用于照射脉冲激光束的脉冲激光源 向涂层提供连续波(CW)激光源,以朝向涂层照射CW激光束;检测器,用于检测对应于CW激光束的光学干涉信号;以及信号处理器,用于处理光学干涉信号以计算 涂层厚度。

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