公开(公告)号：US11566322B2

公开(公告)日：2023-01-31

申请号：US16096665

申请日：2016-05-24

Applicant: Applied Materials, Inc.

Inventor： Xi Huang ,  Fei Peng ,  Kiran Krishnapur ,  Ruiping Wang ,  Jrjyan Jerry Chen ,  Steven Verhaverbeke ,  Robert Jan Visser

IPC: C23C16/04 ,  C23C16/44 ,  H01L51/52 ,  H01L51/56

Abstract: A mask assembly (100) includes a mask frame (102) and a mask screen (104), both of the mask frame (102) and the mask screen (104) made of a metallic material, and a metal coating (125) disposed on exposed surfaces of one or both of the mask frame (102) and the mask screen (104).