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公开(公告)号：US20230002268A1
公开(公告)日：2023-01-05
申请号：US17836162
申请日：2022-06-09
发明人： Wei-Sheng LEI , Mahendran CHIDAMBARAM , Kangkang WANG , Ludovic GODET , Visweswaren SIVARAMAKRISHNAN
IPC分类号： C03B33/02 , B23K26/0622 , B23K26/55
摘要： A method and apparatus for substrate dicing are described. The method includes utilizing a laser to dice a substrate along a dicing path to form a perforated line around each device within the substrate. The dicing path is created by exposing the substrate to bursts of laser pulses at different locations around each device. The laser pulses are delivered to the substrate and may have a pulse repetition frequency of greater than about 25 MHz, a pulse width of less than about 15 picoseconds, and a laser wavelength of about 1.0 μm to about 5 μm.
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公开(公告)号：US20230123795A1
公开(公告)日：2023-04-20
申请号：US17945861
申请日：2022-09-15
发明人： Wei-Sheng LEI , Zhengping YAO , Mahendran CHIDAMBARAM , Kangkang WANG , Zhihong John LIN , Ludovic GODET , Visweswaren SIVARAMAKRISHNAN
IPC分类号： B23K26/364 , B23K26/0622
摘要： A method and apparatus for dicing optical devices from a substrate are described herein. The method includes the formation of a plurality of trenches using radiation pulses delivered to the substrate. The radiation pulses are delivered in a pattern to form trenches with varying depth as the trenches extend outward from a top surface of the optical device. The varying depth of the trenches provides edges of each of the optical devices which are slanted. The radiation pulses are UV radiation pulses and are delivered in bursts around the silhouette of the optical devices.
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公开(公告)号：US20230094653A1
公开(公告)日：2023-03-30
申请号：US18061327
申请日：2022-12-02
发明人： Yaseer Arafath AHAMED , Kangkang WANG , Benjamin B. RIORDON , James D. STRASSNER , Ludovic GODET
IPC分类号： B25B11/00
摘要： Embodiments described herein provide for devices and methods for retaining optical devices. The devices and methods described herein provide for retention of the substrate without contacting sensitive portions of the substrate. The devices and methods utilize retention pads or vacuum pins to contact the exclusion zones i.e., inactive areas of the substrate to retain the substrate and prevent the substrate from moving laterally. Additionally, a holding force retains the substrate in the vertical direction, without contacting the substrate. The methods provide for adjusting the devices to account for multiple geometries of the substrate. The methods further provide for adjusting the devices, such as adjusting a gap between the optical device and a suction pad, to alter the holding force of the devices on the optical devices.
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公开(公告)号：US20240075492A1
公开(公告)日：2024-03-07
申请号：US18506799
申请日：2023-11-10
发明人： Kangkang WANG , Yaseer Arafath AHAMED , Yige GAO , Benjamin B. RIORDON , Rami HOURANI , James D. STRASSNER , Ludovic GODET , Thinh NGUYEN
摘要： An optical device coating assembly is provided. The optical device coating assembly includes a substrate support operable to retain an optical device substrate. The coating assembly further includes a first actuator connected to the substrate support. The first actuator is configured to rotate the substrate support. The coating assembly includes a holder configured to hold a coating applicator against an edge of the optical device substrate when the optical device substrate is rotated on the substrate support and a second actuator operable to apply a force on the holder in a direction towards the substrate support. The second actuator is a constant force actuator.
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公开(公告)号：US20220161396A1
公开(公告)日：2022-05-26
申请号：US17237533
申请日：2021-04-22
发明人： Yaseer Arafath AHAMED , Kangkang WANG , Benjamin B. RIORDON , James D. STRASSNER , Ludovic GODET
IPC分类号： B25B11/00
摘要： Embodiments described herein provide for devices and methods for retaining optical devices. The devices and methods described herein provide for retention of the substrate without contacting sensitive portions of the substrate. The devices and methods utilize retention pads or vacuum pins to contact the exclusion zones i.e., inactive areas of the substrate to retain the substrate and prevent the substrate from moving laterally. Additionally, a holding force retains the substrate in the vertical direction, without contacting the substrate. The methods provide for adjusting the devices to account for multiple geometries of the substrate. The methods further provide for adjusting the devices, such as adjusting a gap between the optical device and a suction pad, to alter the holding force of the devices on the optical devices.
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公开(公告)号：US20230273355A1
公开(公告)日：2023-08-31
申请号：US18173365
申请日：2023-02-23
发明人： Yingdong LUO , Kangkang WANG , Wei-Sheng LEI , Xiaopei DENG , Erica CHEN , Kang LUO , Daihua ZHANG , Rami HOURANI , Ludovic GODET
IPC分类号： G02B5/18 , G02B1/14 , B23K26/402 , B23K26/60
CPC分类号： G02B5/1847 , G02B1/14 , B23K26/402 , B23K26/60
摘要： Methods of dicing optical devices from an optical device substrate are disclosed. The methods include disposing a protective coating only over the optical devices. The optical device substrate includes the optical devices disposed on the surface of the optical device substrate with areas therebetween. The areas of the optical device substrate are exposed by the protective coating. The protective coating includes a polymer, a solvent, and an additive. The methods further include curing the protective coating via a cure process so that the protective coating is water-soluble after the solvent is removed by the cure process, dicing the optical devices from the optical device substrate by projecting a laser beam to the areas between the optical devices, and exposing the protective coating to water to remove the protective coating from the optical devices that are diced.
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公开(公告)号：US20230227276A1
公开(公告)日：2023-07-20
申请号：US18151668
申请日：2023-01-09
CPC分类号： B65G49/065 , B25J15/0028 , B25J15/0616 , B65G2203/041 , B65G2203/0216
摘要： Embodiments of the present disclosure generally relate to optical devices. More specifically, embodiments described herein relate to apparatuses and methods for gripping optical devices. In an embodiment, an apparatus for gripping an optical device includes a base coupled to a proximal end of a stem extending from a bottom surface of the base. The apparatus also includes a plurality of arms movably coupled to the bottom surface of the base. The plurality of arms are coupled to an actuator operable to move the plurality of arms laterally along a X-Y plane parallel to the bottom surface of the base. In some embodiments, the apparatus includes a suction pad operable to provide a noncontact vertical suction force.
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公开(公告)号：US20220221723A1
公开(公告)日：2022-07-14
申请号：US17647361
申请日：2022-01-07
发明人： Yige GAO , Rami HOURANI , Xiaopei DENG , Amita JOSHI , Ludovic GODET , Kangkang WANG
摘要： Embodiments described herein include a waveguide combiner having an edge coated with an optically absorbent composition and a method of coating the edge of the waveguide combiner with the optically absorbent composition. The optically absorbent composition includes one or more types of nanoparticles or microparticles, at least one of one or more dyes or one or more pigments, and a polymer matrix of one or more binders. The method includes producing an optically absorbent formulation. The optically absorbent formulation includes one or more types of particles, at least one of one or more dyes or one or more pigments, one or more binders, and one or more solvents. The optically absorbent formulation is applied on an edge of a waveguide combiner using an edge blackening tool. The formulation is cured with radiation to form the optically absorbent composition.
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公开(公告)号：US20220212223A1
公开(公告)日：2022-07-07
申请号：US17456410
申请日：2021-11-24
发明人： Kangkang WANG , Yaseer Arafath AHAMED , Yige GAO , Benjamin B. RIORDON , Rami HOURANI , James D. STRASSNER , Ludovic GODET , Thinh NGUYEN
摘要： An optical device coating assembly is provided. The optical device coating assembly includes a substrate support operable to retain an optical device substrate. The coating assembly further includes a first actuator connected to the substrate support. The first actuator is configured to rotate the substrate support. The coating assembly includes a holder configured to hold a coating applicator against an edge of the optical device substrate when the optical device substrate is rotated on the substrate support and a second actuator operable to apply a force on the holder in a direction towards the substrate support. The second actuator is a constant force actuator.
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