公开(公告)号：US20240018646A1

公开(公告)日：2024-01-18

申请号：US17865255

申请日：2022-07-14

Applicant: Applied Materials, Inc.

Inventor： ANANTHA SUBRAMANI ,  YANG GUO ,  JOHN FORSTER ,  WADE HARRELSON ,  ANDREW TOMKO ,  ANTHONY CHAN ,  SATHYA SWAROOP GANTA ,  MIKE MURTAGH ,  SANJEEV BALUJA

IPC: C23C14/50 ,  H01L21/683 ,  H01L21/687

CPC classification number: C23C14/505 ,  H01L21/6833 ,  H01L21/68785

Abstract: Embodiments disclosed herein include semiconductor processing tools. In an embodiment, the semiconductor processing tool comprises a chamber, a chuck within the chamber, where the chuck is configured to rotate, a pedestal holder around the chuck, and a utility column coupled to the chuck. In an embodiment, the utility column comprises a magnetic coupler to enable rotation of portions of the utility column and the chuck, and a rotary electrical feedthrough.

公开(公告)号：US20180142342A1

公开(公告)日：2018-05-24

申请号：US15814684

申请日：2017-11-16

Applicant: APPLIED MATERIALS, INC.

Inventor： GOICHI YOSHIDOME ,  KEITH A. MILLER ,  HAMID TAVASSOLI ,  ANDREW TOMKO

IPC: C23C14/34 ,  H01J37/34 ,  C23C14/56

Abstract: Embodiments of collimators and process chambers incorporating same are provided herein. In some embodiments, a collimator for use in a substrate processing chamber includes a ring; an adapter surrounding the ring and having an inner annular wall; and a plurality of spokes extending from the inner annular wall and intersecting at a central axis of the collimator.