公开(公告)号：US20180209783A1

公开(公告)日：2018-07-26

申请号：US15878178

申请日：2018-01-23

Applicant: DISCO CORPORATION

Inventor： Keiji Nomaru ,  Arata Osaki ,  Akimasa Nakamoto

IPC: G01B11/24 ,  G01J1/42 ,  G01J1/04

CPC classification number: G01B11/24 ,  G01J1/0266 ,  G01J1/0403 ,  G01J1/0411 ,  G01J1/0414 ,  G01J1/0418 ,  G01J1/044 ,  G01J1/0444 ,  G01J1/0448 ,  G01J1/0462 ,  G01J1/4228 ,  G01J1/4257 ,  G01J2001/4242

Abstract: A spot shape detection apparatus for detecting the spot shape of a laser beam oscillated from a laser oscillator includes: a focusing leans for focusing the laser beam oscillated by the oscillator; a rotary body (mirror holder) in which a plurality of mirrors for reflecting the laser beam having passed through the focusing lens are disposed on concentric circles; a drive source (motor) for rotating the rotary body at a predetermined period; a beam splitter for branching return beams of the laser beam reflected by the plurality of mirrors of the rotary body; an imaging unit which is disposed in a direction in which the return beams are branched by the beam splitter and which images spot shapes of the return beams; and a display unit for displaying images obtained by imaging by the imaging unit, in relation with the plurality of mirrors.

公开(公告)号：US10132619B2

公开(公告)日：2018-11-20

申请号：US15878178

申请日：2018-01-23

Applicant: DISCO CORPORATION

Inventor： Keiji Nomaru ,  Arata Osaki ,  Akimasa Nakamoto

IPC: G01J1/00 ,  G01B11/24 ,  G01J1/42 ,  G01J1/04

Abstract: A spot shape detection apparatus for detecting the spot shape of a laser beam oscillated from a laser oscillator includes: a focusing leans for focusing the laser beam oscillated by the oscillator; a rotary body (mirror holder) in which a plurality of mirrors for reflecting the laser beam having passed through the focusing lens are disposed on concentric circles; a drive source (motor) for rotating the rotary body at a predetermined period; a beam splitter for branching return beams of the laser beam reflected by the plurality of mirrors of the rotary body; an imaging unit which is disposed in a direction in which the return beams are branched by the beam splitter and which images spot shapes of the return beams; and a display unit for displaying images obtained by imaging by the imaging unit, in relation with the plurality of mirrors.