Invention Application
- Patent Title: METHOD OF MANUFACTURING A SUBSTRATE SUPPORT FOR A LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, METHOD OF USE
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Application No.: US17778054Application Date: 2020-11-20
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Publication No.: US20230004092A1Publication Date: 2023-01-05
- Inventor: Michael Marinus Anna STEUR , Nicolaas TEN KATE , Siegfried Alexander TROMP , Koen Gerhardus WINKELS , Antonius Franciscus Johanne DE GROOT
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Priority: EP19214460.8 20191209,EP20183998.2 20200703
- International Application: PCT/EP2020/082988 WO 20201120
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H01L21/687
Abstract:
Substrate tables and methods of manufacturing substrate supports for substrate tables. In one arrangement, a plurality of holes are formed through a base member. A burl formation member is joined to the base member. A plurality of burl structures are formed in the burl formation member. Each burl structure includes a distal surface that contacts, in use, a substrate being supported. Each burl structure has an opening to at least one of the holes formed through the base member.
Information query
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