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公开(公告)号：US5563900A
公开(公告)日：1996-10-08
申请号：US287820
申请日：1994-08-09
CPC分类号： H01S5/18397 , H01S5/1057 , H01S5/18308 , H01S5/18358 , H01S5/18361 , H01S5/2063
摘要： A surface emitting light emitting device with a semiconducting substrate, a semiconducting mirror stack positioned on the substrate surface, a spacer layer positioned on the mirror stack, an active region positioned on the spacer layer, a second spacer layer positioned on the active region, a second semiconducting mirror stack positioned on the second spacer layer, and a top contact layer positioned in contact with the second semiconducting mirror stack. The active region includes multiple quantum wells each having a different transition wavelength and positioned on the spacer layer with the quantum well possessing the longest transition wavelength located closest to the spacer layer and additional quantum wells of the multiple quantum wells positioned in order of decreasing transition wavelength so that the sum of the emission from all of the quantum wells results in a broad and uniform output emission spectrum.
摘要翻译： 具有半导体衬底的表面发射发光器件，位于衬底表面上的半导体反射镜叠层，位于反射镜叠层上的间隔层，位于间隔层上的有源区，位于有源区上的第二间隔层， 位于第二间隔层上的第二半导体反射镜叠层和与第二半导体反射镜叠层定位接触的顶部接触层。 有源区包括多个量子阱，每个量子阱具有不同的跃迁波长并且位于间隔层上，其中量子阱具有位于最靠近间隔层的最长过渡波长，并且多个量子阱的额外量子阱按照降低的跃迁波长 使得来自所有量子阱的发射的总和导致宽而均匀的输出发射光谱。
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公开(公告)号：US5741724A
公开(公告)日：1998-04-21
申请号：US774819
申请日：1996-12-27
申请人： Jamal Ramdani , Michael S. Lebby , Paige M. Holm
发明人： Jamal Ramdani , Michael S. Lebby , Paige M. Holm
IPC分类号： C30B29/38 , H01L21/20 , H01L21/203 , H01L21/205 , H01L33/00
CPC分类号： H01L33/007 , H01L21/0242 , H01L21/02458 , H01L21/02488 , H01L21/02505 , H01L21/0254 , Y10S438/967
摘要： A method of growing gallium nitride on a spinel substrate by providing a supporting substrate having a surface, and disposing a plurality of buffer layers on the surface of the supporting substrate. The plurality of buffer layers including a first buffer layer of aluminum oxynitride having a low percentage of mismatch to the spinel substrate. The second buffer layer is disposed on the first buffer layer and includes a plurality of layers of a graded aluminum oxynitride having a low dislocation density. A third buffer layer of aluminum nitride is disposed on the second buffer layer. A fourth buffer layer of gallium nitride is disposed on the third buffer layer. Subsequently, a photonic device structure, such as a laser, LED or detector, an electronic device structure, such as a field effect transistor or modulation doped field effect transistor, or an optical waveguide is fabricated on the fourth buffer layer.
摘要翻译： 一种通过提供具有表面的支撑衬底在尖晶石衬底上生长氮化镓的方法，并且在支撑衬底的表面上设置多个缓冲层。 多个缓冲层包括与尖晶石衬底失配百分比低的氮氧化铝的第一缓冲层。 第二缓冲层设置在第一缓冲层上，并且包括具有低位错密度的多层梯度的氮氧化铝。 氮化铝的第三缓冲层设置在第二缓冲层上。 氮化镓的第四缓冲层设置在第三缓冲层上。 随后，在第四缓冲层上制造诸如激光，LED或检测器之类的光子器件结构，诸如场效应晶体管或调制掺杂场效应晶体管的电子器件结构或光波导。
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公开(公告)号：US5432809A
公开(公告)日：1995-07-11
申请号：US261502
申请日：1994-06-15
CPC分类号： H01S5/18327 , H01S5/209
摘要： Patterned-mirrors for VCSELs are fabricated by forming a first mirror stack of a plurality of pairs of relatively high and low index of refraction layers of AlGaAs, forming an active region of aluminum-free material on the first mirror stack, and forming a second mirror stack of a plurality of pairs of relatively high and low index of refraction layers of AlGaAs. The second mirror stack can be selectively etched to the active region by utilizing the aluminum-free active region as an etch stop.
摘要翻译： 通过形成多对相对较高和较低折射率的AlGaAs折射率层的第一反射镜叠层，在第一反射镜叠层上形成无铝材料的有源区，并形成第二反射镜，制造用于VCSEL的图案反射镜 堆叠的多对相对较高和较低折射率的AlGaAs层。 通过利用无铝活性区域作为蚀刻停止，可以将第二反射镜堆叠选择性地蚀刻到有源区域。
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公开(公告)号：US5388120A
公开(公告)日：1995-02-07
申请号：US124065
申请日：1993-09-21
CPC分类号： H01S5/18391 , H01S2301/166 , H01S5/1089 , H01S5/18305 , H01S5/18388
摘要： A vertical cavity laser with unstable resonator including a substrate having opposed major surfaces with a first semiconductor mirror stack positioned on one major surface of the substrate, an active region positioned on the first stack and a second semiconductor mirror stack positioned on the active region so as to sandwich the active region between the first and second stacks. Layers of the second stack being etched so as to spatially modulate the thickness of the second stack such that reflectivity is reduced in a central portion of the second stack and increases toward an edge thereof.
摘要翻译： 一种具有不稳定谐振器的垂直腔体激光器，其包括具有相对主表面的衬底，其具有位于衬底的一个主表面上的第一半导体镜叠层，位于第一堆叠上的有源区域和位于有源区域上的第二半导体反射镜堆叠， 以将活动区域夹在第一和第二堆叠之间。 蚀刻第二叠层的层以空间地调制第二堆叠的厚度，使得第二堆叠的中心部分的反射率减小，并朝向其边缘增加。
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公开(公告)号：US5125054A
公开(公告)日：1992-06-23
申请号：US736969
申请日：1991-07-25
CPC分类号： G02B6/30 , G02B6/3817 , G02B6/42 , G02B6/421 , G02B6/4214
摘要： An interface between a laminated polymer optical waveguide (15) and an electronic device (39). The interface does not degrade the desirable properties of the optical waveguide (15), is simple, is low cost, and is compatible with integrated circuit technology as well as optical and electrical connectors (41,42,43,46). The interface includes at least one vertical cavity surface emitting laser or photosensitive diode (11,37) mounted above the surface of the optical waveguide (15). A mirror (21) positioned at an angle with respect to the optical waveguide (15) serves to reflect light between either the vertical cavity surface emitting laser or photosensitive diode (11,37) and the optical waveguide (15). At least one microstrip line (16) couples electrical signals between the vertical cavity surface emitting laser (11,37) and the electronic device (39).
摘要翻译： 叠层聚合物光波导（15）和电子装置（39）之间的界面。 该接口不会降低光波导（15）的理想特性，简单，成本低，并且与集成电路技术以及光电连接器（41,42,43,46）兼容。 界面包括安装在光波导（15）的表面上方的至少一个垂直腔表面发射激光器或光敏二极管（11,37）。 相对于光波导（15）定位成一定角度的反射镜（21）用于在垂直空腔表面发射激光器或感光二极管（11,37）和光波导（15）之间反射光。 至少一条微带线（16）在垂直腔表面发射激光器（11,37）和电子器件（39）之间耦合电信号。
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6.发明授权VCSEL with vertical offset operating region providing a lateral waveguide and current limiting and method of fabrication 失效具有垂直偏移操作区域的VCSEL提供横向波导和电流限制以及制造方法
公开(公告)号：US5351257A
公开(公告)日：1994-09-27
申请号：US28015
申请日：1993-03-08
CPC分类号： H01S5/18327 , H01S2301/176 , H01S5/0207 , H01S5/0422
摘要： A VCSEL including a first mirror stack, an active region and a second mirror stack positioned on a substrate with portions of the active region and the first and second mirror stacks being offset from surrounding portions by an offset area in the surface of the substrate so as to define a lateral waveguide which confines the operating region of the VCSEL. The surrounding portions of the second mirror stack are removed to provide current control and refractory metal contacts are formed on the upper and lower surfaces. Methods of fabricating the offset as a depression or a mesa in the surface of the substrate and the resulting VCSEL are disclosed.
摘要翻译： 包括位于衬底上的第一反射镜堆叠，有源区域和第二反射镜堆叠的VCSEL，其中有源区域和第一和第二反射镜叠层的部分通过衬底的表面中的偏移区域从周围部分偏移，从而 以限定限制VCSEL的操作区域的横向波导。 移除第二反射镜叠层的周围部分以提供电流控制，并且在上表面和下表面上形成耐火金属触点。 公开了将偏移制造为衬底表面中的凹陷或台面的方法和所得到的VCSEL。
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公开(公告)号：US5170448A
公开(公告)日：1992-12-08
申请号：US817224
申请日：1992-01-06
申请人： Donald E. Ackley , Michael S. Lebby
发明人： Donald E. Ackley , Michael S. Lebby
IPC分类号： G02B6/12 , G02B6/122 , G02B6/42 , H01L31/0232
CPC分类号： G02B6/12004 , G02B6/1221 , G02B2006/12104
摘要： A method is provided for partially collecting light from a polymer waveguide (11, 56). A polymer waveguide (11, 56) is provided, through which a light signal (17) is traveling. A faceted groove (28) is placed in the polymer waveguide (11, 56), thereby reflecting a controllable portion of the light (22) that is traveling through the polymer waveguide (11, 56) from the facet (21) at an oblique angle. Typically, the reflected light is directed into a photodetector (24, 41), which is included into an integrated circuit (52, 53) on a substrate (51).
摘要翻译： 提供了用于部分地收集来自聚合物波导（11,56）的光的方法。 提供聚光波导（11,56），光信号（17）通过该波导行进。 在聚合物波导（11,56）中放置有一个小平面凹槽（28），从而从斜面（21）以倾斜方式反射从聚合物波导（11,56）行进的光（22）的可控部分 角度。 通常，反射光被引导到包括在基板（51）上的集成电路（52,53）中的光电检测器（24,41）中。
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公开(公告)号：US5466633A
公开(公告)日：1995-11-14
申请号：US232972
申请日：1994-04-25
CPC分类号： H01S5/18308 , H01L33/0062 , H01S5/423 , H04N1/0311 , H04N1/0313 , H04N1/0317 , H01S5/0207 , H01S5/0264 , H01S5/18352 , H01S5/2063
摘要： An article and method for manufacturing an optical reading head (400,500) including an optically transparent substrate (100) with a first surface (103) and a second surface (116), wherein the first surface (103) and the second surface (116) are .joined at an angle. Depositing a plurality of layers having an upper portion (114), a middle portion 111, 112, 113), and a lower portion (101) that are optically active on the first and second surfaces (103, 116) of the optically transparent substrate (100). Forming light emitting devices (406, 407) in the plurality of layers on the second surface (116), thereby generating light emitting devices (406, 407) on the angle in the plurality of layers on the second surface (116). Positioning a detection device (402) in a normal plane to the first surface (103).
摘要翻译： 一种用于制造包括具有第一表面（103）和第二表面（116）的光学透明基板（100）的光学读取头（400,500）的制品和方法，其中所述第一表面（103）和所述第二表面（116） 以一定角度连接。 在光学透明基板的第一和第二表面（103,116）上沉积具有上部（114），中间部分111,112,113的多个层和光学活性的下部（101） （100）。 在第二表面（116）上的多个层中形成发光器件（406,407），从而以第二表面（116）上的多个层的角度生成发光器件（406,407）。 将检测装置（402）定位在第一表面（103）的正常平面内。
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公开(公告)号：US5446752A
公开(公告)日：1995-08-29
申请号：US271534
申请日：1994-07-07
CPC分类号： H01S5/18308 , H01S5/0207 , H01S5/18327 , H01S5/1833 , H01S5/18358 , H01S5/2063 , H01S5/2222
摘要： A top-emitting vertical cavity surface emitting laser with a current blocking layer at the substrate and offset layers in the mirror stack providing an optical waveguide aligned to the injected current distribution.
摘要翻译： 在衬底上具有电流阻挡层的顶发射垂直腔表面发射激光器和反射镜堆叠中的偏移层，提供与注入的电流分布对准的光波导。
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公开(公告)号：US5349210A
公开(公告)日：1994-09-20
申请号：US12488
申请日：1993-02-02
CPC分类号： H01S5/18308 , H01L33/0062 , H01S5/423 , H04N1/0311 , H04N1/0313 , H04N1/0317 , H01S5/0207 , H01S5/0264 , H01S5/18352 , H01S5/2063
摘要： An article and method for manufacturing an optical reading head (400,500) including an optically transparent substrate (100) with a first surface (103) and a second surface (116), wherein the first surface (103) and the second surface (116) are joined at an angle. Depositing a plurality of layers having an upper portion (114), a middle portion (111, 112, 113), and a lower portion (101) that are optically active on the first and second surfaces (103, 116) of the optically transparent substrate (100). Forming light emitting devices (406, 407) in the plurality of layers on the second surface (116), thereby generating light emitting devices (406, 407) on the angle in the plurality of layers of the second surface (116). Positioning a detection device (402) in a normal plane to the first surface (103).
摘要翻译： 一种用于制造包括具有第一表面（103）和第二表面（116）的光学透明基板（100）的光学读取头（400,500）的制品和方法，其中所述第一表面（103）和所述第二表面（116） 以一定角度连接。 在光学透明的第一和第二表面（103,116）上沉积具有光学活性的上部（114），中间部分（111,112,113）和下部（101）的多个层， 基板（100）。 在第二表面（116）上的多个层中形成发光器件（406,407），从而在第二表面（116）的多个层中的角度上产生发光器件（406,407）。 将检测装置（402）定位在第一表面（103）的正常平面内。
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