公开(公告)号：US20240018646A1

公开(公告)日：2024-01-18

申请号：US17865255

申请日：2022-07-14

Applicant: Applied Materials, Inc.

Inventor： ANANTHA SUBRAMANI ,  YANG GUO ,  JOHN FORSTER ,  WADE HARRELSON ,  ANDREW TOMKO ,  ANTHONY CHAN ,  SATHYA SWAROOP GANTA ,  MIKE MURTAGH ,  SANJEEV BALUJA

IPC: C23C14/50 ,  H01L21/683 ,  H01L21/687

CPC classification number: C23C14/505 ,  H01L21/6833 ,  H01L21/68785

Abstract: Embodiments disclosed herein include semiconductor processing tools. In an embodiment, the semiconductor processing tool comprises a chamber, a chuck within the chamber, where the chuck is configured to rotate, a pedestal holder around the chuck, and a utility column coupled to the chuck. In an embodiment, the utility column comprises a magnetic coupler to enable rotation of portions of the utility column and the chuck, and a rotary electrical feedthrough.