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公开(公告)号:US07559992B2
公开(公告)日:2009-07-14
申请号:US11305201
申请日:2005-12-19
申请人: Daisuke Suzuki , Masayuki Hasegawa , Atsushi Endo
发明人: Daisuke Suzuki , Masayuki Hasegawa , Atsushi Endo
CPC分类号: H01L21/67017
摘要: A semiconductor processing apparatus includes a process chamber to accommodate a target substrate, a gas supply system to supply a process gas into the process chamber, an exhaust unit to exhaust the process chamber, and an exhaust line connecting the process chamber to the exhaust unit. An opening variable valve is disposed on the exhaust line, and an inactive gas line is connected to the exhaust line on an upstream side of the opening variable valve to introduce an inactive gas. A pressure control mechanism is configured to control a pressure in the process chamber by adjusting at least one of an opening ratio of the opening variable valve and a flow rate of the inactive gas during a process in the process chamber while causing the exhaust unit to exhaust the process chamber and introducing the inactive gas from the inactive gas line into the exhaust line.
摘要翻译: 半导体处理装置包括容纳目标基板的处理室,向处理室供给处理气体的气体供给系统,排出处理室的排气单元和将处理室连接到排气单元的排气管路。 在排气管上设置有可开启的可变阀,在该可开启的可变阀的上游侧与排气管连接有惰性气体导入惰性气体。 压力控制机构被配置为通过在使排气单元排气的同时调节处理室中的过程期间开启可变阀的开启比率和惰性气体的流量中的至少一个来控制处理室中的压力 处理室并将惰性气体从惰性气体管线引入排气管线。
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公开(公告)号:US20060134811A1
公开(公告)日:2006-06-22
申请号:US11305201
申请日:2005-12-19
申请人: Daisuke Suzuki , Masayuki Hasegawa , Atsushi Endo
发明人: Daisuke Suzuki , Masayuki Hasegawa , Atsushi Endo
IPC分类号: H01L21/00
CPC分类号: H01L21/67017
摘要: A semiconductor processing apparatus includes a process chamber to accommodate a target substrate, a gas supply system to supply a process gas into the process chamber, an exhaust unit to exhaust the process chamber, and an exhaust line connecting the process chamber to the exhaust unit. An opening variable valve is disposed on the exhaust line, and an inactive gas line is connected to the exhaust line on an upstream side of the opening variable valve to introduce an inactive gas. A pressure control mechanism is configured to control a pressure in the process chamber by adjusting at least one of an opening ratio of the opening variable valve and a flow rate of the inactive gas during a process in the process chamber while causing the exhaust unit to exhaust the process chamber and introducing the inactive gas from the inactive gas line into the exhaust line.
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公开(公告)号:US20050260095A1
公开(公告)日:2005-11-24
申请号:US11132228
申请日:2005-05-19
申请人: Masayuki Hasegawa
发明人: Masayuki Hasegawa
CPC分类号: B23K35/262
摘要: The invention relates to a lead-free solder alloy including 1 to 15 percent by weight of Bi, 0.01 to 2 percent by weight of Sb, 0.001 to 2 percent by weight of Co, and the balance percent of Sn, so as to make the individual amounts of Bi, Sb, Co and Sn summing up to 100% by weight, in which Sb is substantially present as a solid solution with Bi. The alloy is prepared by solidifying a melt obtained by melting Bi together with Sb to give a mother alloy of Bi and Sb, i.e. the solid solution of Bi and Sb, and then solidifying a melt obtained by melting the mother alloy of Bi and Sb together with Sn and Co. The lead-free solder alloy according to the present invention has high tensile strength and low melting temperature. Furthermore, the alloy displays improved performance in practical characteristics such as wettability, thermal shock resistance, and is inexpensive.
摘要翻译: 本发明涉及一种无铅焊料合金,其包含1至15重量%的Bi,0.01至2重量%的Sb,0.001至2重量%的Co和余量的Sn,以使 单个量的Bi,Sb,Co和Sn总计高达100重量%,其中Sb以Bi作为固溶体基本存在。 通过使与Bi一起熔融Bi而获得的熔融物固化而得到Bi和Sb的母合金即Bi和Sb的固溶体,然后使通过将Bi和Sb的母合金熔融在一起熔融而得到的熔体固化,从而制备合金 使用Sn和Co。根据本发明的无铅焊料合金具有高拉伸强度和低熔融温度。 此外,合金在润湿性,耐热冲击性等实用特性方面表现出改善的性能,并且价格便宜。
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公开(公告)号:US5203637A
公开(公告)日:1993-04-20
申请号:US826853
申请日:1992-01-28
CPC分类号: B29C33/0033 , B43K23/124 , B29L2031/56 , B29L2031/7252
摘要: A cap for a writing implement comprises an outer cap having open top and bottom ends with an inner cap having at its top a closed end and at its bottom an open end and coaxially connected to the outer cap by means of a plurality of radially extending ribs to define openings between the outer and inner caps. Flange elements are disposed below the openings for preventing the writing tip from entering the openings and guiding it toward the inner cap, the flange opening elements being circumferentially spaced apart from one another by means of slits in alignment with the ribs.
摘要翻译: 用于书写工具的帽包括外盖,其具有开放的顶部和底部端部,其内部顶盖具有封闭端,并且在其底部具有开口端,并且借助于多个径向延伸的肋部同轴地连接到外盖 以限定外盖和内盖之间的开口。 法兰元件设置在开口下方,用于防止书写尖端进入开口并将其引向内盖,凸缘开口元件通过与肋对准的狭缝彼此周向间隔开。
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公开(公告)号:US08461059B2
公开(公告)日:2013-06-11
申请号:US12838911
申请日:2010-07-19
IPC分类号: H01L21/473
CPC分类号: C23C16/402 , C23C16/45525 , C23C16/45557 , H01L21/02164 , H01L21/0228 , H01L21/3141 , H01L21/31608
摘要: A batch CVD method repeats a cycle including adsorption and reaction steps along with a step of removing residual gas. The adsorption step is preformed while supplying the source gas into the process container by first setting the source gas valve open for a first period and then setting the source gas valve closed, without supplying the reactive gas into the process container by keeping the reactive gas valve closed, and without exhausting gas from inside the process container by keeping the exhaust valve closed. The reaction step is performed without supplying the source gas into the process container by keeping the source gas valve closed, while supplying the reactive gas into the process container by setting the reactive gas valve open, and exhausting gas from inside the process container by setting the exhaust valve to gradually decrease its valve opening degree from a predetermined open state.
摘要翻译: 分批CVD法重复包括吸附和反应步骤的循环以及除去残余气体的步骤。 通过首先将源气体阀开启第一时间段,然后将源气体阀关闭而将源气体供应到处理容器中,同时将原料气体供给到处理容器中,同时通过保持反应气体阀 关闭,并且不通过保持排气阀关闭从处理容器内部排出气体。 通过将源气体阀保持关闭,同时通过将反应性气体阀打开而将反应性气体供给到处理容器中,并且通过将处理容器内的气体排出到处理容器内部来排出气体,从而进行反应步骤, 排气阀从预定的打开状态逐渐减小阀开度。
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公开(公告)号:US08383848B2
公开(公告)日:2013-02-26
申请号:US13171581
申请日:2011-06-29
申请人: Hidenori Hanaoka , Masato Takano , Naoko Ochi , Kazuo Takaoki , Kazuyuki Ito , Masayuki Hasegawa
发明人: Hidenori Hanaoka , Masato Takano , Naoko Ochi , Kazuo Takaoki , Kazuyuki Ito , Masayuki Hasegawa
IPC分类号: C07F17/00 , C08F4/6192 , C08F4/6592 , B01J31/22
CPC分类号: C07F17/00 , C07C13/553 , C07C2602/08 , C07C2603/14 , C08F4/65912 , C08F4/65916 , C08F10/00 , C08F110/06 , C08F210/16 , C08F4/65927 , C08F2500/03 , C08F2500/15 , C08F210/08 , C08F2500/09
摘要: A transition metal compound represented by the formula (1-1) or the formula (1-2) (M is a transition metal atom) and a process for producing a catalyst for olefin polymerization comprising a step of bringing the transition metal compound into contact with a co-catalytic component for activation.
摘要翻译: 由式(1-1)或式(1-2)表示的过渡金属化合物(M是过渡金属原子)和用于制备烯烃聚合催化剂的方法包括使过渡金属化合物接触的步骤 具有用于活化的助催化组分。
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公开(公告)号:US20110021033A1
公开(公告)日:2011-01-27
申请号:US12838911
申请日:2010-07-19
IPC分类号: H01L21/46
CPC分类号: C23C16/402 , C23C16/45525 , C23C16/45557 , H01L21/02164 , H01L21/0228 , H01L21/3141 , H01L21/31608
摘要: A batch CVD method repeats a cycle including adsorption and reaction steps along with a step of removing residual gas. The adsorption step is preformed while supplying the source gas into the process container by first setting the source gas valve open for a first period and then setting the source gas valve closed, without supplying the reactive gas into the process container by keeping the reactive gas valve closed, and without exhausting gas from inside the process container by keeping the exhaust valve closed. The reaction step is performed without supplying the source gas into the process container by keeping the source gas valve closed, while supplying the reactive gas into the process container by setting the reactive gas valve open, and exhausting gas from inside the process container by setting the exhaust valve to gradually decrease its valve opening degree from a predetermined open state.
摘要翻译: 分批CVD法重复包括吸附和反应步骤的循环以及除去残余气体的步骤。 通过首先将源气体阀开启第一时间段,然后将源气体阀关闭而将源气体供应到处理容器中,同时将原料气体供给到处理容器中,同时通过保持反应气体阀 关闭,并且不通过保持排气阀关闭从处理容器内部排出气体。 通过将源气体阀保持关闭,同时通过将反应性气体阀打开而将反应性气体供给到处理容器中,并且通过将处理容器内的气体排出到处理容器内部来排出气体,进行反应步骤, 排气阀从预定的打开状态逐渐减小阀开度。
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公开(公告)号:US07430688B2
公开(公告)日:2008-09-30
申请号:US11004000
申请日:2004-12-03
IPC分类号: G06F11/00
CPC分类号: H04L41/06 , H04L41/0213 , H04L41/0893 , H04L43/0817
摘要: A network monitoring method and system reduces a load to a monitoring network without deteriorating accuracy of detecting a malfunction. A plurality of network constituent elements that constitute a communication network are connected to an operation system through a monitoring network. A health check for detecting a malfunction is periodically performed between a group of the network constituent elements positioned closed to each other within the communication network at a short monitoring period. A health check of malfunction detection on all of the network constituent elements is performed by the operation system at a long monitoring period longer than the short monitoring period.
摘要翻译: 网络监控方法和系统可以减少对监控网络的负担,而不会降低检测故障的准确性。 构成通信网络的多个网络构成要素通过监控网络连接到操作系统。 在短的监视周期内,在通信网络内彼此关闭的一组网络组成元件周期性地执行用于检测故障的健康检查。 所有网络构成要素的故障检测的健康检查由操作系统在比短监视期间长的监视期间进行。
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公开(公告)号:US20060085680A1
公开(公告)日:2006-04-20
申请号:US11004000
申请日:2004-12-03
IPC分类号: G06F11/00
CPC分类号: H04L41/06 , H04L41/0213 , H04L41/0893 , H04L43/0817
摘要: A network monitoring method and system reduces a load to a monitoring network without deteriorating accuracy of detecting a malfunction. A plurality of network constituent elements that constitute a communication network are connected to an operation system through a monitoring network. A health check for detecting a malfunction is periodically performed between a group of the network constituent elements positioned closed to each other within the communication network at a short monitoring period. A health check of malfunction detection on all of the network constituent elements is performed by the operation system at a long monitoring period longer than the short monitoring period.
摘要翻译: 网络监控方法和系统可以减少对监控网络的负担,而不会降低检测故障的准确性。 构成通信网络的多个网络构成要素通过监控网络连接到操作系统。 在短的监视周期内,在通信网络内彼此关闭的一组网络组成元件周期性地执行用于检测故障的健康检查。 所有网络构成要素的故障检测的健康检查由操作系统在比短监视期间长的监视期间进行。
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公开(公告)号:US4939990A
公开(公告)日:1990-07-10
申请号:US357765
申请日:1989-05-26
摘要: The present invention provides a rotary stamping apparatus including a shaft member having a polygonal configuration in a cross-section perpendicular to its axis of rotation and holding a plurality of stamp cartridges faced outwardly; a gripper case for supporting the shaft member at its opposite sides, the gripper case having an invert U-shaped configuration in cross-section; an elevator frame slidably mounted within the gripper case and movable between an outer position in which the outer end of the elevator frame is positioned outwardly from a plane including one of the stamp cartridges located in its usable position and an inner position in which the elevator frame is retracted inwardly from the plane, the elevator frame being resiliently biased toward the outer position; a selector knob for rotating the shaft member to the desired position; and each of the stamp cartridges being capable of being detachably mounted on the shaft member by sliding the stamp cartridge in the plane of rotation of the shaft member.
摘要翻译: 本发明提供了一种旋转冲压装置,其包括:轴构件,其具有垂直于其旋转轴线的横截面中的多边形构型,并且保持朝向外侧的多个冲压筒; 用于在其相对侧支撑轴构件的夹持器壳体,所述夹持器壳体具有横截面的倒U形构造; 电梯架可滑动地安装在夹持器壳体内并且可在外部位置之间移动,外部位置中,电梯框架的外端从包括位于其可用位置中的一个印记盒的平面向外定位,以及内部位置, 从平面向内缩回,电梯架被弹性偏压到外部位置; 用于将轴构件旋转到期望位置的选择旋钮; 并且每个印章盒能够通过在冲压件的轴构件的旋转平面中滑动而可拆卸地安装在轴构件上。
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