公开(公告)号：US11889740B2

公开(公告)日：2024-01-30

申请号：US17152689

申请日：2021-01-19

Applicant: Applied Materials, Inc.

Inventor： Yeishin Tung ,  Byung Sung Kwak ,  Robert Jan Visser ,  Gangadhar Banappanavar ,  Dinesh Kabra

IPC: H01L51/56 ,  B05D1/00 ,  H10K71/00

CPC classification number: H10K71/00 ,  B05D1/60

Abstract: An organic light-emitting diode (OLED) deposition system includes two deposition chambers, a transfer chamber between the two deposition chambers, a metrology system having one or more sensors to perform measurements of the workpiece within the transfer chamber, and a control system to cause the system to form an organic light-emitting diode layer stack on the workpiece. Vacuum is maintained around the workpiece while the workpiece is transferred between the two deposition chambers and while retaining the workpiece within the transfer chamber. The control system is configured to cause the two deposition chambers to deposit two layers of organic material onto the workpiece, and to receive a first plurality of measurements of the workpiece in the transfer chamber from the metrology system.

公开(公告)号：US12137601B2

公开(公告)日：2024-11-05

申请号：US18207549

申请日：2023-06-08

Applicant: Applied Materials, Inc.

Inventor： Yeishin Tung ,  Byung Sung Kwak ,  Robert Jan Visser ,  Gangadhar Banappanavar ,  Dinesh Kabra

IPC: H10K71/00 ,  B05D1/00

Abstract: An organic light-emitting diode (OLED) deposition system includes two deposition chambers, a transfer chamber between the two deposition chambers, a metrology system having one or more sensors to perform measurements of the workpiece within the transfer chamber, and a control system to cause the system to form an organic light-emitting diode layer stack on the workpiece. Vacuum is maintained around the workpiece while the workpiece is transferred between the two deposition chambers and while retaining the workpiece within the transfer chamber. The control system is configured to cause the two deposition chambers to deposit two layers of organic material onto the workpiece, and to receive a first plurality of measurements of the workpiece in the transfer chamber from the metrology system.

公开(公告)号：US11856833B2

公开(公告)日：2023-12-26

申请号：US17152688

申请日：2021-01-19

Applicant: Applied Materials, Inc.

Inventor： Yeishin Tung ,  Byung Sung Kwak ,  Robert Jan Visser ,  Guoheng Zhao ,  Todd J. Egan ,  Dinesh Kabra ,  Gangadhar Banappanavar

IPC: H01L51/56 ,  H10K71/00 ,  C23C14/56 ,  C23C14/24 ,  C23C14/50 ,  C23C14/54 ,  C23C14/12 ,  H10K71/70 ,  H10K71/16

CPC classification number: H10K71/00 ,  C23C14/12 ,  C23C14/24 ,  C23C14/50 ,  C23C14/54 ,  C23C14/568 ,  H10K71/164 ,  H10K71/70

Abstract: An organic light-emitting diode (OLED) deposition system includes two deposition chambers, a transfer chamber between the two deposition chambers, a metrology system having one or more sensors to perform measurements of the workpiece within the transfer chamber, and a control system to cause the system to form an organic light-emitting diode layer stack on the workpiece. Vacuum is maintained around the workpiece while the workpiece is transferred between the two deposition chambers and while retaining the workpiece within the transfer chamber. The control system is configured to cause the two deposition chambers to deposit two layers of organic material onto the workpiece, and to receive a first plurality of measurements of the workpiece in the transfer chamber from the metrology system.

公开(公告)号：US20230320183A1

公开(公告)日：2023-10-05

申请号：US18207549

申请日：2023-06-08

Applicant: Applied Materials, Inc.

Inventor： Yeishin Tung ,  Byung Sung Kwak ,  Robert Jan Visser ,  Gangadhar Banappanavar ,  Dinesh Kabra

IPC: H10K71/00 ,  B05D1/00

CPC classification number: H10K71/00 ,  B05D1/60

Abstract: An organic light-emitting diode (OLED) deposition system includes two deposition chambers, a transfer chamber between the two deposition chambers, a metrology system having one or more sensors to perform measurements of the workpiece within the transfer chamber, and a control system to cause the system to form an organic light-emitting diode layer stack on the workpiece. Vacuum is maintained around the workpiece while the workpiece is transferred between the two deposition chambers and while retaining the workpiece within the transfer chamber. The control system is configured to cause the two deposition chambers to deposit two layers of organic material onto the workpiece, and to receive a first plurality of measurements of the workpiece in the transfer chamber from the metrology system.

公开(公告)号：US10935492B2

公开(公告)日：2021-03-02

申请号：US16258392

申请日：2019-01-25

Applicant: Applied Materials, Inc.

Inventor： Avishek Ghosh ,  Byung-Sung Kwak ,  Todd Egan ,  Robert Jan Visser ,  Gangadhar Banappanavar ,  Dinesh Kabra

IPC: G01N21/00 ,  G01N21/64 ,  H01L51/52

Abstract: An apparatus for determining a characteristic of a photoluminescent (PL) layer comprises: a light source that generates an excitation light that includes light from the visible or near-visible spectrum; an optical assembly configured to direct the excitation light onto a PL layer; a detector that is configured to receive a PL emission generated by the PL layer in response to the excitation light interacting with the PL layer and generate a signal based on the PL emission; and a computing device coupled to the detector and configured to receive the signal from the detector and determine a characteristic of the PL layer based on the signal.

公开(公告)号：US11927535B2

公开(公告)日：2024-03-12

申请号：US18129503

申请日：2023-03-31

Applicant: Applied Materials, Inc.

Inventor： Avishek Ghosh ,  Byung-Sung Kwak ,  Todd Egan ,  Robert Jan Visser ,  Gangadhar Banappanavar ,  Dinesh Kabra

IPC: G01N23/00 ,  G01N21/64 ,  H10K50/10

CPC classification number: G01N21/6489 ,  G01N21/6408 ,  H10K50/182

Abstract: An apparatus for determining a characteristic of a photoluminescent (PL) layer comprises: a light source that generates an excitation light that includes light from the visible or near-visible spectrum; an optical assembly configured to direct the excitation light onto a PL layer; a detector that is configured to receive a PL emission generated by the PL layer in response to the excitation light interacting with the PL layer and generate a signal based on the PL emission; and a computing device coupled to the detector and configured to receive the signal from the detector and determine a characteristic of the PL layer based on the signal.

公开(公告)号：US11662317B2

公开(公告)日：2023-05-30

申请号：US17188485

申请日：2021-03-01

Applicant: Applied Materials, Inc.

Inventor： Avishek Ghosh ,  Byung-Sung Kwak ,  Todd Egan ,  Robert Jan Visser ,  Gangadhar Banappanavar ,  Dinesh Kabra

IPC: G01N21/00 ,  G01N21/64 ,  H01L51/52

CPC classification number: G01N21/6489 ,  G01N21/6408 ,  H01L51/5287

Abstract: An apparatus for determining a characteristic of a photoluminescent (PL) layer comprises: a light source that generates an excitation light that includes light from the visible or near-visible spectrum; an optical assembly configured to direct the excitation light onto a PL layer; a detector that is configured to receive a PL emission generated by the PL layer in response to the excitation light interacting with the PL layer and generate a signal based on the PL emission; and a computing device coupled to the detector and configured to receive the signal from the detector and determine a characteristic of the PL layer based on the signal.

公开(公告)号：US12225808B2

公开(公告)日：2025-02-11

申请号：US18395081

申请日：2023-12-22

Applicant: Applied Materials, Inc.

Inventor： Yeishin Tung ,  Byung Sung Kwak ,  Robert Jan Visser ,  Guoheng Zhao ,  Todd J. Egan ,  Dinesh Kabra ,  Gangadhar Banappanavar

IPC: C23C14/12 ,  C23C14/24 ,  C23C14/50 ,  C23C14/54 ,  C23C14/56 ,  H10K71/00 ,  H10K71/16 ,  H10K71/70

Abstract: An organic light-emitting diode (OLED) deposition system includes two deposition chambers, a transfer chamber between the two deposition chambers, a metrology system having one or more sensors to perform measurements of the workpiece within the transfer chamber, and a control system to cause the system to form an organic light-emitting diode layer stack on the workpiece. Vacuum is maintained around the workpiece while the workpiece is transferred between the two deposition chambers and while retaining the workpiece within the transfer chamber. The control system is configured to cause the two deposition chambers to deposit two layers of organic material onto the workpiece, and to receive a first plurality of measurements of the workpiece in the transfer chamber from the metrology system.

公开(公告)号：US20240130210A1

公开(公告)日：2024-04-18

申请号：US18395081

申请日：2023-12-22

Applicant: Applied Materials, Inc.

Inventor： Yeishin Tung ,  Byung Sung Kwak ,  Robert Jan Visser ,  Guoheng Zhao ,  Todd J. Egan ,  Dinesh Kabra ,  Gangadhar Banappanavar

IPC: H10K71/00 ,  C23C14/12 ,  C23C14/24 ,  C23C14/50 ,  C23C14/54 ,  C23C14/56 ,  H10K71/16 ,  H10K71/70

CPC classification number: H10K71/00 ,  C23C14/12 ,  C23C14/24 ,  C23C14/50 ,  C23C14/54 ,  C23C14/568 ,  H10K71/164 ,  H10K71/70

Abstract: An organic light-emitting diode (OLED) deposition system includes two deposition chambers, a transfer chamber between the two deposition chambers, a metrology system having one or more sensors to perform measurements of the workpiece within the transfer chamber, and a control system to cause the system to form an organic light-emitting diode layer stack on the workpiece. Vacuum is maintained around the workpiece while the workpiece is transferred between the two deposition chambers and while retaining the workpiece within the transfer chamber. The control system is configured to cause the two deposition chambers to deposit two layers of organic material onto the workpiece, and to receive a first plurality of measurements of the workpiece in the transfer chamber from the metrology system.