Film thickness monitor
    1.
    发明授权
    Film thickness monitor 有权
    胶片厚度监视器

    公开(公告)号:US09360302B2

    公开(公告)日:2016-06-07

    申请号:US13679128

    申请日:2012-11-16

    IPC分类号: G01N21/00 G01B11/06 G01B9/02

    摘要: A measurement unit comprising a light source and a photodetector may be formed in a cavity in a substrate. The light source produces light that impinges a material layer and is reflected back to the photodetector. Through methods such as interferometry and ellipsometry, the thickness of the material layer may be calculated from the light intensity data measured by the photodetector. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

    摘要翻译: 包括光源和光电检测器的测量单元可以形成在基板中的空腔中。 光源产生照射材料层并被反射回光电检测器的光。 通过诸如干涉测量和椭偏仪的方法,材料层的厚度可以由光电检测器测量的光强度数据计算。 要强调的是,该摘要被提供以符合要求抽象的规则,允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是,它不会用于解释或限制权利要求的范围或含义。

    WAFER LEVEL SPECTROMETER
    2.
    发明申请

    公开(公告)号:US20120318966A1

    公开(公告)日:2012-12-20

    申请号:US13491442

    申请日:2012-06-07

    IPC分类号: G01J3/50 B82Y15/00

    摘要: A sensor apparatus for measuring characteristics of optical radiation has a substrate and a low profile spectrally selective detection system located within the substrate at one or more spatially separated locations. The spectrally selective detection system includes a generally laminar array of wavelength selectors optically coupled to a corresponding array of optical detectors. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

    摘要翻译: 用于测量光辐射特性的传感器装置具有位于一个或多个空间分离位置的衬底内的衬底和低剖面光谱选择性检测系统。 光谱选择性检测系统包括光学耦合到相应阵列的光学检测器的波长选择器的大体层流阵列。 要强调的是,该摘要被提供以符合要求抽象的规则,允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是,它不会用于解释或限制权利要求的范围或含义。

    Wafer level spectrometer
    3.
    发明授权
    Wafer level spectrometer 有权
    晶圆级光谱仪

    公开(公告)号:US09140604B2

    公开(公告)日:2015-09-22

    申请号:US13491442

    申请日:2012-06-07

    摘要: A sensor apparatus for measuring characteristics of optical radiation has a substrate and a low profile spectrally selective detection system located within the substrate at one or more spatially separated locations. The spectrally selective detection system includes a generally laminar array of wavelength selectors optically coupled to a corresponding array of optical detectors. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

    摘要翻译: 用于测量光辐射特性的传感器装置具有位于一个或多个空间分离位置的衬底内的衬底和低剖面光谱选择性检测系统。 光谱选择性检测系统包括光学耦合到相应阵列的光学检测器的波长选择器的大体层流阵列。 要强调的是,该摘要被提供以符合要求抽象的规则,允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是,它不会用于解释或限制权利要求的范围或含义。

    FILM THICKNESS MONITOR
    4.
    发明申请
    FILM THICKNESS MONITOR 有权
    电影厚度监视器

    公开(公告)号:US20130155390A1

    公开(公告)日:2013-06-20

    申请号:US13679128

    申请日:2012-11-16

    IPC分类号: G01B11/06

    摘要: A measurement unit comprising a light source and a photodetector may be formed in a cavity in a substrate. The light source produces light that impinges a material layer and is reflected back to the photodetector. Through methods such as interferometry and ellipsometry, the thickness of the material layer may be calculated from the light intensity data measured by the photodetector. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

    摘要翻译: 包括光源和光电检测器的测量单元可以形成在基板中的空腔中。 光源产生照射材料层并被反射回光电检测器的光。 通过诸如干涉测量和椭偏仪的方法,材料层的厚度可以由光电检测器测量的光强度数据计算。 要强调的是,该摘要被提供以符合要求抽象的规则,允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是,它不会用于解释或限制权利要求的范围或含义。

    Identity assurance method
    5.
    发明授权

    公开(公告)号:US10664576B2

    公开(公告)日:2020-05-26

    申请号:US15657201

    申请日:2017-07-23

    摘要: Provided are computer-implemented methods and systems used in assuring a person's identity that include the steps of receiving from the person one or more identifying statements and receiving from the person authorization to access one or more identity sources on which the person is registered. Data is then extracted from one or more of the identity sources to corroborate the one or more identifying statements, and the data aggregated to provide first and second scores, the first score representing factors that tend to affirm the person's identifying statements and the second score representing factors that tend to disaffirm the person's identifying statements. Optionally, the scores are displayed in a graphical user interface.

    CONNECTOR
    7.
    发明申请
    CONNECTOR 审中-公开
    连接器

    公开(公告)号:US20090278346A1

    公开(公告)日:2009-11-12

    申请号:US12116473

    申请日:2008-05-07

    申请人: Kevin O'Brien

    发明人: Kevin O'Brien

    IPC分类号: F16L55/00

    CPC分类号: F16L37/091

    摘要: A connector comprises a body having a passage therethrough for fluid flow and a female portion for receiving by a slip fit a tubular member. Gripping means are placed in the passage in the female portion for gripping the tubular member and is configured for preventing the tubular member from rotating. A retainer retains the gripping means in place and a seal prevents leakage.

    摘要翻译: 连接器包括具有用于流体流动的通道的主体和用于通过滑动配合接收管状构件的阴部分。 夹持装置放置在阴部分中的通道中,用于夹持管状构件,并且构造成用于防止管状构件旋转。 保持器将夹持装置保持在适当位置,并且密封件防止泄漏。

    SPACE-BASED LEVER ARM CORRECTION IN NAVIGATIONAL SYSTEMS EMPLOYING SPOT BEAMS
    9.
    发明申请
    SPACE-BASED LEVER ARM CORRECTION IN NAVIGATIONAL SYSTEMS EMPLOYING SPOT BEAMS 有权
    采用SPOT BEAMS的导航系统中的基于空间的双臂校正

    公开(公告)号:US20070080859A1

    公开(公告)日:2007-04-12

    申请号:US11247641

    申请日:2005-10-10

    IPC分类号: H04B7/185

    摘要: A method and apparatus for estimating a lever arm correction between the wide beam antenna and the spot beam antenna in a navigational satellite system is disclosed. A prescribed satellite maneuver is used to increase the accuracy of the predicted satellite attitude in determining the lever arm, and lever arm corrections are provided to navigation receivers using curve fit coefficients to permit long range estimates and to minimize data transmission requirements.

    摘要翻译: 公开了一种用于在导航卫星系统中估计宽波束天线和点波束天线之间的杠杆臂校正的方法和装置。 使用规定的卫星机动来增加在确定杠杆臂时所预测的卫星姿态的准确度,并且使用曲线拟合系数将导轨接收器提供杠杆臂校正,以允许长距离估计并且最小化数据传输要求。

    Amine-free deposition of metal-nitride films
    10.
    发明申请
    Amine-free deposition of metal-nitride films 有权
    无氮化物沉积金属氮化物膜

    公开(公告)号:US20070075427A1

    公开(公告)日:2007-04-05

    申请号:US11240005

    申请日:2005-09-30

    IPC分类号: H01L29/40 H01L21/44

    摘要: A method for forming a metal carbide layer begins with providing a substrate, an organometallic precursor material, at least one doping agent such as nitrogen, and a plasma such as a hydrogen plasma. The substrate is placed within a reaction chamber; and heated. A process cycle is then performed, where the process cycle includes pulsing the organometallic precursor material into the reaction chamber, pulsing the doping agent into the reaction chamber, and pulsing the plasma into the reaction chamber, such that the organometallic precursor material, the doping agent, and the plasma react at the surface of the substrate to form a metal carbide layer. The process cycles can be repeated and varied to form a graded metal carbide layer.

    摘要翻译: 形成金属碳化物层的方法开始于提供衬底,有机金属前体材料,至少一种掺杂剂如氮气,以及诸如氢等离子体的等离子体。 将基板放置在反应室内; 并加热。 然后进行处理循环,其中工艺循环包括将有机金属前体材料脉冲到反应室中,将掺杂剂脉冲到反应室中,并将等离子体脉冲到反应室中,使得有机金属前体材料,掺杂剂 并且等离子体在基板表面反应形成金属碳化物层。 可以重复和改变工艺循环以形成渐变的金属碳化物层。