公开(公告)号：US20180233317A1

公开(公告)日：2018-08-16

申请号：US15431098

申请日：2017-02-13

Applicant: Applied Materials, Inc.

Inventor： Georg JOST ,  Ludwig LEDL ,  Bernhard G. MUELLER ,  George TZENG

IPC: H01J37/02 ,  H01J37/18 ,  H01J37/26

CPC classification number: H01J37/026 ,  H01J37/18 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/0047

Abstract: A charge control apparatus for controlling charge on a substrate in a vacuum chamber is described. The apparatus includes a light source emitting a beam of radiation having a divergence; a mirror configured to reflect the beam of radiation, wherein a curvature of a mirror surface of the curved mirror is configured to reduce the divergence of the beam of radiation; and a mirror support configured to rotatably support the curved mirror, wherein a rotation of the mirror varies the direction of the beam of radiation.

公开(公告)号：US20180351164A1

公开(公告)日：2018-12-06

申请号：US15570988

申请日：2015-05-15

Applicant: Applied Materials, Inc.

Inventor： Anke HELLMICH ,  Thomas Werner ZILBAUER ,  Jose Manuel DIEGUEZ-CAMPO ,  Stefan KELLER ,  Georg JOST

IPC: H01M4/1395 ,  H01M4/04 ,  H01M4/38 ,  H01M4/40 ,  H01M10/052 ,  H01M6/40

CPC classification number: H01M4/1395 ,  H01M4/0423 ,  H01M4/0426 ,  H01M4/382 ,  H01M4/405 ,  H01M6/40 ,  H01M10/052 ,  H01M10/0585

Abstract: The present disclosure provides a masking device for use in a lithium deposition process in the manufacturing of thin film batteries. The masking device includes a mask portion made of a metal or metal alloy, and one or more openings in the mask portion, wherein the one or more openings are configured to allow particles of a deposition material to pass through the mask portion, and wherein a size of each opening of the one or more openings, is at least 0.5 cm2.