公开(公告)号：US20210151605A1

公开(公告)日：2021-05-20

申请号：US16642638

申请日：2019-03-04

Applicant: BOE TECHNOLOGY GROUP CO., LTD.

Inventor： Zhi WANG ,  Guangcai YUAN ,  Feng GUAN ,  Chen XU ,  Xueyong WANG ,  Jianhua DU ,  Chao LI ,  Lei CHEN

IPC: H01L29/786 ,  H01L29/66

Abstract: The present disclosure relates to a thin film transistor and a manufacturing method thereof. The thin film transistor includes a substrate, a first semiconductor layer, a gate dielectric layer, and a gate electrode sequentially stacked on the substrate, the first semiconductor layer has a first portion located in a channel region of the thin film transistor and a second portion in source/drain regions of the thin film transistor and located on both sides of the first portion, the second portion and first sub-portions of the first portion adjacent to the second portion include an amorphous semiconductor material, a second sub-portion of the first portion between the first sub-portions includes a polycrystalline semiconductor material, and a second semiconductor layer located in the source/drain regions and in contact with the second portion, wherein a conductivity of the second semiconductor layer is higher than a conductivity of the amorphous semiconductor material.

公开(公告)号：US20170010230A1

公开(公告)日：2017-01-12

申请号：US15182953

申请日：2016-06-15

Applicant: BOE TECHNOLOGY GROUP CO., LTD.

Inventor： Xueyong WANG ,  Qingrong REN ,  Lu WANG ,  Yan CHEN

IPC: G01N27/02 ,  H01L21/67

CPC classification number: H01L21/6838 ,  H01L21/67288

Abstract: A transfer apparatus includes a supporting member, a free electron excitation device and a detection device; the free electrons excitation device is configured to excite semiconductor material of an object to be transferred to generate free electrons, and the detection device is configured to detect whether material of a surface of the transferred object in contact with the support surface of the supporting member is conductive under excitation by the free electron excitation device. A laser annealing apparatus comprising the transfer apparatus is further provided.

Abstract translation: 传送装置包括支撑构件，自由电子激发装置和检测装置; 自由电子激发装置被配置为激发要转移的物体的半导体材料以产生自由电子，并且检测装置被配置为检测与支撑构件的支撑表面接触的被转移物体的表面的材料是否为 通过自由电子激发装置在激发下导电。 还提供了包括转印装置的激光退火装置。

公开(公告)号：US20170059815A1

公开(公告)日：2017-03-02

申请号：US15141302

申请日：2016-04-28

Applicant: BOE TECHNOLOGY GROUP CO., LTD.

Inventor： Xiangjun TIAN ,  Xueyong WANG

IPC: G02B7/20 ,  B08B7/00

CPC classification number: G02B27/0006 ,  H01S3/034 ,  H01S3/0346 ,  H01S3/08059

Abstract: A laser device is provided. The laser device includes: a laser tube having an opening in both ends thereof, and a fixing apparatus on at least one of the ends of the laser tube. The opening in at least one of the ends of the laser tube is sealed by the fixing apparatus. A movable assembly and a window are provided on the fixing apparatus. The window is movable relatively to the opening of the laser tube when being driven by the movable assembly, to change a transmission position of a laser light generated by the laser tube on the window.

Abstract translation: 提供激光装置。 激光装置包括：在其两端具有开口的激光管和在激光管的至少一个端部上的定影装置。 激光管的至少一个端部的开口由定影装置密封。 在定影装置上设有可动组件和窗。 当由可移动组件驱动时，窗口可相对于激光管的开口移动，以便改变激光管在窗口上产生的激光的透射位置。

公开(公告)号：US20190113814A1

公开(公告)日：2019-04-18

申请号：US16027689

申请日：2018-07-05

Applicant: BOE TECHNOLOGY GROUP CO., LTD.

Inventor： Xueyong WANG ,  Yan CHEN ,  Feng WANG ,  Guozhong JIANG

IPC: G02F1/1362 ,  G02B26/02 ,  H01L21/268

Abstract: The present disclosure relates to the field of display technology, and in particular relates to a light shielding structure and a laser device. The light shielding structure comprises a first light shielding plate group and a second light shielding plate group, each of the first light shielding plate group and the second light shielding plate group comprises at least one light shielding plate, and the at least one light shielding plate can be moved relatively for forming at least two light transmitting regions. The light shielding structure can realize partial scanning of multiple target regions at a time, thereby saving production time, increasing production efficiency, saving water and electricity and other resources, and prolonging the laser lifetime.