公开(公告)号：US20220197155A1

公开(公告)日：2022-06-23

申请号：US17603812

申请日：2020-03-25

Applicant: ASML NETHERLANDS B.V.

Inventor： Sander Jeroen HERMANUSSEN ,  Johannes Petrus Martinus Bernardus VERMEULEN ,  Hans BUTLER ,  Bas JANSEN ,  Michael Marinus Anna STEUR

IPC: G03F7/20 ,  H01L21/687

Abstract: An object table configured to hold an object on a holding surface, the object table including: a main body; a plurality of burls extending from the main body, end surfaces of the burls defining the holding surface; an actuator assembly; and a further actuator assembly, wherein the actuator assembly is configured to deform the main body to generate a long stroke out-of-plane deformation of the holding surface based on shape information of the object that is to be held and the further actuator assembly is configured to generate a short stroke out-of-plane deformation of the holding surface.

公开(公告)号：US20230400783A1

公开(公告)日：2023-12-14

申请号：US18027343

申请日：2021-09-27

Applicant: ASML NETHERLANDS B.V.

Inventor： Michael Marinus Anna STEUR ,  Bas JANSEN ,  Andre Bernardus JEUNINK ,  Johannes Adrianus Cornelis Maria PIJNENBURG

IPC: G03F7/00

CPC classification number: G03F7/70716

Abstract: An object table including: a holding surface for holding an object; and an actuator arrangement configured to exert a holding force on the object for holding the object to the holding surface, wherein the actuator arrangement is further configured to decrease a strain in the object caused by the holding force by sequentially detaching and re-attaching portions of the object from the holding surface, while the object is held to the holding surface.

公开(公告)号：US20230004092A1

公开(公告)日：2023-01-05

申请号：US17778054

申请日：2020-11-20

Applicant: ASML NETHERLANDS B.V.

Inventor： Michael Marinus Anna STEUR ,  Nicolaas TEN KATE ,  Siegfried Alexander TROMP ,  Koen Gerhardus WINKELS ,  Antonius Franciscus Johanne DE GROOT

IPC: G03F7/20 ,  H01L21/687

Abstract: Substrate tables and methods of manufacturing substrate supports for substrate tables. In one arrangement, a plurality of holes are formed through a base member. A burl formation member is joined to the base member. A plurality of burl structures are formed in the burl formation member. Each burl structure includes a distal surface that contacts, in use, a substrate being supported. Each burl structure has an opening to at least one of the holes formed through the base member.