公开(公告)号：US20240385535A1

公开(公告)日：2024-11-21

申请号：US18570140

申请日：2022-05-30

Applicant: ASML NETHERLANDS B.V.

Inventor： Gijs KRAMER ,  Siegried Alexander TROMP ,  Tjarco LINDEIJER ,  Adrianus Petrus Cornelis HELLEMONS ,  Bas Johannes Petrus ROSET

IPC: G03F7/00 ,  H01L21/687

Abstract: A structure for use on a base surface of a substrate holder, wherein the structure is substantially planar with a substrate holder facing surface that is both securable to the base surface of the substrate holder and also removable from the base surface of the substrate holder, the structure having a plurality of apertures therethrough that are arranged such that a plurality of burls on the base surface may pass through the respective apertures, wherein the diameter of the apertures is in the range 50 μm to 1000 μm and the pitch between adjacent apertures is in the range 1 mm to 3 mm.