公开(公告)号：US20150036200A1

公开(公告)日：2015-02-05

申请号：US14327890

申请日：2014-07-10

Applicant: DENSO CORPORATION ,  National University Corporation TOYOHASHI UNIVERSITY OF TECHNOLOGY

Inventor： Noriyuki MATSUSHITA ,  Hiroyuki WADO ,  Makoto ISHIDA ,  Daisuke AKAI

IPC: G02B26/08 ,  H01L41/187 ,  H01L41/297 ,  H01L41/08 ,  G02B26/10

CPC classification number: H01L41/1876 ,  G02B6/3578 ,  G02B26/0858 ,  G02F2001/294 ,  H01L41/0478 ,  H01L41/081 ,  H01L41/0815 ,  H01L41/29 ,  H01L41/297 ,  H01L41/316 ,  H01L41/318 ,  H01L41/319 ,  Y10T29/42

Abstract: A piezoelectric element includes a substrate having a first surface with a predetermined orientation; a lower electrode layered on the first surface of the substrate; a piezoelectric thin film layered on the lower electrode and having a piezoelectric body; and an upper electrode layered on the piezoelectric thin film. A voltage is to be impressed between the lower electrode and the upper electrode to deform the piezoelectric thin film. The piezoelectric thin film is epitaxially grown on the lower electrode using a physical vapor deposition or a chemical vapor deposition.

Abstract translation: 压电元件包括​​具有预定取向的第一表面的基板; 在所述基板的第一表面上分层的下电极; 压电薄膜层叠在下电极上并具有压电体; 以及层叠在压电薄膜上的上电极。 在下电极和上电极之间施加电压以使压电薄膜变形。 使用物理气相沉积或化学气相沉积在下电极上外延生长压电薄膜。

公开(公告)号：US20210184100A1

公开(公告)日：2021-06-17

申请号：US17116099

申请日：2020-12-09

Applicant: DENSO CORPORATION ,  TOKYO UNIVERSITY OF SCIENCE FOUNDATION

Inventor： Noriyuki MATSUSHITA ,  Yoshihiro KOZAWA ,  Kazuhiko KANOH ,  Yumi TANAKA

IPC: H01L41/18 ,  H01L41/187 ,  H01L41/113 ,  H02N1/08

Abstract: An electret includes a substrate and an electret layer formed above a surface of the substrate. The electret layer is a composite metal compound containing two or more different metal elements, and is obtained by subjecting a thin film mainly composed of an inorganic dielectric material having a bandgap energy of 4 eV or more to a polarization treatment.

公开(公告)号：US20150295159A1

公开(公告)日：2015-10-15

申请号：US14683199

申请日：2015-04-10

Applicant: DENSO CORPORATION

Inventor： Akira WADA ,  Noriyuki MATSUSHITA

IPC: H01L41/047 ,  H01L41/187

CPC classification number: G02B26/0858 ,  H01L41/0533 ,  H01L41/0805 ,  H01L41/0933 ,  H01L41/0946 ,  H01L41/1876

Abstract: A piezoelectric element includes a first electrode having a film shape and provided on a base portion, a second electrode having a film shape and opposed to the first electrode on an opposite side of the first electrode from the base portion, a piezoelectric film interposed between the first electrode and the second electrode and partially covered with the second electrode, and an insulation film covering the second electrode and the piezoelectric film with extending over at least a part of an outer edge of the second electrode. The insulation film may cover a whole of the outer edge of the second electrode without covering an inner region of the second electrode. Accordingly, a withstand voltage of the piezoelectric film can be increased.

Abstract translation: 压电元件包括​​具有薄膜形状并设置在基部上的第一电极，具有薄膜形状并与第一电极相对的第一电极相对于第一电极的第二电极与基部相对的第二电极，夹在第一电极之间的压电薄膜 第一电极和第二电极，并且部分地被第二电极覆盖，以及覆盖第二电极和压电膜的绝缘膜，其延伸在第二电极的外边缘的至少一部分上。 绝缘膜可以覆盖第二电极的整个外边缘而不覆盖第二电极的内部区域。 因此，可以提高压电膜的耐压。