Transducer component, manufacturing method thereof, and transducer

    公开(公告)号:US12281006B2

    公开(公告)日:2025-04-22

    申请号:US17641284

    申请日:2021-01-15

    Abstract: A transducer element includes array elements. At least one array element includes a substrate and a first electrode layer, a diaphragm layer, and a second electrode layer that are sequentially stacked thereon. An array element has a working region including working sub-regions, and a peripheral region surrounding the working region; overlapping portions of the first electrode layer, the diaphragm layer and the second electrode layer form cells, and a cell is located in a working sub-region; portions of the diaphragm layer and portions of the first electrode layer that are located in the working sub-regions have cavities therebetween, and the portions of the diaphragm layer are configured to vibrate in a direction perpendicular to the substrate between the first and second electrode layers; two adjacent cavities communicate; the diaphragm layer has release holes located in the peripheral region; and a release hole communicates with at least one cavity.

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