公开(公告)号：US20170059815A1

公开(公告)日：2017-03-02

申请号：US15141302

申请日：2016-04-28

Applicant: BOE TECHNOLOGY GROUP CO., LTD.

Inventor： Xiangjun TIAN ,  Xueyong WANG

IPC: G02B7/20 ,  B08B7/00

CPC classification number: G02B27/0006 ,  H01S3/034 ,  H01S3/0346 ,  H01S3/08059

Abstract: A laser device is provided. The laser device includes: a laser tube having an opening in both ends thereof, and a fixing apparatus on at least one of the ends of the laser tube. The opening in at least one of the ends of the laser tube is sealed by the fixing apparatus. A movable assembly and a window are provided on the fixing apparatus. The window is movable relatively to the opening of the laser tube when being driven by the movable assembly, to change a transmission position of a laser light generated by the laser tube on the window.

Abstract translation: 提供激光装置。 激光装置包括：在其两端具有开口的激光管和在激光管的至少一个端部上的定影装置。 激光管的至少一个端部的开口由定影装置密封。 在定影装置上设有可动组件和窗。 当由可移动组件驱动时，窗口可相对于激光管的开口移动，以便改变激光管在窗口上产生的激光的透射位置。

公开(公告)号：US20170103876A1

公开(公告)日：2017-04-13

申请号：US15035074

申请日：2015-11-13

Applicant: BOE TECHNOLOGY GROUP CO., LTD.

Inventor： Xiangjun TIAN ,  Seiji FUJINO

IPC: H01J37/32 ,  C23C16/52 ,  C23C16/50 ,  H01L21/02 ,  C23C16/24

CPC classification number: H01J37/32568 ,  C23C16/24 ,  C23C16/50 ,  C23C16/52 ,  H01J37/32357 ,  H01J37/32449 ,  H01J37/32522 ,  H01J37/32541 ,  H01J37/32605 ,  H01J37/32752 ,  H01J2237/3321 ,  H01L21/02532 ,  H01L21/02592 ,  H01L21/02689 ,  H01L21/02691 ,  H05H1/46 ,  H05H2001/466

Abstract: A plasma generator, a plasma annealing device, a deposition crystallization apparatus and a plasma annealing process are disclosed. The plasma generator includes: a gas chamber; a gas intake member configured to introduce a gas into the gas chamber; a cathode and an anode that are configured to apply an electric field to the gas introduced into the gas chamber to ionize the gas into plasma; a cooling water circulation member configured to control a temperature of the plasma generator; and a plasma beam outlet disposed on a top face of the gas chamber. The plasma annealing device including the plasma generator can generate a plasma beam, which can be used in annealing to amorphous silicon and crystallize the amorphous silicon to polycrystalline silicon.

公开(公告)号：US20140123863A1

公开(公告)日：2014-05-08

申请号：US14066912

申请日：2013-10-30

Applicant: BOE TECHNOLOGY GROUP CO., LTD.

Inventor： Xiangjun TIAN ,  Zhongyuan SUN ,  Yifang CHU

IPC: B30B15/14 ,  B30B1/18

CPC classification number: B30B15/148 ,  B30B1/181 ,  B30B15/062 ,  B30B15/168 ,  B30B15/24

Abstract: The embodiment of present invention discloses a pressing apparatus comprising: a static pressing plate; a movable pressing plate opposing the static pressing plate and comprising a plurality of movable press-blocks; a pressure sensor provided in each respective movable press-blocks; a plurality of drive units provided corresponding to the plurality of movable press-blocks, each drive unit being connected with one movable press-block for driving the corresponding movable press-block; a control unit electrically connected with each drive unit and each pressure sensor, the control unit being configured to compare the detected pressure value from each pressure sensor with a predefined pressure value, and adjust the pressure value between the corresponding movable press-block and the static pressing plate by means of the corresponding drive unit based on the comparison result.

Abstract translation: 本发明的实施例公开了一种压制装置，包括：静压板; 与所述静压板相对的并且包括多个可移动压块的活动压板; 设置在每个可动压块中的压力传感器; 多个驱动单元，与多个可移动的压块相对设置，每个驱动单元与一个可动的压块连接，用于驱动相应的活动压块; 与每个驱动单元和每个压力传感器电连接的控制单元，所述控制单元被配置为将来自每个压力传感器的检测压力值与预定压力值进行比较，并且调整相应的可移动压块与静态压力值之间的压力值 基于比较结果，通过相应的驱动单元按压板。