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1.发明授权公开(公告)号：US10061213B2
公开(公告)日：2018-08-28
申请号：US15505885
申请日：2015-07-20
发明人： Johannes Antonius Gerardus Akkermans , Ruud Antonius Catharina Maria Beerens , Sander Christiaan Broers , Jeroen Johannes Theodorus Hendrikus De Best , Adrianus Marinus Wouter Heeren , George Alois Leonie Leenknegt , Bo Lenssen , Hendrikus Johannes Schellens , Peter Van Der Krieken , Theodorus Petrus Maria Cadee , Jan Van Eijk , Richard Henricus Adrianus Van Lieshout
CPC分类号： G03F7/70775 , G01L1/16 , G01P15/0915 , G01P15/18 , G03F7/70716 , G03F7/70783 , G03F7/7085 , H01L41/1132
摘要： A sensor includes two shear-mode piezoelectric transducers, wherein each piezoelectric transducer has a bottom surface and a top surface, wherein the top surfaces of the piezoelectric transducers are rigidly connected to each other, and wherein the bottom surfaces of the piezoelectric transducers are configured to be attached to an object to be measured.
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公开(公告)号：US09268211B2
公开(公告)日：2016-02-23
申请号：US14038533
申请日：2013-09-26
发明人： Jan Van Eijk , Engelbertus Antonius Fransiscus Van Der Pasch , Johannes Petrus Martinus Bernardus Vermeulen
CPC分类号： G03F1/44 , G03B27/42 , G03F7/704 , G03F7/70516 , G03F7/70775 , G03F7/7085
摘要： The invention relates to a lithographic apparatus including an illumination system configured to condition a radiation beam, a patterning device support constructed to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam, a substrate support constructed to hold a substrate; a projection system configured to project the patterned radiation beam onto a target portion of the substrate, and an encoder-type measurement system configured to at least during projection of the patterned radiation beam onto a target portion of the substrate continuously determine a position quantity of a patterning device supported on the patterning device support using a grid or grating provided on the patterning device.
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公开(公告)号：US10095123B2
公开(公告)日：2018-10-09
申请号：US15129380
申请日：2015-04-01
发明人： Marinus Maria Johannes Van De Wal , Wilhelmus Henricus Theodorus Maria Aangenent , Jeroen Johannes Theodorus Hendrikus De Best , Jan Van Eijk
摘要： A control system for a positioning system, for positioning a driven object, e.g. in a lithographic apparatus, in N dimensions has M sensors, where M>N. A transformation module converts the M measurements by the sensors into a positional estimate in N dimensions taking into account compliance of the driven object.
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公开(公告)号：US09897926B2
公开(公告)日：2018-02-20
申请号：US15115876
申请日：2015-01-20
发明人： Wilhelmus Henricus Theodorus Maria Aangenent , Lucas Franciscus Koorneef , Theo Anjes Maria Ruijl , Stanley Constant Johannes Martinus Van Den Berg , Stan Henricus Van Der Meulen , Jan Van Eijk , Pieter Hubertus Godefrida Wullms , Richard Henricus Adrianus Van Lieshout
CPC分类号： G03F7/70716 , G03F7/70758 , G03F7/709 , H01L21/68
摘要： A stage positioning system, includes a first body, a second body and a coupling arranged to couple the first body and the second body to each other. The coupling includes a visco-elastic element arranged to couple the first body and the second body to each other. The stage positioning system may further include a sensor to provide a signal representative of a position of the first body. The stage positioning system may further include an actuator to move the first body. The second body may be arranged to couple the actuator and the coupling to each other.
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5.发明授权公开(公告)号：US10012914B2
公开(公告)日：2018-07-03
申请号：US15505885
申请日：2015-07-20
发明人： Johannes Antonius Gerardus Akkermans , Ruud Antonius Catharina Maria Beerens , Sander Christiaan Broers , Jeroen Johannes Theodorus Hendrikus De Best , Adrianus Marinus Wouter Heeren , George Alois Leonie Leenknegt , Bo Lenssen , Hendrikus Johannes Schellens , Peter Van Der Krieken , Theodorus Petrus Maria Cadee , Jan Van Eijk , Richard Henricus Adrianus Van Lieshout
摘要： A sensor includes two shear-mode piezoelectric transducers, wherein each piezoelectric transducer has a bottom surface and a top surface, wherein the top surfaces of the piezoelectric transducers are rigidly connected to each other, and wherein the bottom surfaces of the piezoelectric transducers are configured to be attached to an object to be measured.
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