公开(公告)号：US20240385535A1

公开(公告)日：2024-11-21

申请号：US18570140

申请日：2022-05-30

Applicant: ASML NETHERLANDS B.V.

Inventor： Gijs KRAMER ,  Siegried Alexander TROMP ,  Tjarco LINDEIJER ,  Adrianus Petrus Cornelis HELLEMONS ,  Bas Johannes Petrus ROSET

IPC: G03F7/00 ,  H01L21/687

Abstract: A structure for use on a base surface of a substrate holder, wherein the structure is substantially planar with a substrate holder facing surface that is both securable to the base surface of the substrate holder and also removable from the base surface of the substrate holder, the structure having a plurality of apertures therethrough that are arranged such that a plurality of burls on the base surface may pass through the respective apertures, wherein the diameter of the apertures is in the range 50 μm to 1000 μm and the pitch between adjacent apertures is in the range 1 mm to 3 mm.

公开(公告)号：US20240186145A1

公开(公告)日：2024-06-06

申请号：US18286485

申请日：2022-04-04

Applicant: ASML Netherlands B.V.

Inventor： Monim AZIMI ,  Tjarco LINDEIJER ,  Michel DIJKSTRA ,  Siegfried Alexander TROMP ,  Ashwin SRIDHAR

IPC: H01L21/285 ,  H01L21/02 ,  H01L21/67 ,  H01L21/673

CPC classification number: H01L21/28556 ,  H01L21/02126 ,  H01L21/02529 ,  H01L21/67098 ,  H01L21/67383

Abstract: A surface treatment device for treating a surface of a substrate support, wherein the surface treatment device comprises a contacting surface that is configured to contact the surface of the substrate support. The contacting surface is configured with at least a first contour with a first centre of curvature and a second contour with a second centre of curvature, wherein the first centre of curvature and the second centre of curvature are non-coincident points.

公开(公告)号：US20210263418A1

公开(公告)日：2021-08-26

申请号：US17260649

申请日：2019-06-27

Applicant: ASML NETHERLANDS B.V.

Inventor： Bert Dirk SCHOLTEN ,  Peter Andreas Maria BILLEKENS ,  Tiannan GUAN ,  Tjarco LINDEIJER ,  Harold Anton MEHAGNOUL ,  Jimmy Matheus Wilhelmus VAN DE WINKEL ,  Cas Johannes Petrus Maria VAN NUENEN ,  Hendrikus Theodorus Jacobus Franciscus VAN VERSEVELD ,  Marcus Martinus Petrus Adrianus VERMEULEN

IPC: G03F7/20 ,  B24B37/14 ,  B24B37/16

Abstract: A tool for modifying substrate support elements of a substrate holder, the substrate support elements having support surfaces for supporting a substrate, the tool includes a main body having a main body surface, and multiple protrusions from the main body surface, the multiple protrusions having distal ends configured to contact the support surfaces to modify the substrate support elements. Furthermore, a lithographic apparatus and a method comprising such a tool are provided.