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公开(公告)号:US20220326539A1
公开(公告)日:2022-10-13
申请号:US17708027
申请日:2022-03-30
Applicant: CORNING INCORPORATED
Inventor: Reinhard Moritz Malchus , Tobias Christian Roeder
Abstract: Methods, systems, devices, and substrates are described. In some examples, an apparatus may include optical components configured to adjust an input to a laser cutting optic for modifying a substrate (e.g., an optically transmissive substrate). In some examples, the optical components may include a beam deflector, a first optic configured to output a first laser beam with a first beam width, and a second optic configured to output a second laser beam with a second beam width. In some examples, the beam deflector may modify an optical path of a pulsed laser (e.g., through the first optic or through the second optic), which may result in an input to the laser cutting optic having a beam width corresponding to the first optic or the second optic. The different input beam widths may modify a line focus intensity of an output of the laser cutting optic when modifying the substrate.
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公开(公告)号:US20230132480A1
公开(公告)日:2023-05-04
申请号:US17976184
申请日:2022-10-28
Applicant: CORNING INCORPORATED
IPC: B23K26/53 , B23K26/0622 , B23K26/073 , B23K26/06
Abstract: The present invention relates to a method of laser processing a glass substrate, the method comprising: focusing a pulsed laser beam into a laser beam focal line into the glass substrate, the glass substrate having a feature formed on a first surface of the glass substrate, wherein a first portion of the laser beam focal line is focused at the first surface of the glass substrate and a second portion of the laser beam focal line is focused at a second surface of the glass substrate that is opposite the first surface, wherein a first set of rays exiting the optical arrangement at a first radius R1, as measured from a center of the optical arrangement forms the first portion of the laser beam focal line with a deflection angle of θ1, wherein a second set of rays exiting the optical arrangement at a second radius R2, as measured from the center of the optical arrangement forms the second portion of the laser beam focal line with a deflection angle of θ2, wherein R1 is less than R2; and wherein θ1 is greater than θ2, and wherein θ1 decreases to θ2 from R1 to R2 in one of a step-wise decrease or a graded decrease; and translating the glass substrate and the laser beam relative to each other along a first contour, thereby laser forming a plurality of defect lines along the first contour within the substrate.
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公开(公告)号:US12233474B2
公开(公告)日:2025-02-25
申请号:US17329578
申请日:2021-05-25
Applicant: CORNING INCORPORATED
Inventor: Valdemaras Juzumas , Reinhard Moritz Malchus , Sasha Marjanovic , Garrett Andrew Piech , Vytautas Sabonis , Ralf Joachim Terbrueggen
IPC: B23K26/0622 , B23K26/06 , B23K26/18 , B23K26/53 , B23K103/00
Abstract: A method of laser processing a transparent workpiece includes directing a pulsed laser beam into the transparent workpiece. The pulsed laser beam includes pulse bursts having 2 sub-pulses per pulse burst or more, each pulse burst of the pulsed laser beam has a burst duration Tbd of 380 ns or greater; and the pulsed laser beam forms a pulsed laser beam focal line in the transparent workpiece, the pulsed laser beam focal line inducing absorption in the transparent workpiece, the induced absorption producing a defect in the transparent workpiece. The pulsed laser beam focal line includes a wavelength λ, a spot size wo, and a Rayleigh range ZR that is greater than F D π w o 2 λ , where FD is a dimensionless divergence factor comprising a value of 10 or greater.
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公开(公告)号:US20210379695A1
公开(公告)日:2021-12-09
申请号:US17329578
申请日:2021-05-25
Applicant: CORNING INCORPORATED
Inventor: Valdemaras Juzumas , Reinhard Moritz Malchus , Sasha Marjanovic , Garrett Andrew Piech , Vytautas Sabonis , Ralf Joachim Terbrueggen
IPC: B23K26/0622 , B23K26/18 , B23K26/06 , B23K26/53
Abstract: A method of laser processing a transparent workpiece includes directing a pulsed laser beam into the transparent workpiece. The pulsed laser beam includes pulse bursts having 2 sub-pulses per pulse burst or more, each pulse burst of the pulsed laser beam has a burst duration Tbd of 380 ns or greater; and the pulsed laser beam forms a pulsed laser beam focal line in the transparent workpiece, the pulsed laser beam focal line inducing absorption in the transparent workpiece, the induced absorption producing a defect in the transparent workpiece. The pulsed laser beam focal line includes a wavelength λ, a spot size wo, and a Rayleigh range ZR that is greater than F D π w o 2 λ , where FD is a dimensionless divergence factor comprising a value of 10 or greater.
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公开(公告)号:US20240174544A1
公开(公告)日:2024-05-30
申请号:US18505578
申请日:2023-11-09
Applicant: CORNING INCORPORATED
Inventor: Florian Franz Aigner , Justyna Teresa Grabowska-Petzel , Reinhard Moritz Malchus , Pavel Pashchenko
IPC: C03B33/033 , B23K26/382 , B23K26/402 , C03B33/02
CPC classification number: C03B33/033 , B23K26/382 , B23K26/402 , C03B33/0222 , B23K2103/54
Abstract: The disclosure relates to a method of laser processing a glass material, including: forming a plurality of perforations within the glass material along a cutting line, wherein the material comprises a first surface and a second surface opposing the first surface, wherein the perforation extends through a thickness of the material from the first surface to the second surface, and wherein a first crack is formed between adjacent perforations; applying water to the cutting line; and applying one of chemical or mechanical energy to the glass material at the cutting line to separate the material.
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公开(公告)号:US20240116140A1
公开(公告)日:2024-04-11
申请号:US18374068
申请日:2023-09-28
Applicant: CORNING INCORPORATED
Inventor: Sterling Michael Clarke , Reinhard Moritz Malchus , Sasha Marjanovic , Garrett Andrew Piech , Alranzo Boh Ruffin , Sergio Tsuda
CPC classification number: B23K26/53 , B23K26/40 , B23K2103/54
Abstract: A method of processing a transparent workpiece comprises directing a defect-forming laser beam to an impingement surface of a transparent workpiece, the defect-forming laser beam having a numerical aperture from 0.10 to 0.25, the transparent workpiece having a textured surface, the textured surface having an Ra value of greater than or equal to 0.5 μm.
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