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公开(公告)号：US20210318624A1
公开(公告)日：2021-10-14
申请号：US17267708
申请日：2019-07-15
Applicant: ASML Netherlands B.V.
Inventor： Bas JANSEN , Hans BUTLER , Alexander Pascal DIJKSHOORN
Abstract: The invention provides a substrate support arranged to support a substrate, comprising piezo a actuator, further comprising a first pair of electrodes, a second pair of electrodes and a piezo material having a first surface and a second surface. The first surface is arranged along a first direction and second direction. The first pair of electrodes comprises a first electrode arranged on the first surface and a second electrode arranged on the second surface. The second pair of electrodes is arranged to shear the piezo material. The first pair of electrodes is arranged to elongate the piezo material in a third direction perpendicular to the first direction and second direction. The first electrode is divided into at least two parts and is arranged to rotate the first surface and the second surface relatively to each other about the first direction wherein the piezo actuator is arranged to support the substrate.
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公开(公告)号：US20230400783A1
公开(公告)日：2023-12-14
申请号：US18027343
申请日：2021-09-27
Applicant: ASML NETHERLANDS B.V.
Inventor： Michael Marinus Anna STEUR , Bas JANSEN , Andre Bernardus JEUNINK , Johannes Adrianus Cornelis Maria PIJNENBURG
IPC: G03F7/00
CPC classification number: G03F7/70716
Abstract: An object table including: a holding surface for holding an object; and an actuator arrangement configured to exert a holding force on the object for holding the object to the holding surface, wherein the actuator arrangement is further configured to decrease a strain in the object caused by the holding force by sequentially detaching and re-attaching portions of the object from the holding surface, while the object is held to the holding surface.
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公开(公告)号：US20220236651A1
公开(公告)日：2022-07-28
申请号：US17629202
申请日：2020-06-30
Applicant: ASML Netherlands B.V.
Abstract: Disclosed is a thermo-mechanical actuator (100) comprising a piezo¬electric module (110), the piezo-electric module comprising at least one piezo-electric element (120), wherein the thermo-mechanical actuator is configured to: receive a thermal actuation signal (132) for controlling a thermal behaviour of the piezo-electric module, or provide a thermal sensing signal (132) representative of a thermal state of the piezo-electric module, and, wherein the thermo-mechanical actuator is configured to: receive a mechanical actuation (134) signal for controlling a mechanical behaviour of the piezo-electric module, or provide a mechanical sensing signal (134) representative of a mechanical state of the piezo-electric module.
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公开(公告)号：US20220197157A1
公开(公告)日：2022-06-23
申请号：US17602616
申请日：2020-03-10
Applicant: ASML Netherlands B.V.
Inventor： Bas JANSEN , Samer Abdelmoeti Abuzeid ABDELMOETI , Hans BUTLER , Koen Johan Frederik LOONEN , Aditya SINGH , Ruben Etienne Johan Rinus VANDERVELDEN
IPC: G03F7/20
Abstract: The invention relates to an object positioning system including: an actuator system and a measurement system. The actuator system comprises an actuator made of a material with predominantly electrostrictive properties and substantially no net polarization in absence of an electric field. The actuator system is configured to apply an electric field to the actuator, which electric field comprises a bias electric field and an actuation electric field superimposed on the bias electric field, a field strength of said actuation electric field being equal to or smaller than a field strength of the bias electric field. The measurement system is configured to measure an electrical property of the actuator which is representative for a mechanical state of the actuator. The measurement system comprises a bridge circuit including an actuator and a reference element having electrical properties matched to the electrical properties of the actuator.
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公开(公告)号：US20240402621A1
公开(公告)日：2024-12-05
申请号：US18803195
申请日：2024-08-13
Applicant: ASML Netherlands B.V.
Abstract: Disclosed is a thermo-mechanical actuator comprising a piezo-electric module, the piezo-electric module comprising at least one piezo-electric element, wherein the thermo-mechanical actuator is configured to receive a thermal actuation signal for controlling a thermal behaviour of the piezo-electric module, or provide a thermal sensing signal representative of a thermal state of the piezo-electric module. The thermo-mechanical actuator is configured to receive a mechanical actuation signal for controlling a mechanical behaviour of the piezo-electric module, or provide a mechanical sensing signal representative of a mechanical state of the piezo-electric module. And wherein the thermal actuation signal is configured to create a heat flux within the piezo-electric module and wherein the mechanical actuation signal is configured to deform the piezo-electric module.
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Patent Agency Ranking
6.发明申请公开(公告)号：US20190179233A1
公开(公告)日：2019-06-13
申请号：US16321867
申请日：2017-06-29
Applicant: ASML NETHERLANDS B.V.
Inventor： Hans BUTLER , Wim SYMENS , Bas JANSEN
IPC: G03F7/20
CPC classification number: G03F7/70775 , G03F7/70725 , G03F7/70825 , H02N2/062
Abstract: A positioning system including: a first body; a second body; and an actuator arranged between the first body and the second body to position the first body relative to the second body, wherein the actuator includes a first piezoelectric actuator and a second piezoelectric actuator arranged in series, wherein the first piezoelectric actuator has a first hysteresis, wherein the second piezoelectric actuator has a second hysteresis smaller than the first hysteresis, and wherein the second piezoelectric actuator has a positioning range at least equal to the first hysteresis.
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公开(公告)号：US20240402622A1
公开(公告)日：2024-12-05
申请号：US18699654
申请日：2022-10-27
Applicant: ASML NETHERLANDS B.V.
Inventor： Johannes Petrus Martinus Bernardus VERMEULEN , Johannes Adrianus Leonardus DE GOEIJ , René Wilhelmus Antonius Hubertus LEENAARS , Bas JANSEN , Ron Geeraard Catharina DE BRUIJN
Abstract: A coupling having a variable stiffness is disclosed. The coupling includes: a deformable component and a support being movably arranged with respect to each other, wherein the deformable component includes a viscoelastic material, wherein the support has a recess configured to receive the deformable component, wherein the deformable component is configured to deform in volumetric deformation when, in use, a force is applied to the deformable component, and wherein a shape of the deformable component and a shape of the support are configured such that the variable stiffness gradually increases as a function of an amount of the force. A stage apparatus may have the coupling.
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公开(公告)号：US20220326627A1
公开(公告)日：2022-10-13
申请号：US17608760
申请日：2020-05-12
Applicant: ASML NETHERLANDS B.V.
Inventor： Hans BUTLER , Bas JANSEN
Abstract: An actuator assembly including a first piezo actuator and a second piezo actuator. The piezo actuator has a correction unit configured to determine an output voltage difference representing a difference between a voltage at the output terminal of the first piezo actuator and a voltage at the output terminal of the second piezo actuator, and a first power correction for correcting the first power signal and/or a second power correction for correcting the second power signal, based on the output voltage difference.
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公开(公告)号：US20220197155A1
公开(公告)日：2022-06-23
申请号：US17603812
申请日：2020-03-25
Applicant: ASML NETHERLANDS B.V.
Inventor： Sander Jeroen HERMANUSSEN , Johannes Petrus Martinus Bernardus VERMEULEN , Hans BUTLER , Bas JANSEN , Michael Marinus Anna STEUR
IPC: G03F7/20 , H01L21/687
Abstract: An object table configured to hold an object on a holding surface, the object table including: a main body; a plurality of burls extending from the main body, end surfaces of the burls defining the holding surface; an actuator assembly; and a further actuator assembly, wherein the actuator assembly is configured to deform the main body to generate a long stroke out-of-plane deformation of the holding surface based on shape information of the object that is to be held and the further actuator assembly is configured to generate a short stroke out-of-plane deformation of the holding surface.
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10.发明申请公开(公告)号：US20220113636A1
公开(公告)日：2022-04-14
申请号：US17428223
申请日：2020-01-03
Applicant: ASML Netherlands B.V.
Inventor： Hans BUTLER , Bas JANSEN , Cornelius Adrianus Lambertus DE HOON
Abstract: The invention relates to an electronic system for an accelerometer having a piezoelectric element and a first mechanical resonance frequency, comprising: a) a damping circuit configured to: —receive an acceleration signal from the piezoelectric element; —electronically dampen an amplitude of the first mechanical resonance frequency; and—generate a damped acceleration signal, b) an extender configured to: —receive the damped acceleration signal; —extend the frequency response; and—output an extended damped acceleration signal, wherein the extender is configured to have a first electronic anti-resonance frequency matching the damped first mechanical resonance frequency, and to have a frequency response between the first electronic anti-resonance frequency and a higher second frequency that is substantially opposite to a corresponding frequency response of the combination of the accelerometer and the damping circuit.
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